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Side-Wall 공정을 이용한 WNx Self-Align Gate MESFET의 제작 및 특성

  • 문재경;김해천;곽명현;임종원;이재진
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.162-162
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    • 1999
  • 초고주파 집적회로의 핵심소자로 각광을 받고 있는 GaAs MESFET(MEtal-emiconductor)은 게이트 형성 공정이 가장 중요하며, WNx 내화금속을 이용한 planar 게이트 구조의 경우 임계전압(Vth:threshold voltage)의 균일도가 우수할 뿐만 아니라 특히 Side-wall을 이용한 self-align 게이트는 소오스 저항을 줄일 수 있어 고성능의 소자 제작을 가능하게 한다.(1) 본 연구의 핵심이 되는 Side-wall을 형성하기 위하여 PECVD법에 의한 SiOx 박막을 증착하고, 건식식각법을 이용하여 SiOx side-wall을 형성하였다. 이 공정을 이용하여 소오스 저항이 낮고 임계전압의 균일도가 우수한 고성능의 self-aligned gate MESFET을 제작하였다. 3inch GaAs 기판상에 이온주입법에 의한 채널 형성, d.c. 스퍼터링법에 의한 WNx 증착, PECVD법에 의한 SiOx 증착, MERIE(Magnetic Enhanced Reactive Ion Etcing)에 의한 Side-wall 형성, LDD(Lightly Doped Drain)와 N+ 이온주입, 그리고 RTA(Rapid Thermal Annealing)를 사용하여 활성화 공정을 수행하였다. 채널은 40keV, 4312/cm2로, LDD는 50keV, 8e12/cm2로 이온주입하였고, 4000A의 SiOx를 증착한 후 2500A의 Side-wall을 형성하였다. 옴익 접촉은 AuGe/Ni/Au 합금을 이용하였고, 소자의 최종 Passivation은 SiNx 박막을 이용하였다. 제작된 소자의 전기적 특성은 hp4145B parameter analyzer를 이용한 전압-전류 측정을 통하여 평가하였다. Side-wall 형성은 0.3$\mu\textrm{m}$ 이상의 패턴크기에서 수직으로 잘 형성되었고, 본 연궁에서는 게이트 길이가 0.5$\mu\textrm{m}$인 MESFET을 제작하였다. d.c. 특성 측정 결과 Vds=2.0V에서 임계전압은 -0.78V, 트랜스컨덕턴스는 354mS/mm, 그리고 포화전류는 171mA/mm로 평가되었다. 특히 본 연구에서 개발된 트랜지스터의 게이트 전압 변화에 따른 균일한 트랜스 컨덕턴스의 특성은 RF 소자로 사용할 때 마이크로 웨이브의 왜곡특성을 없애주기 때문에 균일한 신호의 전달을 가능하게 한다. 0.5$\mu\textrm{m}$$\times$100$\mu\textrm{m}$ 게이트 MESFET을 이용한 S-parameter 측정과 Curve fitting 으로부터 차단주파수 fT는 40GHz 이상으로 평가되었고, 특히 균일한 트랜스컨덕턴스의 경향과 함께 차단주파수 역시 게이트 바이어스, 즉 소오스-드레스인 전류의 변화에 따라 균일한 값을 보였다. 본 연구에서 개발된 Side-wall 공정은 게이트 길이가 0.3$\mu\textrm{m}$까지 작은 경우에도 사용가능하며, WNx self-align gate MEESFET은 낮은 소오스저항, 균일한 임계전압 특성, 그리고 높고 균일한 트랜스 컨덕턴스 특성으로 HHP(Hend-Held Phone) 및 PCS(Personal communication System)와 같은 이동 통신용 단말기의 MMICs(Monolithic Microwave Integrates Circuits)의 제작에 활용될 것으로 기대된다.

