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http://dx.doi.org/10.3795/KSME-A.2006.30.7.773

Manufacture of High-Aspect-Ratio Polymer Nano-Hair Arrays by UV Nano Embossing Process  

Kim Dong-Sung (포항공과대학교 기계공학과)
Lee Hyun-Sup (포항공과대학교 기계공학과)
Lee Jung-Hyun (포항공과대학교 화학공학과)
Lee Kun-Hong (포항공과대학교 화학공학과)
Kwon Tai-Hun (포항공과대학교 기계공학과)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.30, no.7, 2006 , pp. 773-778 More about this Journal
Abstract
High-aspect-ratio nano-hair or nano-pillar arrays have great potential in a variety of applications. In this study, we present a simple and cost-effective replication method of high-aspect-ratio polymer nano-hair arrays. Highly ordered nano-porous AAO (anodic aluminum oxide) template was utilized as a reusable nano-mold insert. The AAO nano-mold insert fabricated by the two-step anodization process in this study had close- packed straight nano-pores, which enabled us to replicate densely arranged nano-hairs. The diameter, depth and pore spacing of the nano-pores in the fabricated AAO nano-mold insert were about 200nm, $1{\mu}m$ and 450nm, respectively. For the replication of polymer nano-hair arrays, a UV nano embossing process was applied as a mass production method. The UV nano embossing machine was developed by our group for the purpose of replicating nano-structures by means of non-transparent nano-mold inserts. Densely arranged high-aspect-ratio nano-hair arrays have been successfully manufactured by means of the UV nano embossing process with the AAO nano-mold insert under the optimum processing condition.
Keywords
Anodic Aluminum Oxide; High-Aspect-Ratio; Nano-Hair; Nano-Mold Insert; Nano-Pillar; UV Nano Embossing;
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