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휨 구조의 압전 마이크로-켄틸레버를 이용한 진동 에너지 수확 소자

  • Na, Ye-Eun;Park, Hyeon-Su;Park, Jong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.476-476
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    • 2014
  • 서론: 저 전력 소모를 필요로 하는 무선 센서 네트워크 관련 기술의 급격한 발달과 함께 자체 전력 수급을 위한 진동 에너지 수확 기술에 대한 연구가 활발히 이루어지고 있다. 다양한 구조와 소재를 압전 외팔보에 적용하여 제안하고 있다. 그 중에서도 진동 기반의 에너지 수확 소자는 주변 환경에서 쉽게 진동을 얻을 수 있고, 높은 에너지 밀도와 제작 방법이 간단하다는 장점을 가지고 있어 많은 분야에 응용 및 적용 가능하다. 기존 연구에서는 2차원적으로 진동 에너지 수확을 위한 휜 구조의 압전 외팔보를 제안 하였다. 휜 구조를 갖는 압전 외팔보는 각각의 짧은 두 개의 평평한 외팔보가 일렬로 연결된 것으로 볼 수 있다. 하나의 짧고 평평한 외팔보는 진동이 가해지면 접선 방향으로 응력이 생겨 최대 휨 모멘텀을 갖게 된다. 그러므로 휜 구조를 갖는 외팔보는 진동이 인가됨에 따라 길이 방향과 수직 방향으로 진동한다. 하지만, 이 구조는 수평 방향으로 가해지는 진동에 대한 에너지를 수확하기에는 한계점을 가진다. 즉, 3축 방향에서 임의의 방향에서 진동 에너지를 수확하기는 어렵다. 본 연구에서는 3축 방향에서 에너지를 효율적으로 수확할 수 있도록 헤어-셀 구조의 압전 외팔보 에너지 수확소자를 제안한다. 제안된 소자는 길이 방향과 수직 방향뿐만 아니라 수평 방향으로도 진동하여 임의의 방향에서 진동 에너지를 수확할 수 있다. 구성 및 공정: 제안하는 소자는 3축 방향에서 임의의 진동을 수확하기 위해서 길이를 길게 늘이고 길이 방향을 따라 휘어지는 구조의 헤어-셀 구조로 제작하였다. 외팔보의 구조는 외팔보의 폭 대비 길이의 비가 충분히 클 때, 추가적인 자유도를 얻을 수 있다. 그러므로 헤어-셀 구조의 에너지 수확 소자는 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향을 통해서 3차원적으로 임의의 주변 진동 에너지를 수확하여 전기적인 에너지로 생성시킬 수 있다. 제작된 소자는 높은 종횡비를 갖는 무게 추($500{\times}15{\times}22{\mu}m3$)와 길이 방향으로 길게 휜 압전 외팔보($1000{\times}15{\times}1.7{\mu}m3$)로 구성되어있다. 공정 과정은 다음과 같다. 먼저, 실리콘 웨이퍼 위에 탄성층을 형성하기 위해 LPCVD SiNx를 $0.8{\mu}m$와 LTO $0.2{\mu}m$를 증착 후, 각각 $0.03{\mu}m$$0.12{\mu}m$의 두께를 갖는 Ti와 Pt을 하부 전극으로 스퍼터링한다. 그리고 Pb(Zr0.52Ti0.48)O3 박막을 $0.35{\mu}m$ 두께로 졸겔법을 이용하여 증착하고 상부 Pt층을 두께 $0.1{\mu}m$로 순차적으로 스퍼터링하여 형성한다. 상/하부 전극은 ICP(Inductively Coupled Plasma)를 이용해 건식 식각으로 패턴을 형성한다. PZT 층과 무게 추 사이의 보호막을 씌우기 위해 $0.2{\mu}m$의 Si3N4 박막이 PECVD 공정법으로 증착되고, RIE로 패턴을 형성된다. Ti/Au ($0.03/0.35{\mu}m$)이 E-beam으로 증착되고 lift-off를 통해서 패턴을 형성함으로써 전극 본딩을 위한 패드를 만든다. 초반에 형성한 실리콘 웨이퍼 위의 SiNx/LTO 층은 RIE로 외팔보 구조를 형성한다. 이후에 진행될 도금 공정을 위해서 희생층으로는 감광액이 사용되고, 씨드층으로는 Ti/Cu ($0.03/0.15{\mu}m$) 박막이 스퍼터링 된다. 도금 형성층을 위해 감광액을 패턴화하고, Ni0.8Fe0.2 ($22{\mu}m$)층으로 도금함으로써 외팔보 끝에 무게 추를 만든다. 마지막으로, 압전 외팔보 소자는 XeF2 식각법을 통해 제작된다. 제작된 소자는 소자의 여러 층 사이의 고유한 응력 차에 의해 휨 변형이 생긴다. 실험 방법 및 측정 결과: 제작된 소자의 성능을 확인하기 위하여 일정한 가속도 50 m/s2로 3축 방향에 따라 입력 주파수를 변화시키면서 출력 전압을 측정하였다. 먼저, 소자의 기본적인 공진 주파수를 얻기 위하여 수직 방향으로 진동을 인가하여 주파수를 변화시켰다. 그 때에 공진 주파수는 116 Hz를 가지며, 최대 출력 전압은 15 mV로 측정되었다. 3축 방향에서 진동 에너지 수확이 가능하다는 것을 확인하기 위하여 제작된 소자를 길이 방향과 수평 방향으로 가진기에 장착한 후, 기본 공진 주파수에서의 출력 전압을 측정하였다. 진동이 길이방향으로 가해졌을 때에는 33 mV, 수평방향으로 진동이 인가되는 경우에는 10 mV의 최대 출력 전압을 갖는다. 제안하는 소자가 수 mV의 적은 전압은 출력해내더라도 소자는 진동이 인가되는 각도에 영향 받지 않고, 3축 방향에서 진동 에너지를 수확하여 전기에너지로 얻을 수 있다. 결론: 제안된 소자는 3축 방향에서 진동 에너지를 수확할 수 있는 에너지 수확 소자를 제안하였다. 외팔보의 구조를 헤어-셀 구조로 길고 휘어지게 제작함으로써 기본적인 길이 방향, 수직방향 그리고 수평방향에 더불어 추가적으로 뒤틀리는 방향에서 출력 전압을 얻을 수 있다. 미소 전력원으로 실용적인 사용을 위해서 무게추가 더 무거워지고, PZT 박막이 더 두꺼워진다면 소자의 성능이 향상되어 높은 출력 전압을 얻을 수 있을 것이라 기대한다.

