• 전기의세계
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• v.32 no.2
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• pp.80-85
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• 1983

본고의 내용은 다음과 같다. 1. 플라즈마 중합에 이용되는 방전 2. 플라즈마 중합반응 3. 플라즈마 중합막 성장기구 4. 플라즈마 중합법의 응용

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.366-366
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• 2013

건식 박막증착 공정인 플라즈마 중합법을 이용하여 유기 재료인 Styrene을 절연 박막으로 제작하였다. 플라즈마 중합된 Styrene (ppS) 절연 박막의 정밀한 공정 제어를 위해 bubbler와 circulator를 이용하여 습식 공정과 비교하여도 절연 특성이 뛰어난 pps 절연 박막을 증착하고, 이를 활용하여 gate 전극으로 ITO, insulator layer로 pps, floating gate로 Au, tunneling layer로 ppMMA와 pps, semiconductor로 Pentacene, source/drain 전극으로 Au를 사용한 비휘발성 메모리 소자를 제작하였다. ppMMA와 pps의 서로 다른 tunneling layer의 두께 변화에 따른 비휘발성 메모리 특성 변화를 연구하였다.

• The Journal of the Korea institute of electronic communication sciences
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• v.6 no.5
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• pp.697-702
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• 2011

In this paper, We have fabricated PMMA thin films by plasma polymerization method for organic thin film transistor's insulator layer. In the electrical characteristic results with deposition pressures and substrate RF bias power in thin film deposition process, we have got dielectric constant of 3.4, high deposition rate of 8.6 [nm/min] and high insulation characteristics in condition of RF100 [W], Ar20 [sccm], 5 [mtorr], RF bias 20 [W]. Therefore, the fabricated thin films are possible as insulation layer of OTFT and organic memory.

• Journal of the Korean Institute of Telematics and Electronics T
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• v.36T no.3
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• pp.19-25
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• 1999

The photoreceptor films with double layer structure were prepared by the plasma polymerization and the dip-coating method. The blocking layer was coated with A1$_2$O$_3$ on the Al substrate and the charge generation layer was formed by H$_2$ phthalocyanine (H$_2$Pc). Poly 9-Vinylcarbazole was used as a charge transport layer. H$_2$Pc film prepared by the vacuum evaporation had absorption peaks on 613.6[nm] and 694.8[nm], and H$_2$Pc film prepared by the plasma polymerization had a dull peaks between 600 and 700[nm]. The surface potential of PVCz increased with increasing the applied voltage and the thickness of PVCz. The dark decay characteristic, the light decay time and the residual time increased with increasing the thickness of PVCz. The surface charge of PVCz of 15[${\mu}{\textrm}{m}$] thickness was 134[nc/$\textrm{cm}^2$] at the surface potential of -600[V] and the charge generation efficiency of H$_2$Pc was 0.034.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.6
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• pp.797-803
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• 2013

In this paper, we fabricated insulator thin films by plasma polymerization method for organic thin film transistor's insulator layer. For improving the electrical characteristics of organic transistor, we treated the semiconductor thin film with $O_2$ plasma. As results, the surface energy of organic transistor was increased from $38mJ/m^2$ to $72mJ/m^2$ and the mobility of organic transistor was increased $0.057cm^2V^{-1}s^{-1}$, that is increased 29% average ratio. Therefore, we have known that oragnic transistor's mobility can improve with plasma treatment of semiconductor thin film's surface.

• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.327-332
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• 2011

Plasma polymerized styrene (ppS) thin films were prepared on ITO coated glass substrates for a MIM (metal-insulator-metal) structure with thermally evaporated Au thin film as metal contact. Also the ppS thin films were applied as organic insulator to a MIS (metal-insulatorsemiconductor) device with thermally evaporated pentacene thin film as organic semiconductor layer. After the I-V and C-V measurements with MIM and MIS structures, the ppS revealed relatively higher dielectric constant of k=3.7 than those of the conventional poly styrene and very low leakage current density of $1{\times}10^{-8}Acm^{-2}$ at electric field strength of $1MVcm^{-1}$. The MIS structure with the ppS dielectric layer showed negligible hysteresis in C-V characteristics. It would be therefore expected that the proposed ppS could be applied as a promising dielectric/insulator to organic thin film transistors, organic memory devices, and flexible organic electronic devices.

