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Taper Reduction in Micro Electrochemical Milling Using Disk-type Electrode  

Kim Bo Hyun (서울대학교 기계항공공학부)
Lee Young Soo (서울대학교 기계항공공학부)
Choi Deok Ki (강릉대학교 정밀기계공학부)
Chu Chong Nam (서울대학교 기계항공공학부)
Publication Information
Journal of the Korean Society for Precision Engineering / v.22, no.4, 2005 , pp. 167-172 More about this Journal
Abstract
In this paper. micro electrochemical machining (ECM) for micro structure fabrications is presented. By applying ultra short pulses. the chemical reaction can be restricted only to the region very close to the electrode. Micro ECM is applied to machining micro structures through electrochemical milling process becasuse it doesn't suffer from tool wear. Using this method. 3D micro structures were machined on stainless steel. It was found that micro machining is possible with good surface quality in the low concentration electrolyte,0.1 M H₂SO₄. In ECM, as the machining depth increases, better flushing of electrolyte is required for sufficient ion supply. Layer-by-layer milling is advantageous in flushing. However, layer-by-layer milling causes taper of structures. To reduce the taper, application of a disk-type electrode was introduced. By electrochemical milling, various 3D micro structures including a hemisphere with 60 ㎛ diameter were fabricated.
Keywords
Electrochemical machining; Electrochemical milling; Micro structure; Ultra short pulses; Disk-type electrode;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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