• Title/Summary/Keyword: 13.56 Mhz

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Control of Plasma Characteristic to Suppress Production of HSRS in SiH4/H2 Discharge for Growth of a-Si: H Using Global and PIC-MCC Simulation

  • Won, Im-Hui;Gwon, Hyeong-Cheol;Hong, Yong-Jun;Lee, Jae-Gu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.312-312
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    • 2011
  • In SiH4/H2 discharge for growth process of hydrogenated amorphous silicon (a-Si:H), silane polymers, produced by SiH2 + Sin-1H2n ${\rightarrow}$ SinH2n+2, have no reactivity on the film-growing surface. However, under the SiH2 rich condition, high silane reactive species (HSRS) can be produced by electron collision to silane polymers. HSRS, having relatively strong reactivity on the surface, can react with dangling bond and form Si-H2 networks which have a close correlation with photo-induced degradation of a-Si:H thin film solar cell [1]. To find contributions of suggested several external plasma conditions (pressure, frequency and ratio of mixture gas) [2,3] to suppressing productions of HSRS, some plasma characteristics are studied by numerical methods. For this study, a zero-dimensional global model for SiH4/H2 discharge and a one-dimensional particle-in-cell Monte-Carlo-collision model (PIC-MCC) for pure SiH4 discharge have been developed. Densities of important reactive species of SiH4/H2 discharge are observed by means of the global model, dealing 30 species and 136 reactions, and electron energy probability functions (EEPFs) of pure SiH4 discharge are obtained from the PIC-MCC model, containing 5 charged species and 15 reactions. Using global model, SiH2/SiH3 values were calculated when pressure and driving frequency vary from 0.1 Torr to 10 Torr, from 13.56 MHz to 60 MHz respectively and when the portion of hydrogen changes. Due to the limitation of global model, frequency effects can be explained by PIC-MCC model. Through PIC-MCC model for pure SiH4, EEPFs are obtained in the specific range responsible for forming SiH2 and SiH3: from 8.75 eV to 9.47 eV [4]. Through densities of reactive species and EEPFs, polymerization reactions and production of HSRS are discussed.

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The Synthesis and MR Properties of New Macromolecular MR Contrast Agent (새로운 거대분자 MR 조영제의 합성 및 MR 특성에 관한 연구)

  • 장용민;장영환;황문정;박현정;전경녀;이종민;배경수;강봉석
    • Investigative Magnetic Resonance Imaging
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    • v.6 no.1
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    • pp.35-40
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    • 2002
  • Purpose : To evaluate the NMR relaxation properties and imaging characteristics of tissue-specificity for a newly developed macromolecular MR agent. Materials and methods : Phthalocyanine (PC) was chelated with paramagnetic ion, Mn.2.01g (5.2 mmol) of Phthalocyanine was mixed with 0.37g (1.4 mmol) of Mn chloride at $310^{\circ}C$ for 36 hours and then purified by chromatography (CHC13/CH3OH 98/2 v/v, Rf, 0.76) to obtain 1.04g (46%) of MnPC (molecular weight= 2000d). The $T1}T2$ relaxivity of MnPC was measured in 1.5T(64 MHz) MR using 0.1 mM MnPC. The MR image characteristics of MnPC was evaluated using spin-echo (TR/TE=500/14 msec) and gradient-echo (FLASH) (TR/TE=80/4 msec, flip angle=60) techniques in 1.57 MR scanner. The images of rabbit liver were obtained every 10 minutes up to 4 hours. To study the effect of concentration on image, 20 mM, 50 mM, 100 mM of MnPC were tested. Results : The relaxivities of MnPC at 1.5T(64MHz) were Rl=7.28 $mM^{-1}S^{-1},{\;}R2=55.56mM^{-1}S^{-1}$. Compared to the values of Gd-DTPA (Rl[=4.8 $mM^{-1}S^{-1})$], R2[=5.2 $mM^{-1}S^{-1}])$]), both T1/T2 relaxivities of MnPC were higher than those of Gd-DTPA. For both of SE and FLASH techniques, the contrast enhancement reached maximum at 10 minutes after bolus injection and the enhancement continued for more than 2 hours. When compared with small molecular weight liver agents such as Gd-EOB-DTPA, Gd-BOPTA and MnDPDP, MnPC was characterized by more prolonged enhancement time. The time course of MR images also revealed biliary excretion of MnPC. Conclusion : We developed a new macromolecular MR agent, MnPC. The relaxivities of MnPC were higher than those of small molecular weight Gd-chelate. Hepatic uptake and biliary excretion of MnPC suggests that this agent is a new liver-specific MR agent.

