• Tunnel and Underground Space
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• v.12 no.4
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• pp.268-276
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• 2002

In this study, a 3D coordinate measurement system equipped with a laser displacement meter for digitizing rock joint surface was established and the digitized data were used to calculate several roughness parameters. The parameters used in this study were micro avenge inclination $angle(i_{ave})$, average slope of joint $asperity(SL_{ ave})$, root mean square of $i-angle(i_{rms})$, standard deviation of height(SDH), standard deviation of $i-angle(SD_i)$, roughness profile $index(R_P)$, and fractal dimension(D). The relationships between the roughness parameters based on the digitzation of the surface profile were analyzed. Since the measured value varied according to the degree of reflection and the variation of colors at the measuring point, rock joint surface was painted in white to minimize the influence of the surface conditions. The comparison of the measured values and roughness parameters before and after painting revealed the better consequence from measurement on the painted surfaces. Also, effect of measuring interval was studied. As measured interval was increased, roughness parameters were exponentially decreased. The incremental sequence of degree of decrease was $SDH\; i_{ave},\; i_{rms},\; SD_i,\;and\; R_ p-1$. As a result of comparison of parameters from pin-type measurement system and laser type measurement system, all value of parameters were higher when laser-type measurement system was used, except SDH.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.181-181
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• 2004

3 차원 형상측정기술(3-D Profile Measurement Method)은 가공품의 치수검사 및 형상측정 등의 공학분야뿐만 아니라 최근에는 의류산업 및 의학산업은 물론 오락산업의 가상현실 구현 등 여러 분야로 점차 사용이 확대되고 있다. 이러한 요구를 만족시킬 수 있는 광학을 바탕으로 한 비접촉 3 차원 형상측정방법(Non-contacting 3-D Profile Measuring Method)은 고속, 고정밀도 측정이 가능하기 때문에 활발히 연구되고 있다. 광학을 이용한 대표적인 3 차원 비접촉 측정방법의 하나인 영사식 무아레는 그림자식 무아레의 단점인 격자의 크기가 측정물체보다 커야 한다는 점과 측정물체와 격자사이의 거리 제한 문제를 해결하였으며, 위상이동법을 사용함으로서, 무아레 무늬 형태의 영향을 받지 않고 측정이 가능해졌다.(중략)

• Journal of the Korean Society for Precision Engineering
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• v.24 no.2 s.191
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• pp.58-63
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• 2007

This paper proposes a novel method of projecting a multiple stripe pattern whose intensity profile is sinusoidal. The sinusoidal stripe patterns are plated with chromium on a piece of glass, and the glass is placed within an optical projection system. By linearly moving the glass along the direction of the stripe pattern, the projection system generates the motion blurring effect, and as a result, produces a blurred stripe pattern whose intensity profile is sinusoidal along the perpendicular direction of the stripe pattern. The sinusoidal pattern improves the measurement accuracy of phase-shifting method. Experimental results are provided for three different types of stripe patterns: rectangle, diamond, and sinusoid.

• Journal of the Korean GEO-environmental Society
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• v.17 no.8
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• pp.39-44
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• 2016

Ground deformation around construction site in urban area where typically adjacent structures are located needs to be strictly controlled. Accordingly, it is very important to precisely monitor the ground deformation. Settlement beacon is typically employed to measure the ground deformation, but meanwhile the rapid development in electronic technology enables 3D image scanner to become available for measuring the ground deformation profile in usual construction sites. With respect to the profile measurement, the 3D scanner has an advantage, whereas its accuracy is somewhat limited because it does not measure the displacement directly. In this paper, we developed a conditional merging technique to combine the ground displacement measured from settlement beacon and the profile measured by the 3D scanner. Synthetic ground deformation profile was generated to validate the proposed technique. It is found that the ground deformation measurement error can be reduced significantly via the conditional merging technique.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.781-782
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• 2010

• Journal of the Semiconductor & Display Technology
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• v.5 no.1 s.14
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• pp.1-4
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• 2006

Recently, Ball Grid Arrays(BGAs) are getting used more frequently for a package type. The connectors on a BGA consist of a large number of small solder balls in a grid shape on its bottom side. However, since balls of BGAs mounted on PCBs are not visible, inspection before mounting them is indispensable. High speed non-contact 3D measurement technologies are necessary far real-time measurement of ball height, the most important inspection item. In this paper, an accurate 3D data acquisition system for BGAs is proposed that can acquire 3D profile at high speed using a 3D smart camera and laser slit ray projection. Some clipping and morphological filtering operations are employed to remove spiky error data, which occur due to reflections from some ball area to camera direction.

• Proceedings of the KWS Conference
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• 2000.10a
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• pp.28-30
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• 2000

• Journal of the Optical Society of Korea
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• v.13 no.2
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• pp.251-255
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• 2009

In the non-contact 3-dimensional (3D) shape measurements, the fringe pattern projection method based on the phase-shifting technique has been considered very effective for its high speed and accuracy. The digital fringe projector in particular has great flexibility in generating fringe patterns since the patterns can be controlled easily by the computer program. In this work, we have developed a high-speed digital laser grating projection system using a laser diode and a polygon mirror, and evaluated its performance. It has been demonstrated that all the optical measurements required to find out the profile of a 3D object could be carried out within 31 ms, which confirmed the validity of our 3D measurement system. The result implies the more important fact that the speed in 3D measurement can be enhanced remarkably since, in our novel system, there is no device like a LCD or DMD whose response time limits the measurement speed.

• Applied Microscopy
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• v.42 no.3
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• pp.158-163
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• 2012

Detailed comparison of low-voltage scanning electron microscopy and electron holography techniques for two-dimensional (2D) dopant profiling was carried out with using the same multilayered p-n junction specimen. The dopant profiles obtained from two methods are in good agreement with each other. It demonstrates that reliability of dopant profile measurement can be increased through precise comparison of 2D profiles obtained from various microscopic techniques.