• Title/Summary/Keyword: 5 nm & 7 nm technology

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A Study on the Bond Strength of BCB-bonded Wafers (BCB 수지로 본딩한 웨이퍼의 본딩 결합력에 관한 연구)

  • Kwon, Yongchai;Seok, Jongwon;Lu, Jian-Qiang;Cale, Timothy;Gutmann, Ronald
    • Korean Chemical Engineering Research
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    • v.45 no.5
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    • pp.479-486
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    • 2007
  • Four point bending is used to study the dependences of bond strength of benzocyclobutene(BCB) bonded wafers and BCB thickness, the use of an adhesion promoter, and the materials being bonded. The bond strength depends linearly on BCB thickness, due to the thickness-dependent contribution of the plastic dissipation energy of the BCB and thickness independence of BCB yield strength. The bond strength increases by about a factor of two with an adhesion promoter for both $2.6{\mu}m$ and $0.4{\mu}m$ thick BCB, because of the formation of covalent bonds between adhesion promoter and the surface of the bonded materials. The bond strength at the interface between a silicon wafer with deposited oxide and BCB is about a factor of three higher than that at the interface between a glass wafer and BCB. This difference in bond strength is attributed to the difference in Si-O bond density at the interfaces. At the interfaces between plasma enhanced chemical vapor deposited (PECVD) oxide coated silicon wafers and BCB, and between thermally grown oxide on silicon wafers and BCB, 12~13 and $15{\sim}16bonds/nm^2$ need to be broken. This corresponds to the observed bond energies, $G_0s$, of 18 and $22J/m^2$, respectively. Maximum 7~8 Si-O $bonds/nm^2$ are needed to explain the $5J/m^2$ at the interfaces between glass wafers and BCB.

Fabrication of ATO thin film for IR-cut off by sol-gel method (솔-젤 법에 의한 적외선 차단 ATO 박막 제조)

  • Kim, Jin-Ho;Lee, Kwang-Hee;Lee, Mi-Jai;Hwang, Jonghee;Lim, Tae-Young
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.23 no.5
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    • pp.230-234
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    • 2013
  • IR cut-off thin films consisted of ATO nanoparticles were successfully fabricated by sol-gel method. The coating solution was synthesized with organic/inorganic hybrid binder and ATO colloidal solution and ATO thin films were coated on a slide glass with the withdrawal speed of 5~40 mm/s. As the withdrawal speed increased from 5 mm/s to 40 mm/s, the thickness of coating thin films also increased from $1.05{\mu}m$ to $4.25{\mu}m$ and the IR cut-off in wavelength of 780~2500 nm increased from 49.5 % to 66.7 %. In addition, the pencil hardness of ATO thin films dried at $80^{\circ}C$ was ca. 5H and the coating films were not removed after a cross cutter tape test because of the hybrid binder synthesized with tetraethylorthosilicate and methyltrimethoxysilane. The surface morphologies, optical properties and film thickness of prepared thin films with a different withdrawal speed were measured by field emission scanning electron microscope (FE-SEM), UV-Vis spectrophotometer, and Dektak.

Hydrogenation of Methyl Dodecanoate Using Copper Chromite (분산액에서의 Copper Chromite 합성 및 Methyl Dodecanoate의 수소화반응)

  • Kang, Ho-Cheol;Lee, Sang-Hoon;Park, Jong-Mok;Kim, Dong-Pyo;Lee, Byung Min
    • Applied Chemistry for Engineering
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    • v.20 no.2
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    • pp.201-207
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    • 2009
  • The hydrogenation reaction of methyl dodecanoate for the synthesis of 1-dodecanol has been carried out in the presence of a copper chromite catalyst. The catalysts were synthesized by ceramic method, co-precipitation, and improved co-precipitation method and the particles were characterized by SEM and XRD. Also, the products of the reaction were assigned by GC, GC/MSD and NMR. The particles synthesized by each method showed (1) a spherical shape with the size of 3.2 to $7.0{\mu}m$, (2) an agglomerated spherical shape with the size of 50 to 500 nm and (3) a spherical shape with smaller particle size, respectively. Especially, in order to control the size of particles, the particles were synthesized in various dispersant solutions as Span 80, polyacrylate, and polyethyleneglycols (PEGs). The particles synthesized in PEG (Mw = 4000) solution showed the smallest particle size of 30 to 50 nm and the regularity of the particle size distribution. Our experimental results elucidated that the activity of catalyst for hydrogenation increases with decreasing the size of catalyst particle. The highest yield of dodecanol in the hydrogenation reaction was 95.5% when copper chromite synthesized in the PEG solution was used as a catalyst in the optimized reaction condition.