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The Learning System Design and the Implementation using RFID (RFID를 이용한 학습시스템 설계 및 구현)

  • Lee, Duck-Ju;Lim, Dong-Kyun;Shin, Seung-Jung
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.10 no.6
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    • pp.301-306
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    • 2010
  • Thesis is about RFID(Radio Frequency Identification) technology which is recently in the spotlight of overall industry including physical distribution. Most RFID systems in Korea are imported, and there are also problems in manpower. In order to prevent these kinds of problems, students made to get and easy access to RFID system. The purpose of is to solve the regulation problems. We made an application software to practice RFID system implemented, which have several modules so that it can be easy for users to understand RFID system. We also invented a system which makes student ID to help users understand how RFID system is implemented in real life.

Adsorption Behavior of PAHs in Cigarette Smoke on Glass Beads - Effect of Plasma Polymerization Coating (담배 연기 내 PAH의 유리입자에 대한 흡착거동 - 플라즈마 고분자 중합 코팅 영향)

  • Basarir, Fevzihan;Rhee, Moon-Soo;Lee, Young-Taek;Yoon, Tae-Ho
    • Journal of Adhesion and Interface
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    • v.11 no.4
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    • pp.137-143
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    • 2010
  • Glass beads (GBs) were modified via plasma polymerization coatings in order to enhance the adsorption of polycyclic aromatic hydrocarbons (PAHs) in cigarette smoke and activated carbons (ACs) were also utilized for comparative purposes. First, GBs and ACs were subjected to surface modification via plasma polymerization coating of acrylic acid, acrylonitrile, 1,3-diaminopropane, thiophene or dimethylphosphite with a RF plasma (13.56 MHz) generator. Next, their adsorption behavior was evaluated with a home-made 4-port smoking machine by collecting the total particulate matters (TPMs) on a Cambridge filter pad, followed by the separation of PAHs via solid phase extraction and analysis with GC/MS. Finally, the plasma polymerization coatings were analyzed by FT-IR/ATR to elucidate the adsorption mechanism, while the topology of the modified GBs and ACs were studied by FE-SEM.

Small Internal Antenna Using Multiband, Wideband, and High-Isolation MIMO Techniques

  • Kim, Sang-Hyeong;Jin, Zhe-Jun;Chae, Yoon-Byung;Yun, Tae-Yeoul
    • ETRI Journal
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    • v.35 no.1
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    • pp.51-57
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    • 2013
  • In this paper, a small internal antenna for a mobile handset is presented using multiband, wideband, and high-isolation multiple-input multiple-output techniques. The proposed antenna consists of three planar inverted-F antennas (PIFAs) that operate in the global system for mobile communication (GSM900), the digital communication system (DCS), the personal communication system (PCS), the universal mobile telecommunication system (UMTS), and wireless local area network (WLAN) bands with a physical size of $40mm{\times}10mm{\times}10mm$. A resonator attached to the folded PIFA creates dual resonances, achieving a wide bandwidth of approximately 460 MHz, covering the DCS, PCS, and UMTS bands; a meander shorting line is used to improve impedance matching. Additionally, a modified neutralization link is embedded between diversity antennas to enhance isolation, which results in a 6-dB improvement in the isolation and less than 0.1 in the envelope correlation coefficient evaluated from the far-field radiation patterns. Simulation and measurements demonstrate very similar results for S-parameters and radiation patterns. Peak gains show 3.73 dBi, 3.77 dBi, 3.28 dBi, 2.15 dBi, and 5.86 dBi, and antenna efficiencies show 56.15%, 72.15%, 68.59%, 52.92%, and 82.93% for GSM900, DCS, PCS, UMTS, and WLAN bands, respectively.

저주파 및 고주파 구동 대기압 플라즈마 젯의 특성 비교

  • Gwon, Yang-Won;Baek, Eun-Jeong;Eom, In-Seop;Jo, Hye-Min;Kim, Seon-Ja;Jeong, Tae-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.194.2-194.2
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    • 2016
  • 저주파 (수십 kHz)와 고주파 (13.56 MHz)로 구동되는 대기압 플라즈마 젯을 발생시키고, 인가전압 (혹은 인가전력)과 기체 유량에 따른 대기압 플라즈마의 특성을 비교하였다. 고주파에서 발생된 플라즈마는 저주파의 경우보다 안정적이었으며, 인가전압 (혹은 인가전력)이 증가함에 따라 플라즈마 기체온도는 상승하였고, 고주파 젯의 기체온도는 저주파 젯 보다 높았으나 330 K이하인 것을 확인하였다. Optical Emission Spectroscopy (OES)를 이용하여 저주파와 고주파의 광 방출 특성을 측정하였다. 저주파에서는 $N_2{^+}$ (391.4 nm)의 intensity 증가가 두드러지게 나타났지만 고주파 젯에서는 $N_2$, $N_2{^+}$의 intensity는 감소하였으며, OH, NO, $H_{\alpha}$, O와 같은 활성 산소 종 (Reactive Oxygen Species)이 저주파 젯 보다 높게 측정되었다. Boltzmann plot method를 이용한 분석을 통해 저주파와 고주파 영역에서의 플라즈마 전자 여기 온도를 측정하였다. 또한 자외선 흡수분광법을 이용하여 플라즈마-액체 계면에서의 OH이 입자밀도를 측정하여 OES방법으로 측정한 OH 밀도와 비교하였다. 그리고 화학적 측정법 (terephtalic acid solution)을 이용하여 액체 내의 OH의 농도를 측정하였다.

