• Korean Chemical Engineering Research
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• v.43 no.1
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• pp.27-32
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• 2005

We propose an effective and environmentally friendly dry stripping method using a supercritical carbon dioxide ($SCCO_2$) system modified by a single and multiple cosolvents to remove ion-implanted photoresist and residue from a wafer surface at three different temperatures (97, 148, $200^{\circ}C$) and pressures (200, 300, 400 bar). After high dose of ion implantation the photoresist was not easily removed by using pure $SCCO_2$, but swollen. The $SCCO_2$ system modified by single cosolvents and multiple cosolvents mixed with aprotic solvents could not effectively remove the heavy organics, but swell them. However, the $SCCO_2$ system modified with multiple cosolvent (5%, v/v) composed of DMSO and DIW showed high removal efficiency for ion-implanted photoresists at $97^{\circ}C$ and 200 bar for 30 min (about 80%). In this study it has been shown that the dry stripping method using $SCCO_2$ system modified with multiple cosolvents could replace either plasma ashing or acid and solvent wet bench method and dramatically reduce accompanied chemical usage and disposal.

• Applied Chemistry for Engineering
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• v.27 no.5
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• pp.516-520
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• 2016

Concentrated liquid detergents have 2~3 times higher surfactant contents [35~45% (w/w)] compared to those of normal type detergents. In general, a single surfactant forms a lyotropic liquid crystal (LC) phase when the concentration is in the region of 30~60% (w/w). Whereas the concentrated liquid detergent at about 40% (w/w) concentration in a mixed surfactant system shows an opaque appearance of gel or LC. In order to meet consumer needs and preference for product appearance, we applied hydrotropes and various surfactants systems in concentrated liquid detergents to obtain an opaque gel-phase and also a clear transparent phase at even below zero $^{\circ}C$ temperature. The more effective hydrotropes for making concentrated liquid detergents are 1,6-hexanediol, adipic acid and dipropylene glycol (DPG) which have two hydrophilic groups in both terminated positions. In order to prepare an excellent concentrated liquid detergent, good hydrotropes alongside secondary type surfactants like LAS and SAS were used. The formation of LC phase of concentrated liquid detergents at about 40% (w/w) concentration could be prevented by the use of both hydrotropes and secondary type surfactants. The result indicate that concentrated detergents having excellent low temperature stability and controlled viscosity can be prepared.

• Applied Chemistry for Engineering
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• v.17 no.5
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• pp.552-556
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• 2006

An advanced oxidation process catalyzed by iron ions in the presence of hydrogen peroxide, the so-called Fenton's reaction, has been applied to the treatment of steam generator chemical cleaning waste containing highly concentrated iron(III)- ethyl-enediaminetetraaceticacid (Fe(III)-EDTA) of 70000 mg/L. The experiments for the degradation of Fe(III)-EDTA were carried out not only with a simulated waste, but also with the real one. The effect of pH and the amount of hydrogen peroxide added to the waste on the degradation was examined, and the results were discussed in several aspects. The optimal pH to maximize the degradation efficiency was dependent on the amount of hydrogen peroxide added to the waste. i.e., when the amount of hydrogen peroxide was different, maximum degradation efficiency was obtained at different pH's. The optimal amount of hydrogen peroxide relative to that of Fe(III)-EDTA was found to be 24.7 mol ($H_{2}O_{2}$)/mol (Fe(III)-EDTA) at pH around 9.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.247-251
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• 2004

