• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.238.1-238.1
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• 2015

2차원 탄소나노재료인 그래핀은 본연의 우수한 물성으로 인하여 전자소자, 에너지 저장매체, 유연성 전도막 등 다양한 분야로의 응용가능성이 제기되었다. 그러나 실제적인 응용을 위해서는 그래핀의 구조적인 결함을 최소화하며, 특성을 자유로이 제어하거나 향상시키는 공정의 개발이 필요하다. 일반적으로 화학적 도핑은 그래핀의 전기적 특성을 제어하는 효율적인 방법으로 알려져 있다. 화학적 도핑의 방법으로는 그래핀을 특정 가스 분위기에서 고온 열처리하거나 활성종들이 존재하는 플라즈마에 노출시킴으로써, 그래핀을 구성하는 탄소원자를 이종원자로 치환하거나 표면에 흡착시켜 기능화 된 그래핀을 얻는 방법 등이 제시되었다. 특히 플라즈마를 이용한 도핑방법은 저온에서 단시간의 처리로 효율적인 도핑이 가능하고, 인가전력, 처리시간 등의 플라즈마 변수를 변경하여 도핑정도를 수월하게 제어할 수 있다는 장점을 가지고 있다. 그러나 플라즈마 내에 존재하는 극성을 띄는 다양한 활성종들로 인하여 그래핀에 구조적인 결함을 형성하여 오히려 특성이 저하될 수 있어 이를 고려한 플라즈마 공정조건의 설정이 필수적이다. 따라서 본 연구에서는 플라즈마에 노출된 그래핀의 Raman 특성을 고찰함으로써 화학적 도핑과 구조적인 결함의 경계를 확립하고 구조결함의 형성을 최소화한 효율적인 도핑조건을 도출하였다. 고품질 그래핀은 물리적 박리법을 이용하여 300 nm 두께의 실리콘 산화막이 존재하는 실리콘 웨이퍼 위에 제작하였으며, 평행 평판형 직류 플라즈마 장치를 이용하여 전극의 위치, 인가전력, 처리시간을 변수로 암모니아(NH3) 플라즈마를 방전하여 그래핀의 Raman 특성변화를 관찰하였다. 그래핀의 구조적 결함 및 도핑은 라만 스펙트럼의 D, G, D', 2D밴드의 강도비와 G밴드의 위치와 반치폭(Full width at half maximum; FWHM)의 변화를 통해 확인하였다. 그 결과, 인가전력과 처리시간이 증가함에 따라 그래핀의 도핑레벨이 증가되고, 이후에는 도핑효과가 없어지고 결함의 정도가 상승하는 천이구역이 존재하며, 이를 넘어서는 너무 높은 인가적력의 처리는 그래핀에 결함을 형성하여 구조적인 붕괴를 야기함을 확인하였다.

• Economic and Environmental Geology
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• v.40 no.5
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• pp.563-574
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• 2007

Laser induced breakdown spectroscopy (LIBS) is a recently developed analytical technique that is based upon the measurement of emission lines generated by atomic species close to the surface of the sample, thus allowing their chemical detection, identification and quantification. With powerful advantages of LIBS compared to the conventional analytical methodology, this technique can be applied in the detection of heavy metals in the field. LIBS allows the rapid analysis by avoiding laborious chemical steps. LES have already been applied for the determination of element concentration in a wide range of materials in the solid, liquid and gaseous phase with simplicity of the instrument and diversity of the analytical application. These feasibility of rapid multi elemental analysis are appealing proprieties for the in-situ analytical technique in geochemical investigation, exploration and environmental analysis. There remain still some limitations to be solved for LIBS to be applied in soil environment as an in-situ analytical technology. We would like to provide the basic principle related to the plasma formation and laser-induced breakdown of sample materials. In addition, the matrix effect, laser properties and the various factors affecting on the analytical signal of LIBS was dealt with to enhance understanding of LIBS through literature review. Ultimately, it was investigated the feasibility of LIBS application in soil environment monitoring by considering the basic idea to enhance the data quality of LIBS including the calibration method for the various effects on the analytical signal of LIBS.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1538-1539
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• 2006

직경 0.3mm, 길이 40mm의 은 와이어를 증류수 중에서 전기폭발(wire explosion)을 발생시켰다. 전기폭발에 의해서 액체 중에 충격파 발생에 의한 공간의 형성과 더불어 금속 증기 및 플라즈마가 발생하고, 증기의 응축에 의해서 나노분말이 생성되는 것을 확인하였다. 또한 생성된 나노분말은 생성공간의 붕괴와 더불어 액체속으로 자연스럽게 분산되었다. 제조된 은 나노분말은 비교적 잘 분산된 구형의 분말이었으며 비표면적은 $16.2m^2/g$(평균입도 35nm)을 나타내었다.

• Polymer Science and Technology
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• v.20 no.5
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• pp.472-480
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• 2009

반도체 미세화가 진행되면서, 이를 성공하기 위해 많은 재료물질이 요구되어진다. 이 중 미세 패턴의 붕괴를 막고 깊은 패턴을 새기기 위해서 필요한 hardmask 재료가 있다. Hardmask는 유기실리콘 재료와 탄소 함량이 높은 재료로 주로 구성되고, 이들은 193 nm 빛과 관련된 광학적 특성을 가지면서 특정 플라즈마에 대한 에치 저항성을 가지는 물성을 가지도록 디자인/합성/배합되어져 있다. 또한, 접합되는 다른 박막과의 compatibility및 용매에 대한 solubility 등이 적절해야만 나노미터 수준의 defect 없는 패턴을 구현할 수 있다.

