• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.649-650
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• 2005

반도체는 고집적화, 고속도화, 저전력화를 목적으로 발전하고 있다. 이를 위하여 design rule의 감소, 새로운 물질과 프로세스의 적용 등 많은 연구가 이루어지고 있으며, RC delay time을 줄이기 위한 Cu 와 저유전율 재료의 적용이 그 대표적인 예라 할 수 있다. Cu 배선은 기존의 Al 배선에 비하여 높은 전자이동 (electro-migration)과 응력 이동 (stress-migration) 저항을 가짐으로써 전기적인 성능 (electrical performance) 에서 이점을 가지고 있다. 반도체에서의 Cu 배선 구조는 평탄화된 표면 및 배선들 사이에서의 좋은 전기적인 절연성을 가져야 하며, 이는 디싱(dishing)과 에로젼(erosion)의 중요한 인자가 된다. 기존의 평탄화 공정인 Cu CMP(Chemical Mechanical Polishing)에 있어서 이러한 디싱, 에로전과 같은 결함은 선결되어져야 할 문제로 인식되고 있다. 따라서 본 연구에서는 이러한 결합들을 감소시키기 위한 새로운 평탄화 방법으로 Cu gap-filling 을 하는 동시에 평탄화된 표면을 이루는 ECMD(Electro-Chemical Mechanical Deposition) 공정의 전기적 기계적 특성을 파악하였다.

• Composites Research
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• v.29 no.5
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• pp.293-298
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• 2016

In this paper, Glass Fiber Reinforced Thermoplastic (GFRTP) for automotive headlight source module was fabricated by compounding and injection molding using PPS (Poly Phenylene Sulfide) resin with glass fiber which has three cross section (round type, cocoon type, flat type). Tensile, flexural, impact properties were investigated on effect of cross section, glass fiber contents. And it was observed flatness, dimensional stability, fluidity depending on glass fiber cross section. As a result, flat glass fiber reinforced thermoplastic's mechanical properties were most excellent. Also, dimensional stability and flatness showed better results when using flat glass fiber.

• International Journal of Highway Engineering
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• v.10 no.2
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• pp.193-203
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• 2008

This study was conducted to investigate the feasibility of the expedite construction of new pavement systems using precast concrete slabs and to develop the design and construction guide based on the results of the experimental construction. Half scale concrete slabs were designed and fabricated and the optimal reinforcement design, linkages between the slabs in the longitudinal and transverse directions, and the grouting methods were investigated. The experimental construction was performed fast and easily by assembling two slabs in the longitudinal direction and the other two in the transverse direction. The slabs were leveled and the pockets and the space between the slab bottom and the underlying layer were grouted. From the experimental construction, details about the design and construction of the precast pavements were acquired. Finally, the design and construction guide for the newly constructed precast concrete pavement systems was developed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2008.08a
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• pp.138-141
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• 2008

본 논문에서는 영상의 화질 개선을 위해 일반적으로 사용되는 방법인 미디안 필터와 샤프닝 필터의 단점들을 개선한 알고리즘을 제안한다. 제안하는 방법은 영상의 통계적 정보를 이용하여 평탄영역과 평탄하지 않은 영역을 구분하고 각 영역에 대해 저주파 통과 필터와 고주파 통과필터를 각기 다르게 적용하여 기존의 다른 화질 개선 필터 보다 향상된 개선 효과를 기대 할 수 있다. 또한 적용할 스케일 값의 크기만 결정하면 각 화소에서의 범주와 세기는 영상의 통계적 정보를 이용한 매핑 함수를 통해 자동으로 생성된다. 따라서 기존의 미디안 필터와 샤프닝 필터가 가지고 있던 복잡한 파라메터의 설정과정이 필요 없이 평탄영역에서의 잡음제거 및 블러링 효과와 활동성이 높은 영역에서의 선명화 효과를 동시에 얻을 수 있다.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.11
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• pp.46-56
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• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1995.10a
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• pp.111-115
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• 1995

