• Tunnel and Underground Space
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• v.12 no.4
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• pp.268-276
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• 2002

In this study, a 3D coordinate measurement system equipped with a laser displacement meter for digitizing rock joint surface was established and the digitized data were used to calculate several roughness parameters. The parameters used in this study were micro avenge inclination $angle(i_{ave})$, average slope of joint $asperity(SL_{ ave})$, root mean square of $i-angle(i_{rms})$, standard deviation of height(SDH), standard deviation of $i-angle(SD_i)$, roughness profile $index(R_P)$, and fractal dimension(D). The relationships between the roughness parameters based on the digitzation of the surface profile were analyzed. Since the measured value varied according to the degree of reflection and the variation of colors at the measuring point, rock joint surface was painted in white to minimize the influence of the surface conditions. The comparison of the measured values and roughness parameters before and after painting revealed the better consequence from measurement on the painted surfaces. Also, effect of measuring interval was studied. As measured interval was increased, roughness parameters were exponentially decreased. The incremental sequence of degree of decrease was $SDH\; i_{ave},\; i_{rms},\; SD_i,\;and\; R_ p-1$. As a result of comparison of parameters from pin-type measurement system and laser type measurement system, all value of parameters were higher when laser-type measurement system was used, except SDH.

• Tribology and Lubricants
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• v.40 no.2
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• pp.47-53
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• 2024

Surface topography plays a decisive role in determining the performance of several precision components. In particular, the surface roughness of semiconductor devices affects the precision of the circuit. In this regard, the surface topography of a given surface needs to be appropriately assessed. Typically, the average roughness is used as one of the main indicators of surface finish quality because it is influenced by both dynamic and static parameters. Owing to the increasing demand for such accurate and reliable surface measurement systems, studies are continuously being conducted to understand the parameters of surface roughness and measure the average roughness with high reliability. However, the differences in the measurement methods of surface roughness are not clearly understood. Hence, in this study, the surface roughness of the back of a silicon wafer was measured using both contact and noncontact methods. Subsequently, a comparative analysis was conducted according to various surface roughness parameters to identify the differences in surface roughness depending on the measurement method. When using a 3D laser confocal microscope, even smaller surface asperities can be measured compared with the use of a 3D profiler. The results are expected to improve the understanding of the surface roughness characteristics of precision components and be used as a useful guideline for selecting the measurement method for surface topography assessment.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.2C
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• pp.133-142
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• 2006

Many methods have been tried to more correctly measure rock joint roughness. However, true roughness may be distorted and underestimated due to the sampling interval and measurement method. Thus, currently used measurement methods produce a dead zone and distort roughness profiles. The purpose of this study is to suggest new roughness measurement method by a camera-type 3D scanner as an alternative of currently used methods. First, the underestimation of artificial roughness is analyzed by using the current measurement method such as laser profilometry. Second, we replicate eight specimens from two rock joint surfaces, and digitize by a 3D scanner. Then, the roughness coefficient values obtained from eight numbers of 3D surface data and from three hundred twenty numbers of 2D profiles data are analyzed by using current and new measurement methods. The artificial simulation confirms that the sampling interval is one of main factors for the distortion of roughness and shows that inclination of waviness may not be considered any current methods. The experimental results show that the camera-type 3D scanner produces 10% larger roughness values than current methods. As the proposed new method is a fast, high precision and more accurate method for the roughness measurement, it should be a promising technique in this area.

• The Journal of Engineering Geology
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• v.12 no.4
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• pp.405-419
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• 2002

Fracture roughness of rock specimens is observed by a new confocal laser scanning microscope (CLSM; Olympus OLS1100). The wave length of laser is 488 nm, and the laser scanning is managed by a light polarization method using two galvano-meter scanner mirrors. The function of laser reflection auto-focusing enables us to measure line data fast and precisely. The system improves resolution in the light axis (namely z) direction because of the confocal optics. Using the CLSM, it is Possible to measure a specimen of the size up to $10{\;}{\times}{\;}10{\;}cm$ which is fixed on a specially designed stage. A sampling is managed in a spacing $2.5{\;}\mu\textrm{m}$ along x and y directions. The highest measurement resolution of z direction is $10{\;}\mu\textrm{m}$, which is more accurate than other methods. Core specimens of coarse and fine grained granite are provided. Fractures are artificially maneuvered by a Brazilian test method. Measurements are performed along three scan lines on each fracture surface. The measured data are represented as 2-D and 3-D digital images showing detailed features of roughness. Line profiles of the coarse granites represent more frequent change of undulation than those of the fine granite. Spectral analyses by the fast Fourier transform (FFT) are performed to characterize the roughness data quantitatively and to identify influential frequency of roughness. The FFT results suggest that a specimen loaded by large and low frequency energy tends to have high values of undulation change and large wave length of fracture roughness.

• Journal of Electrochemical Science and Technology
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• v.11 no.2
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• pp.180-186
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• 2020

In this work, a metal-ligand solution (Cu-EDTA) was prepared based on the molecular precursor method and the solution was spin-coated onto 3D printed flexible photosensitive resin sheets. After being processed by microwave, a laser with a wavelength of 355 nm was utilized to scan the spin-coated sheets and then the sheets were immersed in an electroless copper plating solution to deposit copper wires. With the help of microwave processing, the adhesion between copper wires and substrate was improved which should result from the increase of roughness, decrease of contact angle and the consistent orientation of coated film according to the results of 3D profilometer and SEM. XPS results showed that copper seeds formed after laser scanning. Using the 3D printed flexible sheets as cathode and galvanized iron as anode, electrochemical machining was conducted.

