• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.551-554
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• 2000

Alignment system is a system to locate an object to it's accurate position in multi-d.o.f space. According to process of application, it is need to align an object in 3 or 6 d.o.f. space. And alignment system is used in various environments. Especially in PDP application, alignment process is carried out in vaccume environment. In this paper, we developed 3 d.o.f. alignment system for vaccume environment, performed kinematic analysis and improved it's positional accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.3
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• pp.158-164
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• 2000

In recent year, desire and request fer micro automation are growing rapidly covering the whole range of the industry. This has been caused mainly by request of more accurate manufacturing process due to a higher density of integrated circuits in semiconductor industry. This paper presents a six d.o.f fine motion stage using magnetic levitation technique, which is one of actuating techniques that have the potential for achieving such a micro motion. There is no limit in motion resolution theoretically that the magnetically levitated part over a fixed stator can realize. In addition, it Is possible to manipulate the position and the force of the moving part at the same time. Then, the magnetic levitation technique is chosen into the actuating method. However, we discuss issues of design, kinematics, dynamics, and control of the proposed system. And a few experimental results fur step input are given.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.124-133
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• 2007

Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.138-147
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• 2001

Alignment systems are frequently used under various semiconductor manufacturing environment. Particularly in PDP(Plasma Display Panel) manufacturing process, the alignment system is applied to the combining and sealing processes of the upper and lower glass panels of PDP, where these processes are performed in the vacuum chamber of high vacuum and high temperature. In this paper, the XYΘ-alignment stage is developed to align PDP panels. Because of high vacuum and high temperature environment, the alignment chamber has been designed to isolate the inner part of the alignment chamber from the outer environment of high vacuum and high temperature, in which every part of the alignment stage is inserted. As it is difficult to attach feedback sensors to the alignment stage in the alignment chamber, the alignment stage is implemented with the open loop algorithm, where the parallel link structure has been designed using step-motors and ball-screws for structural simplicity. The kinematic analysis is performed to drive the parallel link structure, based on the experiments of actuation-compensation of the alignment stage. For the error compensation, the hyperpatch model has been used to model the errors. From the experiments, the positional accuracy of the alignment stage can be improved significantly.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.3
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• pp.263-268
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• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.9
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• pp.607-616
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• 2019

Free body diagram analysis is done for key parts of pilot stage of LLV (Load Limit Valve) which is used to protect overload for static structural test of aerospace flight vehicle. It is shown through the analysis that diameter ratio($D_2)^{ten}/D_2)^{comp}$) of two poppets in a pilot stage must be equal to piston area ratio($A_{comp}/A_{ten}$) of a hydraulic actuator for making a poppet open consistently at constant force applied by an actuator. The result of the analysis is verified by measuring geometries of the poppets in the four different LLVs which are corresponding to four actuators with different capacity and have been used after being imported in this laboratory. Results of "Adjuster resolution tests" with two different pilot stages show the max. deviation of Fi(actuator force in instant of opening poppet) from average Fi obtained for each turn of adjuster is 0.3KN and max. deviation of the Fi normalized by average Fi of each turn of adjuster is 3.7%. From the results, it is verified that the two pilot stages with same poppet diameter ratio make a poppet consistently open at Fis within ${\pm}3.7%$ deviation from the average Fi. The deviation is shown to be caused from frictional force of O-ring in the poppet. Additionally, design factors for poppet spring and adjuster, which are also key parts of the pilot stage, are distinguished and procedure for deciding the factors are also shown in this study.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• 한국HCI학회:학술대회논문집
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• 2007.02a
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• pp.897-902
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• 2007

인간과 컴퓨터간의 전통적인 인터페이스는 인간이 요구하는 다양한 인터페이스를 제공하지 못한다는 점에서 점차 사용하기 불편하게 되었고 이는 새로운 형태의 인터페이스에 대한 요구로 이어지게 되었다. 본 논문에서는 이러한 추세에 맞추어 카메라를 통해 인간의 손 제스처를 인식하는 새로운 인터페이스를 연구하였다. 손은 자유도가 높고 3차원의 view direction에 의해 형상이 매우 심하게 변한다. 따라서 윤곽선 기반방법과 같은 2차원으로 투영된 영상에서 contour나 edge의 정보로 손 제스처를 인식하는 데는 한계가 있다. 그러나 모델기반 방법은 3차원 정보를 이용하기 때문에 손 제스처를 인식하는데 좋으나 계산량이 많아 실시간으로 처리하기가 쉽지 않다. 이러한 문제점을 해결하기 위해 손 형상에 대한 대규모 데이터베이스를 구성하고 정규화된 공간에서 Feature 간의 연관성을 파악하여 훈련 데이터 모델을 구성하여 비교함으로써 실시간으로 손 포즈를 구별할 수 있다. 이러한 통계적 학습 기반의 알고리즘은 다양한 데이터와 좋은 feature의 검출이 최적의 성능을 구현하는 것과 연관된다. 따라서 배경으로부터 노이즈를 최대한 줄이기 위해 피부의 색상 정보를 이용하여 손 후보 영역을 검출하고 검출된 후보 영역으로부터 HLF(Haar-like Feature)를 이용하여 손 영역을 검출한다. 검출된 손 영역으로부터 패턴 분류 과정을 거쳐 손 포즈를 인식 하게 된다. 패턴 분류 과정은 HLF를 이용하여 손 포즈를 인식하게 되는데 미리 학습된 각 포즈에 대한 HLF를 이용하여 손 포즈를 인식하게 된다. HLF는 Violar가 얼굴 검출에 적용한 것으로 얼굴 검출에 좋은 결과를 보여 주었으며, 이는 적분 이미지로부터 추출한 HLF를 이용한 Adaboost 학습 알고리즘을 사용하였다. 본 논문에서는 피부색의 색상 정보를 이용 배경과 손 영상을 최대한 분리하여 배경의 대부분이 Adaboost-Haar Classifier의 첫 번째 스테이지에서 제거되는 방법을 이용하여 그 성능을 더 향상 시켜 손 형상 인식에 적용하였다.

• Korean Journal of Agricultural Science
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• v.39 no.3
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• pp.395-405
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• 2012

Lipozyme TL IM-catalyzed esterification was carried out to produce functional hard fat (structured lipid, SL) using palm stearin (PS) and hydrolysate of pomegranate seed oil (HPSO) of 1:6 molar ratio. HPSO contained conjugated linolenic acid (CLnA, about 80%). The reaction was performed at non-solvent system and solvent (n-hexane) system using Lipozyme TL IM (10% of total substrates, w/w) for 12, 24, and 72 hr in a shaking water bath ($55^{\circ}C$ and 185 rpm), respectively. SL synthesized in non-solvent system (NH-SL) and SL synthesized in n-hexane system (H-SL) were refined after deacidification, respectively. Their physicochemical properties were compared to obtain desirable functional hard fat. The content of CLnA in NH-SL increased from 34.38% to 40.63% with increasing reaction time. Similar results also observed in H-SL resulting in 36.81~45.83% of CLnA. In triacylglycerol (TAG) composition, the main molecules of LnLnLn (Ln=linolenic acid, PN=36) and the LnLnP (P=palmitic acid, PN=40) were newly synthesized in NH-SL and H-SL with increasing reaction time. After 72 hr reaction, iodine values of NH-SL (136.49) and H-SL (140.37) showed high values because of the high content of CLnA. Solid fat index (SFI) in NH-SL was higher than that in H-SL at each measured temperature. The predominant polymorphic forms of NH-SL and H-SL obtained after esterification for 72 hr were the desirable crystalline structure of the ${\beta}$' form.