철도소음의 전파예측을 위한 예측모델의 작성에 매우 중요한 요소가 되는 주행열차로부터의 소음방사특성에 대하여 음향인텐시티법을 이용하여 검토하였다. 그리고 검토결과를 근거로 하여 평탄지 선로를 주행하는 열차를 유한길이의 지향성 점음원열로 가정하고, 지향성계수별(n)로 소음레벨을 구하여 실측치와의 대응성에 대하여 검토하였다. 또한 모터차량이 소음발생에 미치는 영향에 대해서도 검토하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1997.10a
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• pp.302-307
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• 1997

철도는 평탄부, 고가부 및 성토부.절토부 등의 다양한 지형구조에 걸쳐서 뻗어 있으며, 지금까지는 평탄부와 고가부를 대상으로 하여 철도소음의 전파예측에 대한 검토를 해왔다. 본 연구에서는 유한 임피던스의 흡음성 Wedge 구조를 갖는 성토부 선로의 주행열차를 대상으로 소음전파 예측모델의 작성 및 소음전파 측정을 통하여 성토 선로구조에서의 철도소음 전파예측에 대하여 검토하였다.

• Journal of the Institute of Convergence Signal Processing
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• v.21 no.3
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• pp.127-132
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• 2020

In this study, the process of providing information necessary to remove physical barriers such as road slopes that obstruct the activities of the disabled is in progress. Through experiments, we implement a quantified road surface roughness index that enables the implementation of IoT-based systems necessary for the elderly and the disabled to safely move to their destination. As a preliminary study, a road surface measurement device using a gyroscope was devised. To check the roughness and flatness of the road surface, X, Y displacement, and acceleration displacement were measured using a gyroscope. By calculating the measured data, the roughness and flatness of the road surface were quantified from 0 to 100. We implemented an algorithm that divides this index into 4 stages, displays it on a map, and provides it to users. Finally, a system for the disabled and elderly electric wheelchair users to secure basic mobility was established.

• International Journal of Highway Engineering
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• v.12 no.4
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• pp.53-60
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• 2010

Geogrid-reinforced asphalt pavement is a pavement type applicable to overlay for repair in addition to new construction. The geosynthetic materials are placed between the asphalt layers to stop or delay propagation of the cracking existing at lower layers and to reduce the rutting. In this study, the cracking, rutting, IRI, and deflection were investigated to compare the performance between geogrid-reinforced asphalt pavement and ordinary or polymer modified asphalt pavement. Based on field conditions, the 11 sections were classified into 3 groups; sections proper to compare, sections with restrictions to compare, sections with difficulties in comparing, and the data was statistically analyzed. Larger resistance to rutting and increased IRI were measured at the geogrid-reinforced asphalt pavement sections comparing to the ordinary or polymer modified asphalt pavement sections. However, the deflections of the pavements were similar and the resistance to the cracking could not be compared because of short pavement lives.

• Korean Chemical Engineering Research
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• v.53 no.4
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• pp.517-523
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• 2015

As the aluminum (Al) metallization process was replaced with copper (Cu), the damascene process was introduced, which required the planarization step to eliminate over-deposited Cu with Chemical Mechanical Polishing (CMP) process. In this study, the verification of the corrosion inhibitors, one of the Cu CMP slurry components, was conducted to find out the tendency regarding the carboxyl and amino functional group in neutral environment. Through the results of etch rate, removal rate, and chemical ability of corrosion inhibitors based on 1H-1,2,4-triazole as the base-corrosion inhibitor, while the amine functional group presents high Cu etching ability, carboxyl functional group shows lower Cu etching ability than base-corrosion inhibitor which means that it increases passivation effect by making strong passivation layer. It implies that the corrosion inhibitor with amine functional group was proper to apply for 1st Cu CMP slurry owing to the high etch rate and with carboxyl functional group was favorable for the 2nd Cu CMP slurry due to the high Cu removal rate/dissolution rate ratio.