• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.7 s.250
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• pp.773-778
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• 2006

High-aspect-ratio nano-hair or nano-pillar arrays have great potential in a variety of applications. In this study, we present a simple and cost-effective replication method of high-aspect-ratio polymer nano-hair arrays. Highly ordered nano-porous AAO (anodic aluminum oxide) template was utilized as a reusable nano-mold insert. The AAO nano-mold insert fabricated by the two-step anodization process in this study had close- packed straight nano-pores, which enabled us to replicate densely arranged nano-hairs. The diameter, depth and pore spacing of the nano-pores in the fabricated AAO nano-mold insert were about 200nm, $1{\mu}m$ and 450nm, respectively. For the replication of polymer nano-hair arrays, a UV nano embossing process was applied as a mass production method. The UV nano embossing machine was developed by our group for the purpose of replicating nano-structures by means of non-transparent nano-mold inserts. Densely arranged high-aspect-ratio nano-hair arrays have been successfully manufactured by means of the UV nano embossing process with the AAO nano-mold insert under the optimum processing condition.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1232-1233
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• 2008

딥 코팅 공정을 통하여 콜로이드 $Fe_2O_3$ 나노입자의 단일층을 다공성의 AAO (Anodic Aluminum Oxide) 기판에 형성하였다. 나노입자의 평균 사이즈는 20 nm이고, 각각의 나노입자는 올레익 산(oleic acid) 으로 둘러싸여 옥탄(octane) 용액 안에 분산되어있다. AAO 기판은 알루미늄에 높은 균일성과 고밀도의 기공(pore) 형성을 위해 두 단계 양극산화공정을 통해 제작하였다. AAO 기공의 지름은 ${\sim}$30에서 100 nm 이고, 딥 코팅 공정의 속도는 0.1 mm/sec 로 하여 AAO의 나노기공 안에 나노입자의 단일층을 성공적으로 형성시켰다.

• Journal of Electrical Engineering and Technology
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• v.10 no.6
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• pp.2364-2367
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• 2015

In this study, we fabricated an electrolyte-insulator-metal (EIM) device incorporating a high-k Al₂O₃ sensing membrane using a porous anodic aluminum oxide (AAO) through a two-step anodizing process for pH detection. The structural properties were observed by field-emission scanning electron microscopy (FE-SEM) and X-ray diffraction patterns (XRD). Electrochemical measurements taken consisted of capacitance-voltage (C-V), hysteresis voltage and drift rates. The average pore diameter and depth of the AAO membrane with a pore-widening time of 20 min were 123nm and 273.5nm, respectively. At a pore-widening time of 20 min, the EIM device using anodic aluminum oxide exhibited a high sensitivity (56mV/pH), hysteresis voltage (6.2mV) and drift rate (0.25mV/pH).

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.867-869
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• 2003

Vacuum tube arrays (VTA) with a submicron dimension were fabricated by using anodic aluminum oxide (AAO) nano-templates. The field emission characteristics of Ni nanowires show a turn-on voltage in the range of 11.0-14.0 V and a field enhancement factor in the range of 560-2790. The distance between the tips of Ni nanowires and the anode was much smaller than that between the tips and the anode of conventional designs.

• Journal of the Korean Electrochemical Society
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• v.12 no.1
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• pp.47-53
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• 2009

In this study, highly ordered AAO (Anodic Aluminum Oxide) with nanopores was prepared by commercial grade Al substrate containing 3.5 wt.% impurities through two step anodizing method. Nanopores of prepared AAO arrays were used as templates for preparing nanofiber. $TiO_2$ was deposited by using DP (deposition-precipitation) method into AAO pores to grow nanofiber. Au particles were loaded on this $TiO_2$ nanofiber which was grown vertically. Prepared 2 wt.% $Au/TiO_2$ nanofiber was characterized by XRD, SEM and Raman. The crystal structure was analyzed by the XRD. SEM was used to observe pore size and pore wall thickness. Photocatalytic activity of co-oxidation was compared with $TiO_2$ and $Au/TiO_2$ nanofiber on AAO arrays.

