• 제목/요약/키워드: 3D micro-structure

검색결과 226건 처리시간 0.028초

3차원 마이크로 디바이스 개발을 위한 나노 스테레오리소그래피 공정 개발에 관한 연구 (Development of Nano-Stereolithography Process for Precise Fabrication of Three-Dimensional Micro-Devices)

  • 박상후;임태우;양동열;이신욱;공홍진;이광섭
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권1호
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    • pp.45-49
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    • 2006
  • A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system.

미세 방전을 이용한 3차원 미세 구조물 제작 및 미세 공구 제작 (Fabrication of 3-D Micro Structure and Micro Tool Using MEDM)

  • 이영수;김보현;이상민;주종남;강영훈;최태훈;박훈재
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2004년도 제3회 금형가공 심포지엄
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    • pp.255-259
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    • 2004
  • 3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

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MEMS-based 마이크로 터보기계의 개발 (Development of MEMS-based Micro Turbomachinery)

  • 박건중;민홍석;전병선;송성진;주영창;민경덕;유승문
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2001년도 춘계학술대회논문집E
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    • pp.169-174
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    • 2001
  • This paper reports on the development of high aspect ratio structure and 3-D integrated process for MEMS-based micro gas turbines. To manufacture high aspect ratio structures, Deep Reactive Ion Etching (DRIE) process have been developed and optimized. Specially, in this study, structures with aspect ratios greater than 10 were fabricated. Also, wafer direct bonding and Infra-Red (IR) camera bonding inspection systems have been developed. Moreover, using glass/silicon wafer direct bonding, we optimized the 3-D integrated process.

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마이크로 홀로그래픽 PTV를 이용한 미세곡관 내부 Dean 유동의 3차원 유동해석 (Micro Holographic PTV Analysis of Three-dimensional Dean Flows in a Curved Micro-tube)

  • 김석;이상준
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2008년도 춘계학술대회논문집
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    • pp.689-690
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    • 2008
  • In the present study, a micro holographic PTV (HPTV) system was used to experimentally investigate the structure of 3D flow within a curved micro-tube with varying Dean number. The employed HPTV system incorporated a high-speed digital camera to measure the temporal evolution of the 3D velocity fields of micro-scale fluid flows. With increasing Dean number, flow in the curved tube is transformed from a steady flow to a secondary flow with two counter-rotating vortices. In this study, to analyze the 3D flow characteristics in the curved section of tube at a high Dean number, the trajectories of fluid particles were obtained experimentally using the whole 3D velocity field data obtained by the micro HPTV technique. The mean velocity field distribution was then obtained by ensemble averaging the instantaneous velocity fields. These results would be helpful in the design of various passages within micro-scale devices or micro-chips and in understanding the mixing phenomena that occur in curved conduits along the trajectories of fluid particles.

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디스크 전극을 이용한 미세 전해 밀링 가공에서의 테이퍼 형상 방지 (Taper Reduction in Micro Electrochemical Milling Using Disk-type Electrode)

  • 김보현;이영수;최덕기;주종남
    • 한국정밀공학회지
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    • 제22권4호
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    • pp.167-172
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    • 2005
  • In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.

척추극돌간 미세움직임 재현 보형물의 개발 및 평가 (Development and Evaluation for the Micro-Movement Structure of Interspinous)

  • 박준식;서태일;배종석;윤길상
    • 한국공작기계학회논문집
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    • 제15권3호
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    • pp.127-131
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    • 2006
  • Existing orthopedic implants such as pedicle screw and spinal cage were designed to fix the spinal structure. But, nowadays, physicians want to rehabilitate there original functions. To achieve this request, we studied micro-movable structure for interspinous. As a first step, we designed interspinous structure by 3D CAD to join each spinous processes. Next, we simulate it with various factors such as the thickness of micro-movement structure and the design of clip. At last, we performed static compressive test to satisfy the failure load of 339N and dynamic endurance test of 1.2M cycle. As a result, we developed interspinous implant and did several surgery to evaluated its satisfaction.