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SP Creep Degradation of Anisotropic Materials by the Hydride (수소화물에 의한 이방성재료의 소형펀치(SP) 크리프 열화거동)

  • Oh, Dong-Joon
    • 대한공업교육학회지
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    • v.35 no.2
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    • pp.204-223
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    • 2010
  • The purpose of this study was to investigate the high temperature creep behavior of anisotropic Zr-2.4%Nb alloy which includes the hydride. To minimize the effect of the anisotropy and to achieve the bi-axial stress condition, SP creep test was performed using the Zr alloys which have the 50 ppm, 100 ppm and 200 ppm hydride. Each SP creep curve was obtained and compared. While the creep degradation of 50 ppm and 100 ppm hydride specimens was clearly found, the degradation of 200 ppm was not cleared. By the comparison of SP creep constant and stree exponent, this fact was confirmed. As the degradation of 50 ppm and 100 ppm hydride was processed, the SP creep constant was decreased and the stress exponet was increased. However, while the SP creep constant of 200 ppm hydride was decreased, the stree exponent was decreased. Finally, it was confirmed that the creep degradation of 200 ppm was not found. In conclusion, the hydride was the major parameter to control the hight temperature creep degradation of Zr alloy.

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Ultimate Longitudinal Strength Analysis of Ship′s Hull Girder by Idealized Structural Unit Method (이상화(理想化) 구조요소법(構造要素法)에 의한 선체구조(船體構造)의 최종종강도(最終縱强度) 해석(解析))

  • Jeom-K. Paik
    • Journal of the Society of Naval Architects of Korea
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    • v.28 no.1
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    • pp.139-149
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    • 1991
  • In this paper, an efficient method for the ultimate longitudinal strength analysis of the double skin hull girder is presented by using idealized structural unit method. Idealized plate element subjected to biaxial load is developed taking account of initial deflection and welding residual stress. Interaction effect between local and global buckling in the whole structure is also taken into consideration. The reserve strength factor and reliability index for the example 40K double skin product oil carrier are evacuated against the ultimate longitudinal strength. It is concluded that the prudent method seems to be useful in the sense that the computing time required is very short while giving the reasonable solution.