• Transactions of the Korean hydrogen and new energy society
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• v.17 no.1
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• pp.39-46
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• 2006

Highly ordered Li dispersed nickel oxide nanotubes were prepared with anodic aluminum oxide (AAO) template for hydrogen storage. Electron microscope results showed that uniform length and diameter of nickel oxide nanotubes were obtained. The wall thickness and outer diameter of nickel oxide nanotubes are about 40 - 50 nm and 200 - 400 nm, respectively. It was observed that the diameter of nickel oxide nanotubes is bigger than the pore diameter of AAO template. Li dispersed nickel oxide were consisted of nanoflakes and had structures of nanotubes and nanorods. For increasing the hydrogen adsorption and desorption capacity, the Li dispersed nickel oxide nanotubes were fluorinated. The fluorinated Li dispersed nickel oxide nanotubes showed 1.65 wt% of the hydrogen adsorption capacities at 77 K under 47 atm.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.1495-1496
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• 2011

Anodic aluminum oxide (AAO) nanotemplates for nano electronic device applications have been attracting increasing interest because of ease of fabrication, low cost process, and possible fabrication in large area. The size and density of the nanostructured materials can be controlled by changing the pore diameter and the pole density of AAO nanotemplate. In this paper, AAO nanotemplate was fabricated by second anodization method. In addition, effects of electrolyte and anodization voltate on the microstructure of porous alumina films were investigated. Vertically well aligned pores had the average pore sizes of 15-70 nm and the length of approximately 40 ${\mu}m$.

• Composites Research
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• v.36 no.3
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• pp.224-229
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• 2023

Due to the increasing demand for wearable devices and miniaturization of various electronic devices, the trend of nanofabrication in IT devices is underway. In order to overcome the limitations of battery size and capacity, there has been a lot of research interest in energy harvesting technology, also known as triboelectric nanogenerator. AAO(Anodic Aluminum oxide) coated with fluoride is a structure that includes an anode layer with high properties in the triboelectric series, an dielectric layer that helps transfer the triboelectrically generated charges to the electrode without loss, and the electrode. For these reasons, AAO has been a lot of research on its application to frictional energy harvesting nanogenerators. In this work, we analyzed the correlation of AAO between the surface morphology and thickness of the insulating layer by utilizing aluminum oxide, which is advantageous for the application of triboelectric nanogenerators, and adjusting the thickness of the insulating layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.10
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• pp.741-744
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• 2013

In this study, we fabricated anodic aluminum oxide (AAO) membrane by two step anodizing process for pH detection. The structural properties were observed by X-ray diffraction (XRD) and field emission scanning electron microscope (FE-SEM). Electrochemical measurements of the pH sensor have been performed in capacitance-voltage (C-V) and drift rates. The characterization of AAO membrane exhibited high sensitivity (99.1 mV/pH) at second anodizing time of 4 min.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.115-115
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• 2012

반도체/디스플레이 산업분야의 발전으로 진공 공정 기술력 또한 증진되고 있다. 반도체소자의 초미세화, 진공부품의 대면적화가 진행 되면서 진공 공정 중에 발생하는 오염입자를 제어하는 것이 이슈가 되고 있다. 오염입자는 플라즈마의 물리적인 부식과 활성이 높은 화학반응에 의해 진공부품에서 부식이 진행되어 발생하며, 이는 반도체 및 디스플레이 부품의 신뢰성측면과 수율저하 등 life time의 근본적인 문제점으로 대두되고 있다. 본 연구에서는 반도체/디스플레이 장비용 코팅부품으로 많이 사용되고 있는 Al2O3 코팅막을 이용하였으며, sealing time에 따른 Anodic Aluminum Oxide (AAO) electrode의 물성특성평가 및 진공평가기술을 이용하여 life time을 예측하는 연구를 수행하였다.