• Applied Chemistry for Engineering
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• v.32 no.1
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• pp.49-54
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• 2021

Plasma-polymerized methyl methacrylate (MMA) thin films were synthesized by remote plasma, and effects of plasma power, reaction pressure and direct-indirect plasma on the growth rate and chemical bonding were investigated with alpha-step, FT-IR, XPS and Langmüir probe method. As the plasma power and pressure increased, the tendency of growth rate showed maximum value at a certain range. FT-IR and XPS analyses revealed that composition ratio of C/O and hydrocarbon (C-C) % in the deposited films increased with plasma power, but ester (COO) C % decreased with it. Direct plasma method was effective for fast growth rate, but indirect plasma method was favorable for maintaining the chemical structure of MMA.

• Journal of the korean academy of Pediatric Dentistry
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• v.30 no.2
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• pp.245-253
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• 2003

The degree of conversion of cross-linked polymer has great importance in determining the physical and mechanical properties, and biocompatibility. Therefore, this study examined the comparison of light-cured composite resin polymerization of various light-curing systems composed of plasma arc, halogen, LED curing units and pluse-delay curing with FTIR. From this experiment, The following results were obtained : 1. From FTIR, the degree of conversion(DC) of composite resin was 34.52-49.31%, DC of composite resin used in Flipo was $39.36{\pm}1.22%$, CrediII $45.64{\pm}1.34%$, XL3000 $43.48{\pm}1.34%$, VIP(mode 4) $44.31{\pm}0.72%$, LUXOMAX $49.31{\pm}2.37%$, Elipar Freelight $44.51{\pm}0.62%$ and $34.52{\pm}0.85%$ in pulse-delay curing. 2. The degree of conversion of composite resin in each light-curing unit was highest DC of the LUXOMAX system, lowest DC of the pulse-delay curing. 3. Compared with other curing system, Flipo, LUXOMAX, and pulse-delay curing were significant difference(p<0.05). 4. In same curing method group, the differences of each light-curing unit were no significace in halogen(conventional) curing method(p>0.05), but significance in plasma arc curing and LED curing method(p<0.05).

• Journal of the Korean Vacuum Society
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• v.6 no.3
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• pp.213-219
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• 1997

The plasma polymerized styrene films were prepared by using an inter-electrode capacitively coupled gas-flow-type reactor, and the effects of plasma polymerization condition on the molecular weight distribution were investigated by Fourier Transform Infrared (FT-IR), Pyrolysis Gas Chromatography(PyGC), Differential Scanning Calorimetry(DSC) and Gel Permeation Chromatography(GPC). From the above results, the very cross-linked films different from chemical characteristics of the starting monomer were taken out, and it is realized that the molecular structure, cross linking density, and molecular weight distribution could be controlled by changing the parameters such as deposition pressure, deposition power and gas flow rate. Accordingly, it is suggested that plasma polymerization method performed by inter-electrode capacitively coupled gas-flow-type reactor has good characteristics for manufacturing the functional organic thin films which can be applied in sensors, opto-electric device, photo-resist by changing the polymerization parameters.

• Electrical & Electronic Materials
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• v.6 no.5
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• pp.428-434
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• 1993

유기물 중에서 광기능성을 가지는 벤젠, 비닐 피리딘 및 스티렌 단량체를 채택하였다. 내정전결합 유동가스형 중합장치를 사용하여 플라즈마 박막을 제조하였으며 이들의 광학특성을 분석하였다. 중합시간, 압력 및 단량체 유량을 일정하게 유지하고 방전전력을 증가시키면 스티렌 박막의 중합률은 선형적으로 증가하나 벤젠 및 비닐 피리딘 박막의 증합률은 비선형적으로 증가한다. 그리고 파장이 변화에 따른 굴절률은 1.55~1.65 정도를 나타냈다. 박막의 굴절률은 방전전력의 증가에 따라 감소하게 된다. 또한 굴절률의 변화에 대한 소멸계수(K)의 계산이 $10^{-3}$정도의 범위에 있으므로 측정 결과가 타당함을 알 수 있다.