• Journal of Advanced Navigation Technology
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• v.13 no.3
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• pp.412-418
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• 2009

This study aims to develop a system that enables 20 to 25 wafers to be automatically aligned at the position of the corresponding serial number and facilitates the checkout of wafer processing by sensing them before and after semiconductor processing. It also suggests compensation algorithm and stepper motor control algorithm that carefully align notches. This study minimizes the rate of occurrence by adopting materials of which the surface has proper coefficient of friction when wafers are rotating and that do not rarely produce particles. This study completed the development of a slip resistance apparatus and carried out performance tests through mathematical verification. This system is expected to improve semiconductor yield due to anti-pollution technology in semiconductor processing and can be selectively applied to a large size wafer over 450mm in the future.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.1
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• pp.8-15
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• 2005

This study concerns the characteristics of helical flow in a concentric and eccentric annulus with a diameter ratio of 0.52 and 0.9, whose outer cylinders are stationary and inner ones are rotating. Pressure losses and skin friction coefficients have been measured for fully developed flows of water and $0.2\%$ aqueous of sodium carboxymethyl cellulose(CMC), respectively, when the inner cylinder rotates at the speed of $0\~500$ rpm. The effect of rotation on the skin friction coefficient is significantly dependent on the flow regime. In all flow regimes, the skin friction coefficient is increased by the inner cylinder rotation. This study shows the change of skin friction coefficient and wall shear stress corresponding to the variation of rotating speed of the inner cylinder, radius ratio, eccentricity, and working fluids.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.120-124
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• 2004

본 연구는 Diluted Ceria 입자를 사용한 $SiO_2$(Oxide) CMP 현상에 대한 내용이다. Ceria Slurry의 경우 Silica Slurry와 비교하였을 때 Oxide Wafer 표면과 축합 화학반응을 일으키며 Chemistry Dominant한 CMP Mechanism을 따르고, Wafer Center Removal Rate(RR) Fast 의 특성을 가진다. Ceria Slurry의 문제점인 연마 불균일도를 해결하기 위해 Tribological System을 이용하였다. CMP Tribology는 Pad-Slurry 유막-Wafer의 System을 가지며 윤활막에 작용하는 마찰계수(COF)가 주요 인자이다. Tribology에 적용되는 Stribeck Curve를 통해 Slurry 윤활막의 두께(h) 정도를 예상할 수 있으며, 이 윤활막의 두께를 조절함으로써 Uniformity 향상이 가능하다. 이 Ceria Slurry CMP의 연마 불균일도를 향상시킬 수 있는 방법으로 pH 조절 및 점도 증가가 있다. Ceria 입자 CMP는 분산액의 pH 변화에 강한 작용을 받게 되며 PH5 근방에서 최적화된 Uniformity가 가능하다. 점도를 증가시키는 경우 유막 h가 증가하게 되어 Ceria Slurry의 유동이 균일 분포 상태에 가까워지며 Wafer Uniformity 향상이 가능하다.

• Proceedings of the KSME Conference
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• 2002.08a
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• pp.337-340
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• 2002

The present experimental and numerical investigations are performed for the characteristics of transitional flow in a concentric annulus with a diameter ratio of 0.52, whose outer cylinder is stationary and inner one rotating. The flow field of an annulus has been numerically solved using a finite volume method. The pressure losses and Skin-friction coefficients have been measured for the fully developed flow of water and $0.2{\%}$ aqueous solution of sodium carboximethy1 cellulose (CMC), respectively at inner cylinder rotational speed of $0{\~}600rpm$. The transitional flow has been examined by the measurement of pressure losses to reveal the relation of the Reynolds and Rossby numbers with the skin-friction coefficients. The occurrence of transition has been checked by the gradient changes of pressure losses and skin-friction coefficients with respect to the Reynolds numbers. Consequently the critical(axial-flow) Reynolds number decreases as the rotational speed increases. Thus, the rotation of inner cylinder promotes the early occurrence of transition due to the onset of Taylor vortices.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.5
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• pp.741-746
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• 2012

The increase of energetic efficiency in plane bearing is getting more important in the transfer mechanism of semi-conductor and display panel manufacturing processes. To accomplish this objective, the technique of surface texturing on bearing surface has recently emerged as one of the most effective candidates. In this study, the effects of various pattern parameters on two bearing performance indices(load carrying capacity and effective friction coefficient) are investigated through a semi-analytic method, i.e., the 2-dimensional Reynolds equation incorporated into the finite difference scheme. Here, cavitation effect is also taken into account by employing an appropriate numerical scheme. In this study, the patterns in the textured surface are composed of a series of semi-spheres or semi-ellipsoids in shape. The effects of their size and number density on the performance indices are examined through the performance of various numerical experiments. Also, the effects of the anisotropy of the semi-ellipsoidal pattern on the bearing's lubrication characteristics are investigated and discussed.

