• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.12
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• pp.1641-1646
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• 2011

The second-generation magnetic abrasive polishing is one of the nontraditional machining technologies newly developed. Because of the flexibility effect in magnetic abrasive polishing, the precise and mirror like surface can be obtained during this process. In this study, magnetic abrasive polishing process was applied in small grooved surface. As a result, it was seen that the flexible magnetic abrasive tool was effective to remove burrs on the edge of the groove. However, the efficiency of magnetic abrasive polishing at the slot was very low according to increasing depth and width of slot. So, correlation between geometric parameters, such as the depth and width, and surface roughness was evaluated and the minimum width for suitable polishing was found by experimental results.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.11a
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• pp.249-254
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• 2004

광의 효율적 사용을 위해 표면에 마이크로 그루브가 새겨진 고성능 광학 부품의 개발이 활발하고, 이들 부품의 다량 생산을 위한 초정밀 금형제조기술이 각광을 받고 있다. 최근의 초정밀 미세 기계가공의 경우 간단한 공정으로 이러한 마이크로 그루브 금형을 제작할 수 있다. 특히 조명각 변조용 렌티큘러 렌즈와 같이 실린더형 그루브 금형의 경우에는 기존의 Lithography, MEMS, LIGA 등 광 에너지를 이용한 다른 제조방법들에서는 가공하기 어려운 점이 있으나, 기계가공에서는 쉽게 제작가능한 장점이 있다. 본 연구에서는 이러한 미세기계가공기술의 장점을 활용하여 U 형 마이크로 그루브를 가진 Lenticular 렌즈용 금형을 가공하고자 하였다. 가공에는 3 축 구동의 초정밀 미세 복합가공기와 단결정 천연 다이아몬드공구가 사용되었고, 가공방식은 마이크로 세이핑 공정을 적용하였으며, 가공 금형 재료에는 Brass와 무전해 Nickel이 사용되었다. 실험을 통하여 금형가공시의 절삭력, 칩 형상, 가공표면 등의 분석이 수행되었으며 이를 기반으로 여러 가지 가공문제점을 해결하고, 최종적으로 양호한 렌티큘러렌즈용 금형을 가공하였다.

• The Journal of Korean Academy of Prosthodontics
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• v.55 no.4
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• pp.361-371
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• 2017

Purpose: We aimed to investigate the gene expression of human gingival fibroblasts on microgroove surface using DNA microarray. Materials and methods: Microgrooves were applied on grade II titanium discs to have 0/$0{\mu}m$ (NE0, control group), 60/$10{\mu}m$ (E60/10, experimental group) of respective width/depth by photolithography. The entire surface of the microgrooved Ti substrata was further acid etched and used as the two experimental groups in this study. Human gingival fibroblasts were cultured in the experimental group and the control group, and total RNA was extracted. The oligonucleotide microarray was performed to confirm the changes of various gene expression levels between experimental group and control group. Changes of gene expression level were determined at the pathway level by mapping the expression results of DNA chips, using the KEGG (Kyoto Encyclopedia of Genes and Genomes) pathway analysis. Results: Gene expression levels on E60/10 and NE0 were analyzed, there were 123 genes showing significant differences in expression more than 1.5 times on E60/10 microgrooved surface compared to NE0 surface, and 19 genes showing significant differences in expression more than 2 times. The KEGG pathway analysis confirmed the changes in gene expression levels under experimental conditions. Cell signaling, proliferation, and activity among the various gene expression results were identified. Conclusion: Microgrooved surfaces induce gene expression changes and related cell signaling. According to the results of this study, microgrooves can be used as the surface of various biomaterials which need to improve cell activity through gene expression changes and activation of cell signaling.

