A study on the Poly-$Si_{1-x}Ge_x$ thin film deposition (I) Variation of the deposition rate and Ge composition with deposition parameters
(다결정 $Si_{1-x}Ge_x$ 박막 증착에 관한 연구(I) 증착변수에 따른 증착속도 및 Ge조성 변화)
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- Journal of the Korean Crystal Growth and Crystal Technology
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- v.7 no.4
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- pp.578-588
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- 1997