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Power Transmission Mechanism and Data Communication of the Dosimeter using Contactless Powerless Transmission (선량계의 무선전력 전송 메카니즘과 데이터 통신 시스템 구현)

  • Lee, Seung-Min;Chung, Sung-In;Lee, Heung-Ho
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.4
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    • pp.814-819
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    • 2010
  • This study proposes the antenna circuit design for the transmitting wireless power, the development of the RF non-contact type Dosimeter. That is, the study designed the optimization and numerical analysis of the antenna circuit for the antenna design of 13.56MHz over the frequency bands for transmitting wireless power. We studied the needed items in the existing RF type Dosimeter with battery to implement the wireless power non-contact Dosimeter within the battery. We compared to the real measurement value as calculating the value of the inductance and capacitance through the numerical analysis for the antenna LC resonance using the theory of the electromagnetic induction method. This method to drive low power is designed to simplify the circuit and to improve the efficiency of the rectifier. We convince our research contributes not only to understand the simplified circuit and miniaturization, but also to help the design and application technology of the wireless power transmit system which is received power supply with wireless.

A Study on Development of Dual Band RFID Manager (Dual Band RFID Manager 개발에 관한 연구)

  • Li, Zhong-Shi;Jho, Yong-Chul;Kwon, Gu-Soon;Choi, Moon-Seung;Han, Woon-Soo;Lee, Chang-Ho
    • Journal of the Korea Safety Management & Science
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    • v.11 no.4
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    • pp.169-176
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    • 2009
  • Many researches and projects are implemented about u-IT according to changes of ubiquitous environments in the world. Especially, there are benefits to raise lifestyle and we can develop industry by applying ubiquitous regionally. Also it makes citizen feel comfortable directly. There are many projects to regionally adopt ubiquitous services like u-City model for getting this advantages. RFID technology must be suited to each environment because each RFID tag has different characteristics according to frequency band. We need to integrate bands of RFID to overcome limitations and provide more detail information and services. In this study, we develop the dual band RFID Manager needed adopting u-Zone service for both 13.56MHz and 2.45GHz. The RFID Manager, application software for base station of u-Zone, delivers the information from readers to integrated u-Zone server system.

A Study on the Bathochromic of Poly(Ethylene Terephthalate) Fabrics by Plasma Polymerization (Plasma polymerization에 의한 PET 직물의 심색화에 관한 연구)

  • Cho, Hwan;Kim, Han-Ki;Jang, Byung-Yul;Lee, Kwang-Woo;Cho, In-Sool;Heo, Man-Woo
    • Textile Coloration and Finishing
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    • v.5 no.3
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    • pp.194-205
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    • 1993
  • Plasma polymerization in prepared glow discharge was carried out to improve the bathochromic of dyed PET fabrics by using silicon containing vinyl monomer in plasma polymerization equipment which consists of a pair of electrodes was connected to the 13.56MHz RF generator. The optimum condition for the bathochromic effect was investigated on various plasma polymeriztion parameters. By plasma polymerization used silicon containing vinyl monomer, the bathochromic of dyed PET fabrics was very enhanced. The optimum conditions on this equipment were as follows ; electrode distance : 3cm, discharge output : 60W, gas pressure : 0.3 Torr, monomer flow rate : 30㎤/min. plasma polymerization time : 60sec. The apparent strength of plasma polymerized PET fabrics was increased about 40∼47% with decreasing about 3 of L value.

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An Analysis of Vacuum Plasma Phenomena in DBD(Dielectric Barrier Discharges) (DBD(Dielectric Barrier Discharges)에서 전공 플라즈마 발생에 대한 해석적 연구)

  • Shin, Myoung-Soo;Cha, Sung-Hoon;Kim, Jong-Bong;Kim, Jong-Ho;Kim, Seong-Young;Lee, Hye-Jin
    • Journal of the Korean Society for Precision Engineering
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    • v.26 no.3
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    • pp.122-128
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    • 2009
  • DBD(Dielectric Barrier Discharges) plasma is often used to clean the surface of semiconductor. The cleaning performance is affected mainly by plasma density and duration time. In this study, the plasma density is predicted by coupled simulation of flow, chemistry mixing and reaction, plasma, and electric field. 13.56 MHz of RF source is used to generate plasma. The effect of dielectric thickness, gap distance, and flow velocity on plasma density is investigated. It is shown that the plasma density increases as the dielectric thickness decreases and the gap distance increases.