• The Journal of Korean Academy of Prosthodontics
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• v.53 no.3
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• pp.198-206
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• 2015

Purpose: We aimed to investigate the effect of combined various microgrooves and thermal oxidation on the titanium (Ti) and to evaluate various in vitro responses of human periodontal ligament cells (PLCs). Materials and methods: Grade II titanium disks were fabricated. Microgrooves were applied on titanium discs to have $0/0{{\mu}m}$, $15/3.5{{\mu}m}$, $30/10{{\mu}m}$, and $60/10{{\mu}m}$ of respective width/depth by photolithography. Thermal oxidation was performed on the microgrooves of Ti substrata for 3 h at $700^{\circ}C$ in air. The experiments were divided into 3 groups: control group (ST), thermal oxidation group (ST/TO), and combined microgrooves and thermal oxidation group (Gr15-TO, Gr30-TO, Gr60-TO). Surface characterization was performed by field-emission scanning microscopy. Cell adhesion, osteoblastic differentiation, and mineralization were analyzed using the bromodeoxyurdine (BrdU), Alkaline phosphatase (ALP) activity, and extracellular calcium deposition assays, respectively. Statistical analysis was performed using the oneway analysis of variance and Pearson's bivariate correlation analysis (SPSS Version 17.0). Results: In general, the combined microgrooves and thermal oxidation group (Gr15-TO, Gr30-TO, Gr60-TO) showed significantly higher levels compared with the control (ST) or thermal oxidation (ST-TO) groups in the BrdU expression, ALP activity, and extracellular calcium deposition. Gr60-TO group induced highest levels of cell adhesion and osteoblastic differentiation. Conclusion: Within the limitation of this study, we conclude that the Ti surface treatment using combined microgrooves and thermal oxidation is highly effective in inducing the cell adhesion andosteoblastic differentiation. The propose surface is also expected to be effective in inducing rapid and strong osseointegration of Ti oral implants.

• Proceedings of the Korea Contents Association Conference
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• 2017.05a
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• pp.489-490
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• 2017

골유착은 비골조직의 삽입없이 뼈와 금속간의 직접적인 접합으로 치과 임플란트나 정형외과적 기구의 임상적 성공여부를 판가름 짓는 중요한 요소이다. 현재까지 골유착을 향상시킨다 알려진 패턴은 일부 알려져 있지만, 표면패턴이 제한적이라 기대만큼 큰 발전을 이루지 못했다. 본 연구는 특정 그루브 패턴이 조골세포의 분화를 조절할 수 있음을 보여주면, 특정 패턴에서 조골세포의 분화를 강화시킬 수 있다는 계념은 치과의 임플란트나 정형외과 의료기기에 개발에 중요한 기초를 제공할 수 있으리라 사료된다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.33.2-33.2
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• 2011

CMP (Chemical-Mechanical Planarization) 공정이란 화학적 반응과 기계적 힘을 동시에 이용하여 표면을 평탄화하는 공정으로, 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위해 CMP 공정이 도입되었으며 반도체 패턴의 미세화와 다층화에 따라 CMP 공정의 중요성은 더욱 강조되고 있다. CMP 공정은 압력, 속도 등의 공정조건과, 화학적 반응을 유도하는 슬러리, 기계적 힘을 위한 패드 등에 의해 복합적으로 영향을 받는다. CMP 공정에서, 폴리우레탄 패드는 많은 기공들을 포함한 그루브(groove)를 형성하고 있어 웨이퍼와 직접적으로 접촉을 하며 공정 중 유입된 슬러리가 효과적으로 연마를 할 수 있도록 도와주는 역할을 한다. 하지만, 공정이 진행 될수록 그루브는 손상이 되어 제 역할을 하지 못하게 된다. 패드 컨디셔닝이란 컨디셔너가 CMP 공정 중에 지속적으로 패드 표면을 연마하여 패드의 손상된 부분을 제거하고 새로운 표면을 노출시켜 패드의 상태를 일정하게 유지시키는 것을 말한다. 한편, 금속박막의 CMP 공정에 사용되는 슬러리는 금속박막과 산화반응을 하기 위하여 산화제를 포함하는데, 산화제는 금속 컨디셔너 표면을 산화시켜 부식을 야기한다. 컨디셔너의 표면부식은 반도체 수율에 직접적인 영향을 줄 수 있는 scratch 등을 발생시킬 뿐만 아니라, 컨디셔너의 수명도 저하시키게 되므로 이를 방지하기 위한 노력이 매우 중요하다. 본 연구에서는 컨디셔너 표면에 연마 잔여물 흡착을 억제하고, 슬러리와 컨디셔너 표면 간에 일어나는 표면부식을 방지하기 위하여 소수성 자기조립 단분자막(SAM: Self-assembled monolayer)을 증착하여 특성을 평가하였다. SAM은 2가지 전구체(FOTS, Dodecanethiol를 사용하여 Vapor SAM 방법으로 증착하였고, 접촉각 측정을 통하여 단분자막의 증착 여부를 평가하였다. 또한 표면부식 특성은 Potentiodynamic polarization와 Electrochemical Impedance Spectroscopy (EIS) 등의 전기화학 분석법을 사용하여 평가되었다. SAM 표면은 정접촉각 측정기(Phoenix 300, SEO)를 사용하여 $90^{\circ}$ 이상의 소수성 접촉각으로써 증착여부를 확인하였다. 또한, 표면에너지 감소로 인하여 슬러리 내의 연마입자 및 연마잔여물 흡착이 감소하는 것을 확인 하였다. Potentiodynamic polarization과 EIS의 결과 분석으로부터 SAM이 증착된 표면의 부식전위와 부식전류밀도가 감소하며, 임피던스 값이 증가하는 것을 확인하였다. 본 연구에서는 컨디셔너 표면에 SAM을 증착 하였고, CMP 공정 중 발생하는 오염물의 흡착을 감소시킴으로써 CMP 연마 효율을 증가하는 동시에 컨디셔너 금속표면의 부식을 방지함으로써 내구성이 증가될 수 있음을 확인 하였다.