• Journal of the Korean Geophysical Society
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• v.9 no.1
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• pp.47-62
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• 2006

More than 70% of Korean Peninsula is consisted of mountains, so that lots of roads, rail-roads and tunnel,which play a pivotal role in the industry activity, are existed along the rock-slope and in the rock-mass. Thus,it is urgent that tegration of management system through the optimum survey and design of rock-slope excavation, proper stabilization method and database of rock-slope. However, conventional methods have shortcoming with the economy of survey time and human resources, and the overcome of difficulties of approach to the in-situ rock-slope. To overcome the limitation of conventional method, this paper proposed the development of remote measurement system using Terrestrial Laser Scanning System. The method using Terrestrial 3D Laser Scanning System, which can get 3D spatial information on the rock-slope and2)Dept. Geosystem Engineering, Kangwon National University, Korea tunnel, has an advantage of reduction of measurement time and the overcome of difficulties of approach to the in-situ rock-slope/dam/tunnel. In the case of rock-slope, through the analysis of 3D modeling of point-cloud by Terrestrial Laser Scanning System, orientation of discontinuity, roughness of joint surface, failure shape and volume were successively achieved. in the case of tunnel face, through reverse-engineering, monitoring of displacement was possible.

• Journal of the Korean Geotechnical Society
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• v.17 no.4
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• pp.279-288
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• 2001

암반내에 존재하는 불연속면은 지하구조물의 안정성에 큰 영향을 미친다. 불연속면을 해석하기 위한 구성법칙에 대한 많은 연구가 진행되어 왔으나, 객관적인 거칠기 파라미터를 이용한 전단거동 모사에 관한 연구는 아직 미흡한 실정이다. 본 연구에서는 정량적인 거칠기 파라미터를 이용한 두 가지의 새로운 구성방정식을 만들어 절리 거동을 모사하였다. 첫 번째 구성법칙은 탄소성 이론에 근거하여 두께가 없는 개별절리요소 이용한 방법이고, 두 번째 구성법칙은 3차원 레이저 변위 측정 데이터를 직접 이용하여 Ohnishi가 제안한 거칠기 손상모델을 도입하였다. 제안된 두 모델을 가지고 직접 전단시험을 모사해본 결과 실제 실험에 나타나는 변형률 경화 및 연화현상 그리고 잔류전단강도와 같은 현상을 볼 수 있었다.

• Proceedings of the Korean Society for Rock Mechanics Conference
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• 1999.03a
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• pp.17-23
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• 1999

본 논문에서는 절리면 거칠기를 정밀하게 수치화 하기 위해 레이저 변위계를 이용한 3차원 거칠기 측정기를 구동시키는 프로그램 제작 및 여러 가지 상태의 절리면에 대해 수치화를 실시하여 각종 거칠기 파라미터를 결정한 후 오차분석을 실시하여 이 기계를 이용한 측정의 타당성을 검증하였다. 동일한 절리면에 대해 물리적인 접촉에 의한 3차원 거칠기 측정기로부터 얻어진 거칠기 파라미터와 레이저 변위계를 이용한 측정기로부터 얻어진 것들 사이의 관계를 살펴보았고, 레이저 측정기에 의해 수치화된 절리면 거칠기 파라미터 사이의 상관관계를 조사하였다. 연구에 사용한 시료는 황등화강암, 여산대리석의 2종류이며, 절리형상 측정을 위한 절리는 인장균열 발생장치를 이용하여 인공적으로 제작하였다. (중략)

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.6
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• pp.101-107
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• 2020

Road surface measurement is an essential process for quantifying the degree and displacement of roughness in road surface management. For safer road surface management and quick maintenance, it is important to accurately measure the road surface while mounted on a vehicle. In this paper, we propose a sophisticated road surface measurement system that can be measured on a moving vehicle. The proposed road surface measurement system supports more accurate measurement of the road surface by using a high-performance line laser sensor. It is also possible to measure the transverse and longitudinal profile by matching the position information acquired from the RTK, and the velocity adaptive update algorithm allows a manager to monitor in a real-time manner. In order to evaluate the proposed system, the Gocator laser sensor, MRP module, and NVIDIA Xavier processor were mounted on a test mobile and tested on the road surface. Our evaluation results demonstrate that our system measures accurate profile base on the MSE. Our proposed system can be used not only for evaluating the condition of roads but also for evaluating the impact of adjacent excavation.

• Korean Journal of Optics and Photonics
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• v.3 no.4
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• pp.258-265
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• 1992

A low loss optical waveguide of $P_{2}O_{5}-SiO_{2}$on Si substrate is produced by using the chemical vapour deposition method of $SiO_2$ thin films used in Si technology. Propagation loss of the waveguide layer was 1.65 dB/cm as produced and reduced down to 0.1 dB/cm after heat treatment at $1100^{\circ}C$. By using laser lithography and reactive ion etching method $P_{2}O_{5}-SiO_{2}$ waveguide was produced and subsequently annealed at $1100^{\circ}C$.As a result of this annealing the shape of the waveguide core was changed from rectangular to semi-circular form, and the propagation loss was reduced as down to 0.03 dB/cm at 0.6328$\mu$m and 0.04dB/cm at 1.53$\mu$m. We think that the mechanism of the reduction in propagation loss during the heat treatment is the following: 1) The hydrogen bonding in waveguide layer, which causes absorption loss, is dissociated and diffused out. 2) The roughness of the interface and the micro-structure of the waveguide layer is removed. 3) The irregularities in the cross-sectional shape of the waveguide which was induced during the lithographic process were disappeared by flowing of the waveguide core.