• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2008.05a
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• pp.431-433
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• 2008

본 논문에서는 원자력 발전소의 SG세관 검사를 위한 배열와전류프로브의 와전류탐상 특성을 해석하였다. 신호해석을 위해 원자력발전소 SG 세관의 내부 및 외부결함을 모델링하였으며, 결함의 깊이는 세관 두께의 40[%]로 하였다. 해석방법은 3차원 유한요소법을 이용하여 전자기 수치 해석을 수행하였다. 두 종류 결함의 수치해석 비교 결과 내부결함의 신호가 외부결함 신호에 비해 크게 발생되는 것을 확인할 수 있었으며, 또한 획득한 신호를 ASME 표준 시험편을 이용한 배열와전류 프로브의 와전류탐상 실험신호와 비교하였다. 본 논문의 결과는 원전설비검사를 위한 배열와전류프로브 신호의 특성해석에 도움이 될 것으로 사료된다.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.73-77
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• 2017

Recently, fingerprint sensors have widely used for personal information security, and require quality evaluation to reduce an error of their recognition rate. Quality of fingerprint sensors is evaluated by variation of their electrical resistance introducing by contacts between a probe tip and a sensor electrode, Investigation on the materials compatability and structure optimization of probe is required to reduce deformation of sensor electrode for repeatability of quality testing. Nickel, steel(SK4), beryllium copper, and phosphor bronze were considered as probe materials, and beryllium copper was the most appropriate for materials of probe tips, considering indentation and contact resistance while being contacted probe tips on electrodes. Probes of an inspection part were manufactured with the single-unit structure for physical damage prevention and parallel processing capability. Inspection repeatability was evaluated by voltage variation of fingerprint sensors when the specific current was applied. A single-unit inspection part with beryllium copper probe tips showed excellent repeatability within ${\pm}0.003V$ of its voltage variation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.4
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• pp.1210-1215
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• 2010

The probe card are test modules which are to classify the good semiconductor chips and thin film before the packaging process. In the rapid growth a technology of semiconductor, the number of pads per unit area is increasing and pad arrays are becoming irregular. Therefore, the technology of probe card needs narrow width and lots of probe tip. In this paper, the probe tip based on the MEMS(Micro Electro Mechanical System)technology was developed a new MEMS probe tip for vertical probe card applications. For the structural designs of probe tip were performed to mechanical characteristics and structural analysis using FEM(Finite Element Method). Also, the contact force of MEMS probe tip compared with FEM results and experimental results. Finally, the MEMS probe card was developed a fine pitch smaller than $50{\mu}m$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.449-449
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• 2013

최근 반도체 소자의 집적회로는 점점 복잡해지고 있는 반면, 소자의 크기는 작아지고 있으며 그로 인해 패드의 크기가 작아지고 패드사이의 간격 또한 협소해지고 있다. 따라서 웨이퍼 단계에서 제조된 집적회로의 불량여부를 판단하기위한 검사 장비인 프로브카드(Probe Card)의 높은 집적도가 요구되고 있다. 하지만 기존의 MEMS 공법으로 제작되는 프로브 빔은 복잡한 제조 공정과 높은 생산비용, 낮은 집적도의 문제점을 가지고 있다. 본 연구에서는 이러한 문제점을 해결하기 위하여 간단한 제조 공정과 낮은 생산비용, 높은 집적도를 가지는 프로브 빔을 개발하기 위하여 절연절단 방식으로 BeCu (Beryllium-Copper) 프로브 빔을 제작하였다. 낮은 소비 전력으로 우수한 프로브 빔 어레이를 제작하기 위해서 가장 고려해야할 대상은 프로브 빔의 재료와 구조(형상)이다. 절연전단 방식으로 프로브 빔을 형성할 때 요구되는 Fusing current는 프로브 빔의 구조(형상)에 크게 영향을 받는다. 낮은 Fusing current는 소비 전력을 줄여주고, 절연절단으로 형성되는 프로브 빔의 단면(끝)을 날카롭게 하여 프로브 빔과 집적회로의 패드 간의 접촉 저항을 감소시킨다. 프로브 빔의 제작은 BeCu 박판을 빔 형태로 식각하여 제작하였으며, 실리콘 비아 홀(Via hole) 구조의 기판위에 정렬하여 soldering 공정을 통해 실리콘 기판과 BeCu 박판을 접합시켰다. 접합된 프로브 빔의 끝부분을 들어 올린 상태로 전류를 인가하여 stress free 상태로 만들어 내부 응력을 제거하였으며, BeCu 박판에 fusing current를 인가하여 BeCu 박판 프레임으로부터 제거를 하였다. 제작된 프로브 빔의 길이는 1.7 mm, 폭은 $50{\mu}m$, 두께는 $15{\mu}m$, 절단부의 단면적은 1$50{\mu}m^2$로 제작되었다. 그리고 프로브 빔의 절단부의 길이는 $50{\mu}m$ 부터 $90{\mu}m$까지 $10{\mu}m$ 증가시켜 제작되었다. 이후에 절연절단 공정에 요구되는 Fusing current를 측정하였고, 절연절단 후의 절단면의 형상을 SEM (Scanning Electron Microscope)장비를 통하여 확인하였다. 절단부의 길이가 $50{\mu}m$일 때 5.98A의 fusing current를 얻었으며, 절연절단 후 절단부 상태 또한 가장 우수했다. 본 연구에서 제안된 프로브 빔 제작 방법은 프로브카드 및 테스트 소켓(Test socket) 생산에 응용이 가능하리라 기대한다.