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Microwave Dielectric Properties of (Pb0.4Ca0.6)[(Fe1/2Nb1/2)1-x(Mg1/3Nb2/3)x]O3 Ceramics

  • Kim, Eung-Soo;Han, Ki-Moon;Kim, Jong-Hee;Yoon, Ki-Hyun
    • Journal of the Korean Ceramic Society
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    • v.40 no.4
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    • pp.323-327
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    • 2003
  • Microwave dielectric properties of (P $b_{0.4}$C $a_{0.6}$)[($Fe_{\frac{1}{2}}$N $b_{\frac{1}{2}}$)$_{1-x}$ (M $g_{1}$ 3/N $b_{2}$ 3/)x] $O_3$ (PCFMN) ceramics were investigated as a function of (M $g_{1}$ 3/N $b_{2}$ 3/)$^{4+}$ content (0.1$\leq$x$\leq$0.8). A single perovskite phase with the cubic structure was obtained through the given composition range. The unit cell volume was increased with (M $g_{1}$ 3/N $b_{2}$ 3/)$^{4+}$, due to the larger average ionic size of (M $g_{1}$ 3/N $b_{2}$ 3/)$^{4+}$ than that of ($Fe_{\frac{1}{2}}$N $b_{\frac{1}{2}}$)$^{4+}$ for B-site ion. Dielectric constant (K) and Temperature Coefficient of Resonant Frequency(TCF) of PCFMN ceramics were dependent on (M $g_{1}$ 3/N $b_{2}$ 3/)$^{4+}$ content due to the decrease of ionic polarizability and B-site bond valence, respectively. Qf value was decreased with (M $g_{1}$ 3/N $b_{2}$ 3/)$^{4+}$ content due to the decrease of grain size. Typically, K of 73.56, Qf of 5,074 GHz and TCF of -6.45 ppm/$^{\circ}C$ were obtained for the specimens with x=0.4 sintered at 125$0^{\circ}C$ for 3 h.125$0^{\circ}C$ for 3 h.

The Magnetic Properties of $Co_{84}\;Hf_{16}$ Thin Films by FMR (강자성공명을 이용한 $Co_{84}\;Hf_{16}$ 박막의 자기적 성질 연구)

  • 김기현;장재호;김영호
    • Journal of the Korean Magnetics Society
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    • v.7 no.4
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    • pp.191-195
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    • 1997
  • $Co_{84}Hf_{16}$ (1300$\AA$, 2150$\AA$) thin films were prepared by dc magnetron sputtering method. To investigate the uniaxial anisotrpy of the sample, the saturation and effective magnetization of the thin films were measured by VSM and FMR, respectively. The spectroscopic splitting g factor were estimated from the ferromagnetic resonance curves. For 1300$\AA$, 2150$\AA$, the effective magnetization was measured at the temperatures from T=77K to T=300K. The results were analyzed in terms of Bloch's law $M_s(T)=M_s(0)(1BT^{3/2}CT^{5/2}$. The Bloch coefficient B and C were determined by fitting. $M_{eff}(0)$ was obtained by extrapolating $M_{eff}$ to 0 K. From this result, the spinwave stiffness constants D was also determined and the exchange stiffness constants $A_{eff}$ were calculated by Kittel's resonance conditions.

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Family Structure and Succession of the Late Chosun Seen through Male Adoption (양자제도를 통해 본 조선후기 가족구조와 가계계승: 의성김씨 호구단자 분석을 중심으로)

  • Park, Soo-Mi
    • Korea journal of population studies
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    • v.30 no.2
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    • pp.71-95
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    • 2007
  • This paper attempts to identify the principle of family succession and family patterns of yangban in the late Chosun period through an analysis of male adaptation cases found in family registration records. The primary source of analysis is the family registration documents of Uiseong Kim's from the late 17th century to the early 20th century. As a result, it is found that there is a substantial change in the patterns of family from the early and mid Chosun period to the late Chosun period. The change is the strengthening of the principle of patriarchy succession through male adoption. Looking at the data as a whole, the average number of household members is increased and the membership of kinship also expanded. In contrast to the family patterns of the early Chosun period, not only the patterns of Uiseong Kim's family are predominately immediate family or collateral family but also the majority is extended family in the 18th and 19th centuries. The male adoption cases recorded in Uiseong Kim's family registration documents take up 33.8% of the male adoption cases in the entire family registration documents. This goes to show that the strengthening of the principle of primogeniture succession at a time when child mortality rate is very high resulted in the increase of male adoption. In conclusion, the late Chosun society was a society where the seat of primogeniture was much more important than immediate hereditary members in the family succession.