Gasification Characteristics of Biomass and RPF in a 5ton/day Fixed Bed Gasifier (5톤/일 고정층 가스화기를 이용한 바이오매스, RPF 가스화 특성 연구)

  • Yoon, Sang-Jun;Choi, Young-Chan;Lee, See-Hoon;Kim, Jae-Ho;Lee, Jae-Goo
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.75-78
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    • 2006
  • With the increasing environmental consideration and stricter regulations waste gasification is considered to be more attractive technology than conventional incineration for energy recovery as well as material recycling. The experiment for combustible waste was performed In the fixed bed gasifier to investigate the gasification behavior with the operating conditions in a 5ton/day fixed bed gasifier The experiments of operation with 10-50 hours were carried out to determine the effects of bed temperature and oxygen/waste rat io on the syngas composition, calorific value and carbon conversion. The calorific values of the produced syngas decreased with an Increase of bed temperature because combust ion reaet ion more act ively happened. The syngas composition of wood waste gasification is CO: 34.4%, $H_2: 10.7%,\;CH_4: 6.0%,\;CO_2: 48.9%$ and that of RPF is CO: 33.9%, $H_2: 26.1%,\;CH_4: 10.7%,\;CO_2: 29.2%$. The average calorific values of produced gas were about $1,933kcal/Nm^3,\;2,863kcal/Nm^3$, respectively

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Fabrication of High-purity Rb Vapor Cell for Electric Field Sensing

  • Jae-Keun Yoo;Deok-Young Lee;Sin Hyuk Yim;Hyun-Gue Hong;Sun Do Lim;Seung Kwan Kim;Young-Pyo Hong;No-Weon Kang;In-Ho Bae
    • Current Optics and Photonics
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    • v.7 no.2
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    • pp.207-212
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    • 2023
  • In this paper, we introduce our system for manufacturing a Rb vapor cell and describe its fabrication process in a sequence of removing impurities, cold trapping, and sealing off. Saturated absorption spectroscopy was performed to verify the quality of our cell by comparing it to that of a commercial one. By using the lab-fabricated Rb vapor cell, we observed electromagnetically induced transparency in a ladder-type system corresponding to the 5S1/2-5P3/2-28D5/2 transition of the 85Rb atom. A highly excited Rydberg atomic system was prepared using two counter-propagating external cavity diode lasers with wavelengths of 780 nm and 480 nm. We also observed the Autler-Townes splitting signal while a radio-frequency source around 100 GHz incidents into the Rydberg atomic medium.

Characterizations of Copoly(ester imide)s with New 2,7-Dihydroxynaphthalene Bis(trimellitate anhydride) (새로운 2,7-Dihydroxynaphthalene Bis(trimellitate anhydride) 무수물을 이용한 폴리(에스터 이미드) 공중합체의 특성)

  • Ju, Jieun;Chang, Jin-Hae
    • Polymer(Korea)
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    • v.38 no.5
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    • pp.632-639
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    • 2014
  • 2,7-Dihydroxynaphthalene bis(trimellitate anhydride) (2,7-TA) was synthesized from trimellitic anhydride chloride and 2,7-dihydroxynaphthalene. Copolyimides (Co-PI) containing ester group were synthesized from 2,7-TA, pxylylenediamine, and 2,2'-bis(trifluoromethyl)benzidine (TFB). The Co-PI films were obtained from poly(amic acid) by solution casting through thermal imidization on a glass plate. The thermal property, gas permeation, and optical transparency of the Co-PI films with various TFB monomer contents were investigated. These Co-PIs could be solution-cast into a flexible and tough film. The cast Co-PI films exhibited high optical transparency with a cut-off wavelength of 370~395 nm in UV-vis. absorption and a low yellow index value of 3.55~7.63. The thermal property of Co-PI films increased linearly with increasing TFB content. However, the oxygen permeation and optical transparency of the Co-PI films was found to worsen with increasing TFB content.

Development of Trimming Technology in High-fine Resistor Using U.V. Laser (자외선 레이저를 이용한 고정밀 저항체 가공기술 개발)

  • Noh, S.S.;Kim, D.H.;Chung, G.S.;Kim, H.P.;Kim, K.H.
    • Journal of Sensor Science and Technology
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    • v.11 no.6
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    • pp.358-364
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    • 2002
  • In this paper, we used U.V.(wavelength, 355nm) laser for adjusting Pt thin films temperature sensor to $100{\Omega}$ at $0^{\circ}C$. Internationally, A-class tolerance of temperature sensor is $0.06{\Omega}$ at $0^{\circ}C$. This is under value of $0.15^{\circ}C$, actually, so high-fine trimming technology is essential to this process. The width of trimmed lines was about $10{\mu}m$ and the best trimming of Pt thin films of $1{\sim}1.5{\mu}m$ was carried out with power : 35mW, rep. rate frequency : 200Hz and bite size : $1.5{\mu}m$. And using photolithography process, 96 resistors were fabricated in $2"{\times}2"$ substrate as the proportion of $79{\sim}90{\Omega}$ and $91{\sim}102{\Omega}$ is 42.7% and 57.3%, respectively. As result of trimming resistors to the target value of $109.73{\Omega}$ at $25^{\circ}C$, 82.3% of resistors had the tolerance within ${\pm}0.30{\Omega}$ and the others(17.7%) were within ${\pm}0.06{\Omega}$ of A-class tolerance.