• The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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• v.17 no.4 s.60
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• pp.3-10
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• 2006

한국의 전파연구소와 일본의 정보통신연구기구는 휴대전화와 같은 이동통신기기로부터 방사되는 전자파가 인체에 흡수되는 에너지 정도를 측정하는 전자파 흡수율(SAR) 평가에 대한 오차 연구를 공동으로 수행하고 있다. 본 논문에서는 동종의 SAR 시스템에서 프로브, 교정용 도파관 및 기준 다이폴 안테나를 상호 교체하여 교정하여 프로브의 교정인자를 구하고 유효성 검사를 통하여 교정 오차를 검증하였다. 프로브 교정에 대한 상호 오차는 0.2 dB 이하의 결과를 얻었으며, 유효성 오차는 최대 0.28 dB를 얻었다. 그러나 SAR 외삽 알고리즘이 다를 경우는 최대 0.48 dB의 상대 오차를 보였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.1
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• pp.346-354
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• 2018

In the probe of a medical ultrasound device, three parts were selected randomly by the examiner and the bacteria in the probe were detected by the blood examiners. In addition, the degree of death of the pathogenic bacteria after each disinfection of the detected pathogens, disinfecting ethanol, and disinfecting tissue of the detected pathogens were analyzed quantitatively. The following was detected: S Aureus (32.3 %), Bacillus spp. (26.5 %), Micrococcus spp. (21.5 %), and CNS (20 %). With the conventional probe, S. aureus (26.2 %), a playback curve (24.2 %), and a micron (19.5 %), Micrococcus spp. (15.5 %), and CNS (14.6 %) were observed. In the fan probe, S. aureus (24.7 %), Enterococcus (24.7 %), Enterococcus (17.7 %), and CNS (13.8 %) were detected. The disinfection of the three pathogens detected revealed sterilization of most of the pathogens, and most cases contained at least 91.3 % of the total sterilizing effect (P>0.05). In addition, for the disinfection of Propolis extract and disinfecting tissue, the disinfection effect was lower than that of disinfecting ethanol, but the difference was not statistically significant (P>0.05). The results revealed bacteria on most of the ultrasound probes. Antiseptic disinfection of surgical instruments using an extract of propolis works with results similar to those of ethanol. A blood test along with disinfection can help prevent infection if an ultrasound probe is applied to food.

• Journal of the Korean Society of Radiology
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• v.16 no.3
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• pp.195-201
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• 2022

This study aims to evaluate the feasibility of the disinfection of clinical ultrasound probes using the vapor fumigation method, which can quickly achieve high-level disinfection. Upon the inspection of the microbial contamination level of clinically used ultrasound probes, nine different types of bacteria were detected. The disinfection efficacy of 7.5% and 35% hydrogen peroxide (H₂O₂) was comparatively tested for the detected microbes. The 35% H₂O₂ demonstrated superior efficacy per disinfection duration. No significant change was observed in the rubber component of the ultrasound probes as a result of the 35% H₂O₂ disinfection treatment. The probes were contaminated with the microbes detected in the microbial contamination level inspection and subsequently disinfected using the novel medical disinfector that utilizes the vapor fumigation method. As a result, the disinfection using the novel device achieved 100% eradication of the microbes from the probes.This study demonstrates that the novel vapor fumigation method-based disinfector provides a faster and more powerful means of disinfection than the conventional disinfection methods. Therefore, the novel disinfector has the potential to be used as a convenient ultrasound probe disinfector in clinical settings.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.6
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• pp.661-667
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• 2011

Kinematic contact trigger probes are widely used for feature inspection and measurement on coordinate measurement machines (CMMs) and computer numerically controlled (CNC) machine tools. Recently, the probing accuracy has become one of the most important factors in the improvement of product quality, as the accuracy of such machining centers and measuring machines is increasing. Although high-accuracy probes using strain gauge can achieve this requirement, in this paper we study the universal economic kinematic contact probe to prove its probing mechanism and errors, and to try to make the best use of its performance. Stylus-ball-radius and center-alignment errors are proved, and the probing error mechanism on the 3D measuring coordinate is analyzed using numerical expressions. Macro algorithms are developed for the compensation of these errors, and actual tests and verifications are performed with a kinematic contact trigger probe and reference sphere on a CNC machine tool.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.8
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• pp.851-856
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• 2012

The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process. A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and $100{\mu}m$(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1~2 gf(Contact Force) and $100{\mu}m$(Over drive).

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.6
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• pp.16-25
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• 2008

The micro needle means the ultrafine probe of 'Probe Card'. The size of micro needle is so minute that it is difficult to minute that it is difficult to inspect it with eyes. On the other hand it is very critical if there is a defect in micro needle of probe card. In this study, we developed an automatic visual inspection system for finding defect status in probe angle, tip length and diameter. Through the experimental results, we could find that our proposed method is better than human-eyes inspection method in accuracy and inspection speed, and also in robustness to lighting circumstances.