• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
• /
• pp.167-171
• /
• 2003

We report the material and electrical properties of $CoSi_2$ and $NiSi_2$contacts to n-type 4H-SiC depending on the post-annealing and the metal covering conditions. The Ni and Co silicides are deposited by RF sputtering with Ni/Si/Ni and Co/Si/Co films separately deposited on 4H-SiC substrates. The deposited films are annealed at $800\;^{\circ}C$ in $Ar:H_2$ (9:1) gas ambient. Results of the specific surface resistivity measurements show that the resistivity of the Co-based metal contact was the one order lower than that of the Ni-based contact. The specific contact resistance was measured by a transmission line technique, and the specific contact resistivity of $1.5{\times}10^{-6}\;{\Omega}\;cm^2$ is obtained for Co/Si/Co metal structures after a two-step annealing; at $550\;^{\circ}C$ for 10 min and $800\;^{\circ}C$ for 3min. The physical properties of the contacts were examined by using XRD and AES, and the results indicate that the Co-based metal contacts have better structural stability of silicide phases formed after the high temperature annealing.

• 소성∙가공
• /
• 제23권2호
• /
• pp.82-87
• /
• 2014

The plastic strain ratio is one of the factors that affect the deep drawability of Al alloy sheet. The deep drawability of Al alloy sheet is limited because of its low plastic strain ratio. Therefore an increase in the plastic strain ratio to improve the deep drawability of Al alloy sheet is needed. The current study investigated the increase of the plastic strain ratio and the change in texture of AA5083 Al alloy sheet after a 2 step asymmetric rolling with heat treatments. The average plastic strain ratio of initial AA5083 Al alloy sheets was 0.83. After the first asymmetric rolling step of 88% deformation and subsequent heat treatment at $320^{\circ}C$ for 10 minutes the value was still 0.83. After the second asymmetric rolling of 14% reduction and subsequent heat treatment at $330^{\circ}C$ for 10 minutes the plastic strain ratio rose to 1.01. The average plastic strain ratio after the 2 step asymmetric rolling and heat treatment is 1.2 times higher than that of initial AA5083 Al alloy sheet. This result is related to the development of ND/<111> texture component after the second asymmetric rolling and heat treatment.

• International Journal of Precision Engineering and Manufacturing
• /
• 제2권2호
• /
• pp.65-72
• /
• 2001

The design of multi-stage gear drives is a time-consuming process, since on includes more complicated problems, which are not considered in the design of single-stage gear drives. The designer has th determine the number of reduction stages and the gear ratios of each reduction state. In addition, the design problems include not only the dimensional design but also the configuration design of gear drive elements. There is no definite rule and principle for these types of design problems. Thus the design practices largely depend on the sense and the experiences of the designer , and consequently result in undesirable design solution. We propose a new generalized design algorithm to support the designer at the preliminary design phase of multi-stage gear drives. The proposed design algorithm automates the design process by integrating the dimensional design and the configuration design process. The algorithm consists of four steps. In the first step, a designer determines the number of reduction stage. In the second step. gear ratios se chosen by using the random search method. In the third step, the values of basic design parameter are chosen by using the generate and test method. Then, the values of other dimension, such ad pitch diameter, outer diameter, and face width, are calculated for the configuration design in the final step. The strength and durability of a gear is guaranteed by the bending strength and the pitting resistance rating practices by using the AGMA rating formulas. In the final step, the configuration design is carried out b using the simulated annealing algorithm. The positions of gears and shafts are determined to minimize the geometrical volume(size) of a gearbox, while satisfying spatial constraints between them. These steps are carried out iteratively until a desirable solution is acquired. The propose design algorithm has been applied to the preliminary design of four-stage gear drives in order to validate the availability. The design solution have shown considerably good results in both aspects of the dimensional and the configuration design.

• 전기화학회지
• /
• 제14권1호
• /
• pp.9-15
• /
• 2011

The composite membranes comprising of sulfonated polymers as matrix and ionic liquids as ion-conducting medium in replacement of water are studied to investigate the effect of annealing of the sulfonated polymers. The polymeric membranes are prepared on recast Nafion containing the ionic liquid, 1-ethyl-3-methylimidazolium tetrafluoroborate ($EMIBF_4$). The composite membranes are characterized by thermogravitational analyses, ion conductivity and small-angle X-ray scattering. The composite membranes annealed at $190^{\circ}C$ for 2 h after the fixed drying step showed better ionic conductivity, but no significant increase in thermal stability. The mean Bragg distance between the ionic clusters, which is reflected in the position of the ionomer peak (small-angle scattering maximum), is larger in the annealed composite membranes containing $EMIBF_4$ than the non-annealed ones. It might have been explained to be due to the different level of ion-clustering ability of the hydrophilic parts (i.e., sulfonic acid groups) in the non- and annealed polymer matrix. In addition, the ionic conductivity of the membranes shows higher for the annealed composite membranes containing $EMIBF_4$. It can be concluded that the annealing of the composite membranes containing ionic liquids due to an increase in ion-clustering ability is able to bring about the enhancement of ionic conductivity suitable for potential use in proton exchange membrane fuel cells (PEMFCs) at medium temperatures ($150-200^{\circ}C$) in the absence of external humidification.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
• /
• pp.307.2-307.2
• /
• 2016