Evaluating Reverse Logistics Networks with Centralized Centers : Hybrid Genetic Algorithm Approach (집중형센터를 가진 역물류네트워크 평가 : 혼합형 유전알고리즘 접근법)

  • Yun, YoungSu
    • Journal of Intelligence and Information Systems
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    • v.19 no.4
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    • pp.55-79
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    • 2013
  • In this paper, we propose a hybrid genetic algorithm (HGA) approach to effectively solve the reverse logistics network with centralized centers (RLNCC). For the proposed HGA approach, genetic algorithm (GA) is used as a main algorithm. For implementing GA, a new bit-string representation scheme using 0 and 1 values is suggested, which can easily make initial population of GA. As genetic operators, the elitist strategy in enlarged sampling space developed by Gen and Chang (1997), a new two-point crossover operator, and a new random mutation operator are used for selection, crossover and mutation, respectively. For hybrid concept of GA, an iterative hill climbing method (IHCM) developed by Michalewicz (1994) is inserted into HGA search loop. The IHCM is one of local search techniques and precisely explores the space converged by GA search. The RLNCC is composed of collection centers, remanufacturing centers, redistribution centers, and secondary markets in reverse logistics networks. Of the centers and secondary markets, only one collection center, remanufacturing center, redistribution center, and secondary market should be opened in reverse logistics networks. Some assumptions are considered for effectively implementing the RLNCC The RLNCC is represented by a mixed integer programming (MIP) model using indexes, parameters and decision variables. The objective function of the MIP model is to minimize the total cost which is consisted of transportation cost, fixed cost, and handling cost. The transportation cost is obtained by transporting the returned products between each centers and secondary markets. The fixed cost is calculated by opening or closing decision at each center and secondary markets. That is, if there are three collection centers (the opening costs of collection center 1 2, and 3 are 10.5, 12.1, 8.9, respectively), and the collection center 1 is opened and the remainders are all closed, then the fixed cost is 10.5. The handling cost means the cost of treating the products returned from customers at each center and secondary markets which are opened at each RLNCC stage. The RLNCC is solved by the proposed HGA approach. In numerical experiment, the proposed HGA and a conventional competing approach is compared with each other using various measures of performance. For the conventional competing approach, the GA approach by Yun (2013) is used. The GA approach has not any local search technique such as the IHCM proposed the HGA approach. As measures of performance, CPU time, optimal solution, and optimal setting are used. Two types of the RLNCC with different numbers of customers, collection centers, remanufacturing centers, redistribution centers and secondary markets are presented for comparing the performances of the HGA and GA approaches. The MIP models using the two types of the RLNCC are programmed by Visual Basic Version 6.0, and the computer implementing environment is the IBM compatible PC with 3.06Ghz CPU speed and 1GB RAM on Windows XP. The parameters used in the HGA and GA approaches are that the total number of generations is 10,000, population size 20, crossover rate 0.5, mutation rate 0.1, and the search range for the IHCM is 2.0. Total 20 iterations are made for eliminating the randomness of the searches of the HGA and GA approaches. With performance comparisons, network representations by opening/closing decision, and convergence processes using two types of the RLNCCs, the experimental result shows that the HGA has significantly better performance in terms of the optimal solution than the GA, though the GA is slightly quicker than the HGA in terms of the CPU time. Finally, it has been proved that the proposed HGA approach is more efficient than conventional GA approach in two types of the RLNCC since the former has a GA search process as well as a local search process for additional search scheme, while the latter has a GA search process alone. For a future study, much more large-sized RLNCCs will be tested for robustness of our approach.