• Laser Solutions
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• v.17 no.4
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• pp.7-13
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• 2014

In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).

• Proceedings of the KSME Conference
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• 2001.06d
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• pp.325-330
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• 2001

One of the principal components of the KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak structure is the vacuum vessel, which acts as the high vacuum boundary for the plasma and also provides the structural support for internal components. Hyundai Heavy Industries Inc. has performed the engineering design of the vacuum vessel. Here the overall configuration of the KSTAR vacuum vessel was briefly described and then the design methodology and the analysis results were presented. The vacuum vessel consists of double walls, several ports, leaf spring style supports. Double walls are separated by reinforcing ribs and filled with baking/shielding water. The overall external dimensions of the main body are 3.39 m high, 1.11 m inner radius, 2.99 m outer radius, and made of SA240-316LN. The vacuum vessel was designed to be capable of achieving the base pressure of $1\times10^{-8}$ Torr, and also to be structurally capable of sustaining the vacuum pressure, the electromagnetic and thermal loads during plasma disruption and bakeout, respectively. The vacuum vessel will be baked out maximum $150^{\circ}C$ by hot pressurized water through the channels formed between double walls and the reinforcing ribs. A 3-D temperature distribution and the resulting thermal loads in the vessel were calculated during bakeout. It was found that the vacuum vessel and its supports were structurally rigid based on the thermal stress analysis. The maximum electromagnetic loads on the vacuum vessel induced by eddy and halo currents resulting from the engineering plasma radial and vertical disruption scenarios have been estimated. The stress analyses have been performed based on these electromagnetic loads and the resulting stresses at he critical locations of the vacuum vessel were within the allowable stresses.

• The KIPS Transactions:PartD
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• v.13D no.7 s.110
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• pp.985-996
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• 2006

As the internet technologies develop, the geographic information system environment is changing to the web-based service. Since geospatial information of the existing Web-GIS services were developed independently, there is no interoperability to support diverse map formats. In spite of the same geospatial information object it can be used for various proposes that is duplicated in GIS separately. It needs intelligent strategies for optimal replica selection, which is identification of replication geospatial information objects. And for management of replication objects, OMG, GLOBE and GRID computing suggested related frameworks. But these researches are not thorough going enough in case of geospatial information object. This paper presents a model of location service, which is supported for optimal selection among replication and management of replication objects. It is consist of tree main services. The first is binding service which can save names and properties of object defined by users according to service offers and enable clients to search them on the service of offers. The second is location service which can manage location information with contact records. And obtains performance information by the Load Sharing Facility on system independently with contact address. The third is intelligent selection service which can obtain basic/performance information from the binding service/location service and provide both faster access and better performance characteristics by rules as intelligent model based on rough sets. For the validity of location service model, this research presents the processes of location service execution with Graphic User Interface.

• Korean Journal of Soil Science and Fertilizer
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• v.42 no.5
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• pp.399-407
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• 2009

Laser induced breakdown spectroscopy(LIBS) is an simple analysis method for directly quantifying many kinds of soil micro-elements on site using a small size of laser without pre-treatment at any property of materials(solid, liquid and gas). The purpose of this study were to find an optimum condition of the LIBS measurement including wavelengths for quantifying soil elements, to relate spectral properties to the concentration of soil elements using LIBS as a simultaneous un-breakdown quantitative analysis technology, which can be applied for the safety assessment of agricultural products and precision agriculture, and to compare the results with a standardized chemical analysis method. Soil samples classified as fine-silty, mixed, thermic Typic Hapludalf(Memphis series) from grassland and uplands in Tennessee, USA were collected, crushed, and prepared for further analysis or LIBS measurement. The samples were measured using LIBS ranged from 200 to 600 nm(0.03 nm interval) with a Nd:YAG laser at 532 nm, with a beam energy of 25 mJ per pulse, a pulse width of 5 ns, and a repetition rate of 10 Hz. The optimum wavelength(${\lambda}nm$) of LIBS for estimating soil and plant elements were 308.2 nm for Al, 428.3 nm for Ca, 247.8 nm for T-C, 438.3 nm for Fe, 766.5 nm for K, 85.2 nm for Mg, 330.2 nm for Na, 213.6 nm for P, 180.7 nm for S, 288.2 nm for Si, and 351.9 nm for Ti, respectively. Coefficients of determination($r^2$) of calibration curve using standard reference soil samples for each element from LIBS measurement were ranged from 0.863 to 0.977. In comparison with ICP-AES(Inductively coupled plasma atomic emission spectroscopy) measurement, measurement error in terms of relative standard error were calculated. Silicon dioxide(SiO2) concentration estimated from two methods showed good agreement with -3.5% of relative standard error. The relative standard errors for the other elements were high. It implies that the prediction accuracy is low which might be caused by matrix effect such as particle size and constituent of soils. It is necessary to enhance the measurement and prediction accuracy of LIBS by improving pretreatment process, standard reference soil samples, and measurement method for a reliable quantification method.