Micro X-ray CT를 이용한 글라스 비드의 3차원 간극 구조 정량화 (Quantification of 3D Pore Structure in Glass Bead Using Micro X-ray CT)

  • 정연종;윤태섭
    • 한국지반공학회논문집
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    • 제27권11호
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    • pp.83-92
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    • 2011
  • 무질서하고 불균질한 형상을 갖는 지반 재료 내 간극 구조는 하중에 의한 재료의 변형 및 간극 내 유체의 흐름 등 물리 역학적 거동에 중요한 영향 인자이다. 최근 들어 X-ray CT에 의한 비파괴 검사를 통해 지반 재료의 내부 구조를 마이크로미터 단위의 높은 해상도를 통해 평가하는 기법이 사용되고 있다. CT 이미지는 재료의 많은 정보를 포함하고 있음에도 그에 따른 이미지 해석 기법의 개발이 다소 미흡하여 2, 3차원 이미지의 정성적 관찰 및 간극비와 같은 거시적인 물성치 획득만이 이루어지고 있다. 본 연구에서는 연속적으로 획득된 글라스 비드의 2차원 CT 이미지에 기반하여 3차원 입자 및 간극 구조를 형성하고, 복잡한 간극구조를 간극셀과 간극채널로 정량적 분리를 실시하였다. 이를 위해 좌표 변환법, 이진화, 들로네 삼각망, 그리고 유클리디안 거리변환법과 같은 이미지 프로세싱 기법을 3차원 CT 이미지에 적용하였고 불균질한 글라스 비드의 간극구조에 대해 정량적으로 간극셀의 분포 및 간극간의 연결도 평가가 가능함을 확인하였다.

마이크로 및 메조 가공을 위한 소형공작기계 개발 (Development of a miniaturized machine tool for machining a micro/meso scale structure)

  • 박성령;이재하;양승한
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.1907-1910
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    • 2003
  • Miniaturized machine tool can be used to produce 3D features based on CNC and PC-NC technology in the micro/meso scale. Wide applications of CNC technology are developed and there are lots of know-hows in the cutting process and their CNC application. It helps micro/meso scale structure to machine components, which can be used directly for practical applications. In the present research, as the machine tool is miniaturized, the manufacturing machine tools costs less when compared to the equipment used in other micromachining technologies. Moreover, with advancement of micro tool technology, the cutting process can be used to produce micro/meso scale parts. In conclusion, the proposed system can reduce the cost by utilizing the current machining technology, and as a result, complex micro/meso parts can be produced efficiently with high productivity.

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골형태분석법과 micro-CT를 이용한 골소주 특성에 대한 연구 (Study of bony trabecular characteristics using bone morphometry and micro-CT)

  • 송영한;이완;이창진;지정현;이병도
    • Imaging Science in Dentistry
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    • 제37권1호
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    • pp.27-33
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    • 2007
  • Purpose : The research was done to investigate the effectiveness of 2D bony morphometry and microstructure of micro-computed tomography (micro-CT) on the osteoporotic bony change. We performed the bone morphometric analysis of proximal femur in ovariectomized rabbits with BMD and micro-CT examination. Materials and Methods : Twenty-one female (Newzealand, about 16 weeks old, 2.9-3.4kg) rabbits were used. Three rabbits were sacrificed on the day when experiment began (Baseline). The remaining 18 rabbits were divided into two groups. One group was ovariectomized bilaterally (OVX) and the other animals were subjected to sham operation (Sham). Bone specimens were obtained from the right and left femur of sacrificed rabbits. At intervals of 1, 2, 3, 5, 6 months respectively, BMD tests were performed on the proximal femur by using PIXlmus 2 (GE Lunar Co. USA), 2-dimensional bone morphometric analysis by custome computer program and 2D/3D bone structure analysis by micro-CT (Skyscan 1072, Antwerpen, Belgium). Statistical analysis was carried out for the correlation between bone morphometry, micro-CT and BMD Result : BV/TV, Tb.Th, Tb.N of micro-CT parameters showed higher values in sham group than OVX group. N.Nd/Ar.RI, N.NdNd, N.NdTm, N. TmTm, PmB/Ar.RI, 3-D BoxSlope of 2D morphometric parameters showed higher values in Sham group than OVX group. The micro-CT parameters of Tb.Sp, Tb.N were statistically significant correlated with BMD respectively. Several 2D morphometric parameters were statistically significant correlated with BMD respectively. Conclusion : Several parameters of 2D bony morphometry and micro-CT showed effective aspects on the osteoporotic bony change.

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마이크로 시스템 구현을 위한 5축 가공기에 관한 연구 (A study on 5-axis Milling Machine for Micro System Manufacturing)

  • 방영봉;이경민;오승률
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.585-588
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    • 2003
  • As the advance in technology requires micro mechanical systems, the production methods for micro parts are of a great interest of many researchers. Although MEMS is one of the most popular methods. it can only produce 2D microstructures. The micro manufacturing with micro-mill and micro-lathe has a great potential for producing arbitrary 3D shapes and are being researched. In this paper, a PC based 5-axis milling machine with high precision was developed. To evaluate the machine performance, micro ribs and micro columns were machined. The machining experiments of micro impeller and micro turbine blade confirmed the possibility of micro system manufacturing by using the developed milling machine.

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