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Dynamic Shear Modulus and Damping Ratio of Soft Clay (연약점토의 동력학적 전단탄성계수 및 감쇠비)

  • 하광현
    • Geotechnical Engineering
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    • v.2 no.1
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    • pp.55-66
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    • 1986
  • Considering the effects of confining pressure, initial shear stress, cyclic stress ratio and number of loading cycles, cyclic triaxial tests are carried out to clarify the soil dynamic properties such as shear modulus and value of material damping of clay under undrained cyclic loading conditions. The results show that no obvious dependency on initial shear stress and effective confining stress are recognized in the shear modulus and damping ratio plotted versus strain. However, the shear modulus decreases and the damping ratio increases with increasing axial strain. When compared with others, it is also revealed that the shear moduli are distributed within the range curves obtained using empirical equations derived by Marcuson et al. (3) and Kokusho et al. (4), and damping ratios are distributed between the curves obtained by Kokusho et al. (4) and Ishihara et al. (9).

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Kinematic and Structural Analysis of a 6-DOF Manipulator for Narrow-space Work (협소 공간 작업을 위한 6축 다관절 로봇의 기구학 및 구조해석)

  • Chung, Seong Youb;Choi, Du-Soon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.3
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    • pp.666-672
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    • 2017
  • Our research team is developing a 6-DOF manipulator for narrow workspaces in press forming processes, such as placing PEM nuts on the bottom of a chassis. In this paper, kinematic analysis was performed for the position control of the manipulator, along with structural analyses for position accuracy with different payloads. First, the Denavit-Hatenberg (DH) parameters are defined, and then the forward and backward kinematic equations are presented using the DH parameters. The kinematic model was verified by visual simulation using Coppelia Robotics' virtual robot experimentation platform (V-REP). Position accuracy analysis was performed through structural analyses of deflection due to self-weight and deflection under full payload (5 kgf) in fully opened and fully folded states. The maximum generated stress was 22.05 MPa in the link connecting axes 2 and 3, which was confirmed to be structurally safe when considering the materials of the parts.

Modeling of rock dilation and spalling in an underground opening at depth (대심도 지하공동에 발생하는 암반의 팽창 및 스폴링 현상 모델링)

  • Cho, Nam-Kak;Lee, Yong-Joo
    • Journal of Korean Tunnelling and Underground Space Association
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    • v.12 no.1
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    • pp.31-41
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    • 2010
  • This paper presents both numerical and physical modeling approaches for the dilation and spalling of rock recognized as typical process of rock around an underground opening at depth. For physical approach, laboratory testing of rectangular beams using a synthetic rock was used to investigate the onset of dilation and spalling. The beams are axially compressed and subjected to 4-point bending to provide non-uniform compressive stresses which are similar to the maximum tangential stress distribution around circular openings. Discrete element numerical analyses using commercial code $PFC^{2D}$ (Particle Flow Code) were performed to evaluate the stress path at various locations in the beams. The findings from these approaches suggest that the onset of dilation in laboratory tests appears to be a good indicator for assessing the stress magnitudes required to initiate spalling.

A Proposal of Parameter to Predict Biaxial Fatigue Life for CF8M Cast Stainless Steels (CF8M 주조 스테인리스강의 2축 피로수명 예측을 위한 파라미터의 제안)

  • Park Joong Cheul;Kwon Jae Do
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.29 no.6 s.237
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    • pp.815-821
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    • 2005
  • Biaxial low cycle fatigue test was carried out to predict fatigue life under combined axial-torsional-loading condition which is that of in-phase and out-of-phase for CF8M cast stainless steels. Fatemi-Socie(FS) parameter which is based on critical plane approach is not only one of methods but also the best method that can predict fatigue life under biaxial loading condition. But the result showed that, biaxial fatigue life prediction by using FS parameter with several different parameters for the CF8M cast stainless steels is not conservative but best results. So in this present research, we proposed new fatigue life prediction parameter considering effective shear stress instead of FS parameter which considers the maximum normal stress acting on maximum shear strain and its effectiveness was verified.