Estimation of Paddy Rice Growth Parameters Using L, C, X-bands Polarimetric Scatterometer (L, C, X-밴드 다편파 레이더 산란계를 이용한 논 벼 생육인자 추정)

  • Kim, Yi-Hyun;Hong, Suk-Young;Lee, Hoon-Yol
    • Korean Journal of Remote Sensing
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    • v.25 no.1
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    • pp.31-44
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    • 2009
  • The objective of this study was to measure backscattering coefficients of paddy rice using a L-, C-, and X-band scatterometer system with full polarization and various angles during the rice growth period and to relate backscattering coefficients to rice growth parameters. Radar backscattering measurements of paddy rice field using multifrequency (L, C, and X) and full polarization were conducted at an experimental field located in National Academy of Agricultural Science (NAAS), Suwon, Korea. The scatterometer system consists of dual-polarimetric square horn antennas, HP8720D vector network analyzer ($20\;MHz{\sim}20\;GHz$), RF cables, and a personal computer that controls frequency, polarization and data storage. The backscattering coefficients were calculated by applying radar equation for the measured at incidence angles between $20^{\circ}$ and $60^{\circ}$ with $5^{\circ}$ interval for four polarization (HH, VV, HV, VH), respectively. We measured the temporal variations of backscattering coefficients of the rice crop at L-, C-, X-band during a rice growth period. In three bands, VV-polarized backscattering coefficients were higher than hh-polarized backscattering coefficients during rooting stage (mid-June) and HH-polarized backscattering coefficients were higher than VV-, HV/VH-polarized backscattering coefficients after panicle initiation stage (mid-July). Cross polarized backscattering coefficients in X-band increased towards the heading stage (mid-Aug) and thereafter saturated, again increased near the harvesting season. Backscattering coefficients of range at X-band were lower than that of L-, C-band. HH-, VV-polarized ${\sigma}^{\circ}$ steadily increased toward panicle initiation stage and thereafter decreased, and again increased near the harvesting season. We plotted the relationship between backscattering coefficients with L-, C-, X-band and rice growth parameters. Biomass was correlated with L-band hh-polarization at a large incident angle. LAI (Leaf Area Index) was highly correlated with C-band HH- and cross-polarizations. Grain weight was correlated with backscattering coefficients of X-band VV-polarization at a large incidence angle. X-band was sensitive to grain maturity during the post heading stage.

Study on the establishment of an efficient disaster emergency communication system focused on the site (현장중심의 효율적 재난통신체계 수립 방안 연구)

  • Kim, Yongsoo;Kim, Dongyeon
    • Journal of the Society of Disaster Information
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    • v.10 no.4
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    • pp.518-527
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    • 2014
  • Our society is changed and diversified rapidly and such tendency is accelerated day after day and has made a lot of problems in the many fields. The important thing we have to recognize is such tendency has a bad effect recently on the safety system in Korea. So it is time to enhance the national safety system and moreover recently Sewol-ho(passenger ship) went down in the sea, it made people remind the importance of national safety system. With this incident, Korean government decided to establish the national safety communication network against the disaster. At this time, I will propose several ideas about the national safety communication network. 1. It must to be established an unified network to contact people who is on a disaster site anytime and anywhere. This is most important element on all disaster sites. 2. PS-LTE technology must to be adopted to the network because it has many advantages including various multimedia services compared to the TETRA in the past. 3. 700MHz is the most efficient band for the network because it has wide cell sites coverage compared to 1.8GHz. 4. Satellite communication system is needed to the network for back-up. 5. It will be effective to adopt Social Media to the communication network system like a Twitter or Facebook for sharing many kinds of information and notifying people of warning message. 6. It can make the network more useful to introduce the latest technology like a sensor network. And Korean government has to improve the system related to the disaster including law and operating organization.