• Journal of Energy Engineering
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• v.12 no.2
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• pp.131-138
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• 2003

This paper considered the structural mechanism of transitional boundary layer by the experimental approach. In order to measure the turbulence quantity in the boundary layer, we made a wind tunnel with 400${\times}$190${\times}$2500 mm test section and a flat plate with well fabricated leading edge. Hot wire anemometer was used for acquiring the continuous turbulence signal which is processed by special software. The results of experiment show that the region where turbulence spot is dominant moves from near wall to overall layer and thus the anisotropy of velocity fluctuation shows so large value. Also the turbulence energy originally contained in low frequency band comes up to the high frequency band. Finally the turbulence model needs minimum two length scales to consider the pre-transition region.

• Journal of Advanced Marine Engineering and Technology
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• v.19 no.4
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• pp.61-71
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• 1995

Nowadays the thin-walled metal bearing, which is made seperately from the bearing housing and has the ratio of wall thickness/bearing diameter being less than 1/30, are used in many newly developed large-sized slow speed diesel engines for the purpose of upgarding lubication performance and easy maintenance according to the trends of increasing output per cylinder and lowering engine speed. The type of this bearing has been used generally in many small-sized high speed engines applied for automobile, high speed craft and industrial power generation systems since 1950s. But the tranditional thick-walled bearings, whice are linned white metal on the bearing housing directly, have been installed on the large and slow speed engines until 1990s due to the easy manufacturing procedures. In this study we have calculated optimum dimensions of the metal bearing, fabricated special zigs for crush measurement, model test machine, 2 sets of specimens.(crosshead pin bearing, $\phi$818*552*20mm) for B & W 6S70MC(20, 940*88rpm), and evaluated metal constact phenomena of white metal, its friction coefficient, temparature rise through the model test and field performance test.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.631-636
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• 2000

The experimental study concerns the characteristics of a transitional flow in a concentric annulus with a diameter ration of 0.52, whose outer cylinder is stationary and inner one rotating. The pressure drops and skin-friction coefficients have been measured for the fully developed flow of water and that of glycerine-water solution (44%) at a inner cylinder rotational speed of $0{\sim}600$ rpm, respectively. The transitional flow have been examined by the measurement of pressure drops and the visualization of flow field, to reveal the relation of the Reynolds and Rossby numbers with the skin-friction coefficients and to understand the flow instability mechanism. The present results show that the skin-friction coefficients have the significant relation with the Rossby numbers, only for laminar regime. The occurrence of transition has been checked by the gradient changes of pressure drops and skin-friction coefficients with respect to the Reynolds numbers. The increasing rate of skin-friction coefficient due to the rotation is uniform for laminar flow regime, whereas it is suddenly reduced for transitional flow regime and, then, is gradually declined for turbulent flow regime. Consequently, the critical (axial-flow) Reynolds number decreases as the rotational speed increases. Thus, the rotation of inner cylinder promotes the early occurrence of transition due to the excitation of taylor vortices.

• Journal of the Korean Society of Propulsion Engineers
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• v.17 no.3
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• pp.15-20
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• 2013

The graphites as airtight structure seals prevent high-pressure and high-temperature gas from flowing into actuator of propulsion system and generate lubricant film during wear procedure to assist lubricant and sealing. In this study, the tribological characteristics of the graphite in high-temperature are evaluated. In order to evaluate the tribological characteristics of high density graphite(HK-6), variables which are temperature, sliding speed and contact load are set. this study suggest optimized environment conditions through the wear properties of graphite. Consequeantly, high temperature is better than at room temperature to generate lubricant film, so that friction coefficient of graphite is lower at high temperature than at room temperature.

• Polymer(Korea)
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• v.36 no.2
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• pp.190-195
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• 2012

Interfacial and rheological properties of selected hydrogel formulations were studied to understand the contact-lens comfort in end use. It was concluded that protein adsorption from aqueous solution decreased monotonically with increasing surface energy (water wettability) of tested hydrogels. Also, it has revealed that friction coefficient of polydimethylsiloxane-polyvinylpyrrolidone (PDMS-PVP) was significantly larger that 2-hydroxyethyl methacrylate (HEMA) based hydrogels. Interestingly, in artificial tear solution, friction coefficients of HEMA based hydrogels were larger than silicone hydrogels.