Wavelet Series Analysis of Axial Members with Stress Singularities (응력특이를 갖는 축방향 부재의 웨이블렛 급수해석)

  • Woo, Kwang-Sung;Jang, Young-Min;Lee, Dong-Woo;Lee, Sang-Yun
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.23 no.1
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    • pp.1-8
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    • 2010
  • The Fourier series uses a vibrating wave that possesses an amplitude that is like the one of the sine curve. Therefore, the functions used in the Fourier series do not change due to the value of the frequency and that set a limit to express irregular signals with rapid oscillations or with discontinuities in localized regions. However, the wavelet series analysis(WSA) method supplements these limits of the Fourier series by a linear combination of a suitable number of wavelets. By using the wavelet that is focused on time, it is able to give changes to the range in the cycle. Also, this enables to express a signal more efficiently that has singular configuration and that is flowing. The main objective of this study is to propose a scheme called wavelet series analysis for the application of wavelet theory to one-dimensional problems represented by the second-order elliptic equation and to evaluate theperformance of proposed scheme comparing with the finite element analysis. After a through evaluation of different types of wavelets, the HAT wavelet system is chosen as a wavelet function as well as a scaling function. It can be stated that the WSA method is as efficient as the FEA method in the case of axial bars with distributed loads, but the WSA method is more accurate than the FEA method at the singular points and its computation time is less.

Evaluation of Characteristics of Shear Strength and Poisso's Ratio through Triaxial and Bender Element Tests (벤더엘리먼트와 삼축시험을 통한 모래의 전단강도 및 포아송비 특성 규명)

  • Yoo, Jin-Kwon;Park, Du-Hee
    • Journal of the Korean Geotechnical Society
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    • v.30 no.5
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    • pp.67-75
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    • 2014
  • In this paper, isotropically consolidated drained triaxial compression test device installed with bender elements is used to measure stress, stain, and shear wave velocity, from which the characteristics of shear strength and Poisson'ratio are investigated. The results show that there is a unique relationship between maximum shear modulus determined from shear wave velocity and effective vertical stress at failure, which is defined as the sum of vertical and radial stresses at failure. The correlation is very useful since it is possible to predict the shear strength and internal friction angle from shear wave velocity. In addition, Poisson's ratio is determined from measured axial and volumetric strains. It is demonstrated that the range of measured Poisson's ratio is between 0.15 and 0.6, and increases with the axial strain. The ratios at axial strains smaller than 0.2% corresponds to the range recommended in design codes, which are approximately from 0.3~0.35. However, at axial strains exceeding 1%, the measured ratios are between 0.5 and 0.6. It is therefore shown that use of ratios commonly used in practice will result in pronounced underestimation at large strains.

An Improved Bond Slip Model of CFT Columns for Nonlinear Finite Element Analysis (CFT 기둥의 비선형 유한요소해석을 위한 개선된 강관-콘크리트 간 부착 모델 개발)

  • Kwon, Yangsu;Kwak, Hyo-Gyoung;Hwang, Ju-Young;Kim, Jin-Kook;Kim, Jong-Min
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.28 no.2
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    • pp.213-220
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    • 2015
  • CFT column has a lot of structural advantages due to the composite behavior between in-filled concrete and steel tube. This paper deals with the development of an effective numerical model which can consider the bond-slip behavior between both components of concrete matrix and steel tube without taking double nodes. Since the applied axial load to in-filled concrete matrix is delivered to steel tube by the confinement effect and the friction, the governing equation related to the slip behavior can be constructed on the basis of the force equilibrium and the compatability conditions. In advance, the force and displacement relations between adjacent two nodes make it possible to express the slip behavior with the concrete nodes only. This model results in significant savings in the numerical modeling of CFT columns to take into account the effect of bond-slip. Finally, correlation studies between numerical results and experimental data are conducted to verifying the efficiency of the introduced numerical model.