반도체 소자의 제조에 있어 실리콘 표면에 성장한 자연산화막을 제거하기 위해 일반적으로 습식 세정 기술이 이용되어 왔다. 하지만 소자의 최소 선폭(design rule)이 nano급으로 고집적화 됨에 따라 contact hole 바닥의 자연산화막을 깨끗이 제거하는데 있어서 그 한계를 나타나고 있다. 이에 대한 효과적인 대안 공정으로 가스 건식 세정 기술이 연구되고 있다. 본 논문에서는 한 번에 50매 이상의 웨이퍼를 처리함으로써 생산성 측면에서 월등한 배치식 설비에서 원거리 플라즈마(remote plasma) 장치에서 2.450Hz의 마이크로웨이브(${\mu}$-wave)에 의해 형성시킨 수소라디칼과 $NF_3$ 가스를 이용하여 실리콘에 결함을 주지 않고 자연산화막을 선택적으로 제거하는 공정에 대해 고찰하였다. AFM을 이용한 표면분석, TEM을 이용한 물성분석, 그리고 ToF-SIMS 및 XPS를 이용한 화학 분석을 습식 및 건식 세정을 비교 평가한 결과, 건식 세정 공정이 실리콘 표면에 결함을 주지 않고 자연산화막을 제거 할 수 있음을 확인하였다. 산화막$(SiO_2)$, 질화막$(Si_3N_4)$, 그리고 다결정 실리콘(Poly-Si) 등의 각 막질별 식각 특성을 고찰하였으며, $NH_3$의 캐리어 가스인 $N_2$의 주입량을 조절함으로써 수소라디칼 형성 효율의 개선이 가능하였으며, 이로부터 게이트와 소스/드레인 사이를 절연하기 위해 이용되는 질화막의 식각 선택비를 2배 정도 개선할 수 있었다. nano급 소자에 실장하여 평가한 결과에서 불산(HF)에 의한 습식 세정 방식에 비하여 약 $20{\sim}50%$ 정도의 contact 저항 감소 효과가 있음이 확인되었다.두 소자 모두 $40mA/cm^2$ 에서 이상적인 화이트 발란스와 같은(0.33,0.33)의 색좌표를 보였다.epsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.한 관심이 높아지고 있다. 그러나 고 자장 영상에서의 rf field 에 의한 SAR 증가는 중요한 제한 요소로 부각되고 있다. 나선주사영상은 SAR 문제가 근원적으로 발생하지 않고, EPI에 비하여 하드웨어 요구 조건이 낮아 고 자장에서의 고속영상방법으로 적합하다. 본 논문에서는 고차 shimming 을 통하여 불균일도를 개선하고, single shot 과 interleaving 을 적용한 multi-shot 나선주사영상 기법으로 $100{\times}100$에서 $256{\times}256$의 고해상도 영상을 얻어 고 자장에서 초고속영상기법으로 다양한 적용 가능성을 보였다. 연구에서 연구된 $[^{18}F]F_2$가스는 친핵성 치환반응으로 방사성동위원소를 도입하기 어려운 다양한 방사성의 약품개발에 유용하게 이용될 수 있을 것이다.었으나 움직임 보정 후 영상을 이용하여 비교한 경우, 결합능 변화가 선조체 영역에서 국한되어 나타나며 그 유의성이 움직임 보정 전에 비하여 낮음을 알 수 있었다. 결론: 뇌활성화 과제 수행시에 동반되는 피험자의 머리 움직임에 의하여 도파민 유리가 과대평가되었으며 이는 이 연구에서 제안한 영상정합을 이용한 움직임 보정기법에 의해서 개선되었다. 답이 없는 문제, 문제 만들기, 일반화가 가능한 문제 등으로 보고, 수학적 창의성 중 특히 확산적 사고에 초점을 맞추어 개방형 문제가 확

• Clean Technology
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• v.15 no.4
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• pp.287-294
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• 2009

In order to separate the fuel-grade DME from the product of a direct DME synthesise reaction, containing 19~20% of DME, an absorption column and a purification column were employed. In the DME absorption column, the flow rate of the methanol required to recover more than 99% of DME at 50 bar was estimated by the correlation obtained from the lab-scale experiments. In the DME purification column, the maximum DME recovery of 98.2% could be obtained even from the side stream at the 3rd stage above the feed stage, since the feed stream originated from the product of the absorption column had already contained a large amount of DME (20~30 mol%) and only a small amount of light products such as $CO_2$ and $N_2$ (5~10 mol%).

• Journal of the Korean earth science society
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• v.35 no.4
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• pp.225-236
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• 2014

Multivariate statistical analyses have been extensively applied to hydrochemical measurements to analyze and interpret the data. This study examines anthropogenic factors obtained from applications of correspondence analysis (CA) and principal component analysis (PCA) to a hydrogeochemical data set. The goal was to synthesize the hydrogeochemical information using these multivariate statistical techniques by incorporating hydrogeochemical speciation results calculated by the program, commonly used, WATEQ4F included in the NETPATH. The selected case study was LPG underground storage caverns, which is located in the southeastern Korea. The highly alkaline groundwaters at this study area are an analogue for the repository system. High pH, speciation of Al and possible precipitation of calcite characterize these groundwaters. Available groundwater quality monitoring data were used to confirm these statistical models. The present study focused on understanding the hydrogeochemical attributes and establishing the changes of phase when two anthropogenic effects (i.e., disinfection activity and cement pore water) in the study area have been introduced. Comparisons made between two statistical results presented and the findings of previous investigations highlight the descriptive capabilities of PCA using calculated saturation index and CA as exploratory tools in hydrogeochemical research.