• Polymer(Korea)
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• v.34 no.1
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• pp.32-37
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• 2010

Photo-alignment property of groove patterned surface prepared from blend of poly (vinyl cinnamate) (PVCi) and oligomeric dicinnamate was investigated for the application for alignment layer of liquid crystal display. The study of the photoreaction kinetics using UV-vis spectrum with the irradiation time showed that the reaction rate of oligomeric cinnamate was enhanced compared to that of PVCi. Blend where PVCi was main component showed a slight improvement on the photoreaction rate. It was unable to obtain groove patterned surface only using oligomeric cinnamate itself owing to the high crystalline character. However, blending of PVCi made it possible to obtain clear surface pattern. Molecular orientation could be confirmed from the polar plot data. It can be suggested that blend of oligomeric cinnamate and polymeric cinnamate is promising material for the photoalignment layer.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.1
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• pp.19-24
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• 2009

Structural Dynamics Modification (SDM) is a very effective technique to improve structure's dynamic characteristics by adding or removing auxiliary structures, changing material properties and shape of structure. Among those of SDM technique, the method to change shape of structure has been mostly relied on engineer's experience and trial-and-error process which are very time consuming. In order to develop a systematic method to change structure shape, surface grooving technique is studied and successfully applied to HDD cover model. To verify Surface Grooving Technique, fully embossed HDD cover model was optimized. And comparing with previous optimization result, the effectiveness of this surface grooving technique was checked. The shape of groove and 1 st natural frequency were converged to the same result of previous optimization.

• Proceedings of the KWS Conference
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• 2006.10a
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• pp.95-97
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• 2006

• Journal of Dental Rehabilitation and Applied Science
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• v.38 no.3
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• pp.150-161
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• 2022

Purpose: To determine the effects of the microgroove-fibronectin complex surface on the expression of various genes related to cellular activity in human gingival fibroblasts. Materials and Methods: Smooth titanium specimens (NE0), acid-treated titanium specimens (E0), microgroove and acid-treated titanium specimens (E60/10), fibronectin-fixed smooth titanium specimens (NE0FN), acid-treated and fibronectin-immobilized titanium specimens (E0FN), and microgroove and acid-treated titanium specimens immobilized with fibronectin (E60/10FN) were prepared. Real-time polymerase chain reaction experiments were conducted on 44 genes related to cell behavior of human gingival fibroblasts. Results: Adhesion and proliferation of human gingival fibroblast on microgroove-fibronectin complex titanium were activated through four types of signaling pathway. Integrin α5, Integrin β1, Integrin β3, Talin-2, which belong to the focal adhesion pathway, AKT1, AKT2, NF-κB, which belong to the PI3K-AKT signaling pathway, MEK2, ERK1, ERK2, which belong to the MAPK signaling pathway, and Cyclin D1, CDK4, CDK6 genes belonging to the cell cycle signaling pathway were upregulated on the microgroove-fibronectin complex titanium surface (E60/10FN). Conclusion: The microgroove-fibronectin complex titanium surface can up-regulate various genes involved in cell behavior.