In this study, we synthesized Au nanoparticles (AuNPs) in polyacrylonitrile (PAN) thin films using a simple annealing process in the solid phase. The synthetic conditions were systematically controlled and optimized by varying the concentration of the Au salt solution and the annealing temperature. X-ray photoelectron spectroscopy (XPS) confirmed their chemical state, and transmission electron microscopy (TEM) verified the successful synthesis, size, and density of AuNPs. Au nanoparticles were generated from the thermal decomposition of the Au salt and stabilized during the cyclization of the PAN matrix. For actual device applications, previous synthetic techniques have required the synthesis of AuNPs in a liquid phase and an additional process to form the thin film layer, such as spin-coating, dip-coating, Langmuir-Blodgett, or high vacuum deposition. In contrast, our one-step synthesis could produce gold nanoparticles from the Au salt contained in a solid matrix with an easy heat treatment. The PAN:AuNPs composite was used as the charge trap layer of an organic nano-floating gate memory (ONFGM). The memory devices exhibited a high on/off ratio (over $10^6$), large hysteresis windows (76.7 V), and a stable endurance performance (>3000 cycles), indicating that our stabilized PAN:AuNPs composite film is a potential charge trap medium for next generation organic nano-floating gate memory transistors.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
• /
• pp.286-289
• /
• 1991

We simulated ion implantation and annealing condition of 1 ${\mu}m$ CMOS device using process simulator, SUPREM-II. In this simulation, optimal condition of ion implantation for symmetric threshold voltage determination of PMOS and NMOS region, junction depth and sheet resistance of source/drain region, impurity profile of each region are investigated. Ion implantation dose for 3 ${\mu}m$ N-well junction depth and symmetric threshold voltage of $|0.6|{\pm}0.1$ V were $1.9E12Cm^{-2}$(for phosphorus), $1.7E122Cm^{-2}$(for boron) respectively. Also annealing condition for dopant activation are examined about $900^{\circ}C$, 30 minutes. After final process step, N-well junction, P+ S/D junction and N+ S/D junction depth are calculated 3.16 ${\mu}m$, 0.45 ${\mu}m$ and 0.25 ${\mu}m$ respectively.

• 한국재료학회지
• /
• 제2권1호
• /
• pp.27-34
• /
• 1992

Tantalum silicide films are prepared from a composite $TaSi_{28}$ target source and subjected to rapid thermal annealing($500-1100^{\circ}C$, 20sec) in Ar ambient. The formation and the properties of tantalum silicides have been investigated by using 4-point probe, x-ray diffraction, scanning electron microscope(SEM), Auger electron spectroscope(AES), and ${\alpha}$-step. It has been found that the sample annealed above $700^{\circ}C$ forms a polycrystalline $TaSi_2$ phase, and grains grow in granular form regardless of the kind of substrates. The mechanism of the formation of tantalum silicide is the nucleation and growth by Ta-Si short range reaction. The tantalum silicide film has the relatively low resistivity($70-72.5{\mu}{\Omega}-cm$) and smooth surface roughness.

• 열처리공학회지
• /
• 제10권1호
• /
• pp.1-9
• /
• 1997

The variation of the mechanical properties and the formation of retained austenite with heat treatment conditions in austempered Si bearing carbon steels has been investigated. In the case of a steel containing 0.35C-1.48Si-0.95Mn, it has been found that a feather shape bainite structure of lath are obtained under a isothermal treated condition at just below the Ms temperature, and the martensite, bainitic ferrite and retained austenite of second phase particles on the ferrite matrix for a isothermal treated steels after intercritical annealing are precipitated in a linked shape. The retained austenite with $2{\mu}m$ size induced as TRIP is found to increase with increasing the formation rate of retained austenite for the intercritical annealing and high Si containing steels. The tensile strength is increased as austempering temperature increases in all isothermal treatment temperature, whereas the elongation is shown to roughly decrease as the tensile strength increases. The values of tensile strength-elongation balance have showed a marked dependence upon the elongation rather than the tensile stregth, and their values are increased for high Si containing steels and intercritical annealing condition. The most optimum result has been shown to be the tensile stregth-elongation balance of $2882.4kgf/mm^2.%$ and the elongation of 33.3% for a "B" steel in the heat treating temperature range of $780{\sim}370^{\circ}C$.

• 전자공학회논문지A
• /
• 제29A권2호
• /
• pp.68-76
• /
• 1992

Concurrent Junction process (simultaneous formation of a silicide and a junction on the implanted substrate) by Rapid Thermal Annealig has been investigated. Electrical and material properties of CoSi$_2$ films were analyzed with Alpha Step, 4-point probe, X-ray diffraction(XRD) and Scanning Electron Microscope(SEM). And CoSi$_2$ junctions were examined with Spreading Resistance probe in order to see the redistribution of electrically activated dopants and determined the junction depth. Two step annealing process, which was 80$0^{\circ}C$ for 30sec and 100$0^{\circ}C$ for 30sec in NS12T ambient was employed to form CoSi$_2$ and shallow junctions. Resistivity of CoSi$_2$ was turned out to be 11-15${\mu}$cm and shallow junctions less than 0.1$\mu$m were successfully formed by the process. It was found that the dopant concentration at CoSi$_2$/Si interface increased as decreasing the thickness of Co films in case of $p^{+}/n$ and $n^{+}/p$ junctions while the junction depth decreased as increasing CoSiS12T thickness in case of $p^{+}/n$ junction.

• 제어로봇시스템학회논문지
• /
• 제4권2호
• /
• pp.256-263
• /
• 1998

Among process synthesis problems, the heat exchanger network (HEN) has been subjected to the most concentrated effort because this kind of problems was well defined for solving it and 20-30% energy savings could be realized in the present chemical processes. In this paper, we use an evolutionary approach for HEN synthesis because this approach can overcome the local optimum and combine some heuristic rules. The basic evolutionary approach is composed of three parts, that is, initialization step, growth step and mutation step, as in the simulated annealing and genetic algorithm. This algorithm uses the ecological rule that a better cell will live and worse cell should decompose after repeated generations. With this basic concept, a new procedure is developed and a more efficient method is proposed to generate initial solutions. Its effectiveness is shown using test examples.