• Journal of Korean Society of Water and Wastewater
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• v.21 no.5
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• pp.559-569
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• 2007

The purposes of this study were to find the main foulant of membrane and the optimal chemical cleaning method for MF(microfiltration) drinking water treatment system using D dam water as water source. The MF pilot plant which can treat maximum $500m^3/d$ consisted of 3 racks and was operated for 10 months under various operation conditions. After 10 months operation, $1^{st}$ and $2^{nd}$ rack of membrane pilot plant system were cleaned chemically and the degree of the restoration of the fouled membrane in terms of the pure water flux was detemnined. Inorganic compounds which contained in chemical cleaning waste was analyzed by Inductively Coupled Plasma (ICP). One membrane module for 3rd rack was disjointed and membrane fouling materials, especially inorganic compounds were investigated by Electron Probe Microanlysis (EPMA) to elucidate the reason of TMP increase. And also, the various chemical reagents (1N HCl or $H_2SO_4$, oxalic acid as acid and 0.3% NaOCl as alkali) were tested by combination of acid and alkali to determine the optimal chemical cleaning method for the MF system using micro-modules manufactured using the disjointed module. It was verified that the inside and outside of membrane module was colorized with black. As a result of the quantitative and semi-qualitative analysis of membrane foulant by ICP, most of inorganic foulant was manganese which is hard to remove by inorganic acid such as HCI. Especially, it was observed by EPMA that Mn was attached more seriously in inside surface of membrane than in outside surface of that. It was supposed that Mn fouling in inside surface of membrane might be caused by the oxidation of soluble manganese (Mn(II)) to insoluble manganese ($MnO_2$) by chlorine containing in backwashing water. The optimal cleaning method for the removal of manganese fouling was consecutive cleaning with the mixture of 1N HCl and 1% of oxalic acid, 0.3% NaOCl, and 1N HCl showing 91% of the restoration of the fouled membrane.

• Journal of Korean Society of Environmental Engineers
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• v.38 no.6
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• pp.291-298
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• 2016

Electrochemical water treatment process as a useful treatment method for the removal of non-degradable matter has been consistently studied for several decades. Key process of electrochemical water treatment are oxidation reaction from an anode and reduction from a cathode. In this study, the effect of pre-treatment methods in the insoluble electrode manufacturing process for the water treatment has been evaluated for the life time of electrode The results of this study showed that pre-treatment methods of a base metal such as surface roughness, clean method and interlayer formation influenced to life time of electrode when the same condition (catalyst electrode layer coating method and material system) was applied for pre-treatment methods. This study was conducted by using $IrO_2/Ti$ electrode In the test of sand-blasting process, an electrode manufactured by using sanding media of different sizes resulted in the most effective electrode life time when the size of alumina was used for $212{\sim}180{\mu}m$ praticle size (#80). The most effective method was considered using arc plasma in the additional roughness control and cleaning process, sputtering method to form Ta type interlayer formation process.

• Journal of Conservation Science
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• v.34 no.6
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• pp.525-538
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• 2018

Myazedi Quadrilingual Stone Inscription of Myanmar, inscribed to the World Heritage List in 2015, is a rare historical artifact which has an exact date of inscription. It is a written record that displays the history, religion, and culture of Myanmar. Since the surface of the Stone Inscription has been rubbed with ink many times during the process of making printed copies for interpretation and academic research, it has developed a serious stain problem. Therefore, scientific analysis of the stain and research on the treatment for its removal have been conducted. In particular, an experiment was conducted on stain removal using laser cleaning and chemical treatment. The stains are mostly ink dirt, which accumulated from previous ink-rubbing processes. In order to conduct the experiment under similar conditions, a sample with similar stain has been reproduced, and a set of different conditions for treatment was applied to the sample to determine an effective solution. Laser cleaning was found to be effective in removing stains from most samples. However, chemical treatment showed different results. The physical friction method using ethanol provided the best result. In conclusion, laser cleaning is an effective universally-applicable technique but chemical treatment with laser cleaning can be considered an alternative method in certain situations.

• Clean Technology
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• v.16 no.3
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• pp.162-171
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• 2010

The objective of this study is to develop cleaning agents for the indoor water supply pipe which is environmentally friendly and suitable for removing scale by using various organic acids, inorganic acids, and some additives. Among various organic acids, oxalic acid, citric acid, and malic acid showed good cleaning efficiency of iron oxides which were main components of the indoor water supply pipe scale. Several cleaning agents were formulated by adding chemical additives into these organic acids and evaluated for removal of iron oxides. In this study, it was found that nonionic surfactants were excellent for the removal of iron oxide scale among various additives. Two types of cleaning agents($F_1$, $F_2$) with comparatively high solvent power for iron oxides were formulated in this study. The cleaning agents $F_1$ made by organic acids and some additives were formulated to be safe and environmentally friendly, but seemed to have disadvantage due to their comparatively low cleaning efficiency of iron oxide than $F_2$. But, the cleaning agents $F_2$ prepared by adding inorganic acid a little to $F_1$ showed comparatively good cleaning efficiency of iron oxide and could be recommended for removing hard scale of iron oxides in the indoor water supply pipe. Thus, it is considered that the formulated cleaning agents should be selected based on the extent of scale in the indoor water supply pipe.