Visual spectral sensitivity of dark-adapted rockfish (Sebastes inermis) in LED light source (LED 광원에 대한 암순응시 볼락 (Sebastes inermis)의 시각 스펙트럼 민감도)

  • Heo, Min-A;Kang, Gyeong-Mi;Shin, Hyeon-Ok
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.51 no.1
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    • pp.102-110
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    • 2015
  • The characteristics of aquatic light fields are generally reflected in the visual systems of fishes inhabiting them. Therefore, research on light sensitivity of fish is useful to explain the correlation between the visual function and habitat, behavior and distribution of fish. Rockfish is an important species in coastal ecology and also one of the main species for culturing in Korea. To make a contribution on the maintenance of the fish resources and understanding the ecology of the rockfish, the visual spectral sensitivities of the dark-adapted rockfishes were measured in the range of visible light (405~660 nm) using a light source of light-emitting diodes (LEDs). In order to assess electrophysiological response of the fish, the ERGs (electroretinograms) of the dark-adapted rockfishes were recorded on a data logger (12 bits) and a laptop computer. Juvenile (n=5; weight: $20.3{\pm}5.2g$; total length: $10.3{\pm}0.7cm$) and adult (n=5; weight: $87.8{\pm}21.8g$; total length: $18.1{\pm}1.3cm$) rockfishes were used in experiment. The visual threshold of juvenile and adult rockfish were 11.66 (log quanta/$cm^2/s$) and 11.81 (log quanta/$cm^2/s$) in 574 nm, respectively. The peak wavelength of the spectral sensitivity in the dark-adapted juvenile and adult rockfish was commonly 551 nm (series of green color). Collectively, these results demonstrate that the rockfish has suitable visual capabilities for inhabiting coastal water in Korea.

Photoluminescence Characteristics of (Ca, Sr)2MgSi2O7:Eu2+ Phosphor Particles Prepared by Spray Pyrolysis (분무열분해법에 의해 제조된(Ca, Sr)2MgSi2O7:Eu2+ 형광체의 발광 특성)

  • Lee, Ho Min;Jung, Kyeong Youl;Jung, Ha-Kyun;Lee, Jong Heun
    • Korean Chemical Engineering Research
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    • v.44 no.3
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    • pp.284-288
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    • 2006
  • $(Ca,Sr)_{2-y}MgSi_2O_7:Eu^{2+}{_y}$ (CMS) phosphor particles were prepared by using a spray pyrolysis process. The luminescent property was optimized by changing the content of Eu and the post-treatment temperature. The luminescence characteristics were also monitored with changing the ratio of Ca to Sr. The pure tetragonal $Ca_2MgSi_2O_7$ or $Sr_2MgSi_2O_7$ particles were obtained when the post-treatment temperature was over $1,000^{\circ}C$. The highest emission intensity of CMS particles were achieved when the concentration (y) of Eu and the treatment temperature were 0.05 and $1,250^{\circ}C$,respectively. The emission wavelength $({\lambda}_{max})$ of ${(Ca_{1-x},Sr_x)}_{1.95}MgSi_2O_7:{Eu^{2+}}_{0.05}$ was gradually shifted from 524 nm to 456 nm with increasing the content of Sr due to the reduction of crystal field strength. The emission intensity and its width of $Sr_2MgSi_2O_7:Eu$ was greatly enhanced by substituting Ca of less than 10 mol% for Sr without any significant peak shift. The morphology of as-prepared particles was spherical, but changed to irregular-shaped one after the post treatment at the temperature range from 900 at $1,300^{\circ}C$.

X-Ray Absorption Spectroscopic Study of 120 MeV $Ag^{9+}$ Ion-Irradiated N-Doped ZnO Thin Films

  • Gautam, Sanjeev;Lim, Weon Cheol;Kang, Hee Kyung;Lee, Ki Soo;Song, Jaebong;Song, Jonghan;Asokan, K.;Chae, Keun Hwa
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.315-315
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    • 2013
  • We report the electronic structure modification in the swift heavy ion (SHI) irradiated N-doped ZnO thin films prepared by RF sputtering from ZnO target in different ratio of Ar/$N_2$ gas mixture using highly pure $N_2$ gas. The different N-ZnO thin lms were then irradiated with 120 MeV Ag ion beam with different doses ranging from $1{\times}10^{11}$ to $5{\times}10^{12}$ ions/$cm^2$ and characterized by XRD and near edge X-ray absorption ne structure (NEXAFS) at N and O K-edges. The NEXAFS measurements provide direct evidence of O 2p and Zn 3d orbital hybridization and also the bonding of N ions with Zn and O ions. The minimum value of resistivity of $790{\Omega}cm$, a Hall mobility of $22cm^2V^-1s^-1$ and the carrier concentration of $3.6{\times}10^{14}cm^{-3}$ were yielded at 75% $N_2$. X-ray diffraction (XRD) measurements revealed that N-doped ZnO films had the preferential orientation of (002) plane for all samples, while crystallinity start decreasing at 32.5% $N_2$. The average crystallite size varies from 5.7 to 8.2 nm for 75% and then decreases to 7.8 nm for 80% $Ar:N_2$ ratio.

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