Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Manufacture of High-Aspect-Ratio Polymer Nano-Hair Arrays by UV Nano Embossing Process

UV 나노 엠보싱 공정을 이용한 고종횡비 고분자 나노 섬모 어레이 제작

  • 김동성 (포항공과대학교 기계공학과) ;
  • 이현섭 (포항공과대학교 기계공학과) ;
  • 이정현 (포항공과대학교 화학공학과) ;
  • 이건홍 (포항공과대학교 화학공학과) ;
  • 권태헌 (포항공과대학교 기계공학과)
  • Published : 2006.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

High-aspect-ratio nano-hair or nano-pillar arrays have great potential in a variety of applications. In this study, we present a simple and cost-effective replication method of high-aspect-ratio polymer nano-hair arrays. Highly ordered nano-porous AAO (anodic aluminum oxide) template was utilized as a reusable nano-mold insert. The AAO nano-mold insert fabricated by the two-step anodization process in this study had close- packed straight nano-pores, which enabled us to replicate densely arranged nano-hairs. The diameter, depth and pore spacing of the nano-pores in the fabricated AAO nano-mold insert were about 200nm, $1{\mu}m$ and 450nm, respectively. For the replication of polymer nano-hair arrays, a UV nano embossing process was applied as a mass production method. The UV nano embossing machine was developed by our group for the purpose of replicating nano-structures by means of non-transparent nano-mold inserts. Densely arranged high-aspect-ratio nano-hair arrays have been successfully manufactured by means of the UV nano embossing process with the AAO nano-mold insert under the optimum processing condition.

Keywords

References

  1. Xia, Y. and Whitesides, G.M., 1998, 'Soft Lithography,' Angew. Chem. Int. Ed., Vol. 37, pp. 550-575 https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
  2. Chou, S. Y. Krauss, P. R. and Renstrom, P. J., 1996, 'Nanoimprint Lithography,' J. Vac. Sci. Technol. B, Vol. 14, pp. 4129-4133 https://doi.org/10.1116/1.588605
  3. Haisma J., Verheijen M., van den Heuvel, K. and van den Berg, J., 1996, 'Mold-Assisted Nanolithography: A Process for Reliable Pattern Replication,' J. Vac. Sci. Technol. B, Vol. 14, pp. 4124-4128 https://doi.org/10.1116/1.588604
  4. Geim A. K., Dubonos S. V., Grigorieva I. V., Novoselov K. S., Zhukov A. A. and Shapoval S. Y., 2003, 'Microfabricated Adhesive Mimicking Gecko Foot-Hair,' Nat. Mater., Vol. 2, pp. 461-463 https://doi.org/10.1038/nmat917
  5. Sitti M. and Fearing R. S., 2003, 'Synthetic Gecko Foot-Hair Micro/Nano-Structures as Dry Adhesives,' J. Adhes. Sci. Technol., Vol. 17, pp. 1055-1073 https://doi.org/10.1163/156856103322113788
  6. Kaji, N., Tezuka, Y., Takamura Y., Ueda, M., Nishimoto, T., Nakanishi, H., Horiike, Y. and Baba, Y., 2004, 'Separation of Long DNA Molecules by Quartz Nanopillar Chips under a Direct Current Electric Field,' Anal. Chem., Vol. 76, pp. 15-22 https://doi.org/10.1021/ac030303mS0003-2700(03)00303-2
  7. Kuwabara, K., Ogino, M., Motowaki, S. and Miyauchi, A., 2004, 'Fluorescence Measurements of Nanopillars Fabricated by High-Aspect-Ratio Nanoprint Technology,' Microelectron. Eng., Vol. 73-74, pp. 752-756 https://doi.org/10.1016/j.mee.2004.03.047
  8. Schmitz, G. J., Brucker, Ch. and Jacobs P., 2005, 'Manufacture of High-Aspect-Ratio Micro-Hair Sensor Arrays,' J. Micromech. Microeng., Vol. 15, pp. 1904-1910 https://doi.org/10.1088/0960-1317/15/10/016
  9. Oner, D. and McCarthy T. J., 2000, 'Ultrahydrophobic Surfaces. Effects of Topography Length Scales on Wettability,' Langmuir, Vol. 16, pp. 7777-7782 https://doi.org/10.1021/la000598oS0743-7463(00)00598-9
  10. Lee, H. S., Kim, D. S. and Kwon, T. H., 2005, 'UV Nano Embossing Process for Replication of Polymer Nanostructures with UV Non-transparent Mold Inserts,' Proc. High Aspect Ratio Micro Structure Technology (HARMST) 2005, Gyeongju, Korea, pp. 232-233
  11. Lee, H. S., Kim, D. S. and Kwon, T. H., 2005, 'UV Nano Embossing Process for Polymer Nano Structures with Non-transparent Mold Insert,' accepted for publication https://doi.org/10.1007/s00542-006-0172-5
  12. Hwang, S.-K., Jeong, S.-H., Hwang, H.-Y., Lee, O.-J. and Lee, K.-H., 2002, 'Fabrication of Highly Ordered Pore Array in Anodic Aluminum Oxide,' Korean J. Chern. Eng., Vol. 19, pp. 467-473 https://doi.org/10.1007/BF02697158