• Proceedings of the KSME Conference
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• 2001.06b
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• pp.735-740
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• 2001

With the development of micro-technology, the demand for micro actuator is increasing. But, it is difficult to achieve high resolution and long travel range simultaneously with the conventional actuators. So, the noncontact surface actuator was proposed. This actuator can realize high dynamic range and the planar motion without complex cross-axis linear slides. This paper describes a magnetically suspended linear actuator for developing a non-contact surface actuator. The operating principle and the structure of the proposed linear actuator are similar to switched reluctance motor, but the proposed linear actuator utilizes normal force and propulsion force simultaneously. With this characteristic, the system can be simpler than other non-contact surface actuator.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.9
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• pp.663-670
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• 2003

As the micro-technologies in the high precision manufacturing processes are developed, the demand for micro actuating device is increasing. But, it is difficult to achieve high resolution and wide operating range simultaneously with the conventional actuating systems which are contacting and type of dual servo system. So, the contact-free surface actuators whose movers are suspended or levitated were proposed. These systems can be applied to high precision stages and alignment apparatuses. The suspended mover can be assumed to be rigid body, but the mover is a structure in this study, therefore the vibration caused during the operating process has a serious adverse effect on the performance and it is very important to identify the vibrational characteristics. In this paper, a contact-free surface actuator is modeled in finite element method and updated by using the experimental modal data. Finally, the static and dynamic characteristics of the finite element model are predicted and then discussed.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.115-121
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• 2001

In micro automation technology, the concurrent realization of a high resolution and a large operating rage has been achieved by a dual actuator, usually called by piggy-back system, conventionally. But, because of its manufacturing cost, the complexity of control, and the limit of overall bandwidth, the contract-free and single servo actuators have been suggested with specific applications. In this paper, we suggest a novel non-contact surface actuator suing combination of the Lorentz force and the magnetized force, and discuss the actuating principles including an analytical approach. Differently from the existing planar system, an operating range of the suggested system can be expanded by an additional attachment of active elements. Therefore, it is estimated to be suitable for the next-generation moving system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.11
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• pp.1863-1872
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• 2001

In this Paper, we suggest the precision stage using a novel non-contact planar actuator that utilizes an interaction between an array type of air-core solenoids and permanent magnets. The former with axes arranged in the mutually orthogonal direction is fixed on the stator and the latter with the same polar direction is attached below the stage. The promising magnetic structure has little uncertainty such as hysteresis loss caused by ferromagnetic material, then it is simple to quantify the magnetic phenomenon. And all the magnetic forces are transmitted through narrow air-gap between the coil and the permanent magnet, therefore the structure can be highly compacted. Furthermore, the stage or plate can be perfectly isolated from the stator without any wire connection, leading to diminish the generating possibility of wear particles due to mechanical contact. Then. it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness. or general-purpose nano stage. The main issues rebated to the plate driving are discussed here.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.8
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• pp.1119-1127
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• 2010

In this paper, the design and nonlinear simulation of a multistable electromagnetic microactuator, which provides four stable equilibrium positions within its operating range, have been discussed. Quadstable actuator motion has been made possible by using both X- and Y-directional bistable structures with snapping curved beams. Two pairs of the curved beams are attached to an inner frame in both X- and Y-directions to realize independent bistable behavior in each direction. For the actuation of the actuator at the micrometer scale, an electromagnetic actuation method in which Lorentz force is taken into consideration was used. By using this method, micrometer-stroke quadstability in a plane parallel to a substrate was possible. The feasibility of designing an actuator that can realize quadstable motion by using the electromagnetic actuation method has been thoroughly clarified by performing nonlinear static and dynamic analyses and electrothermal coupled-field analysis of the multistable microactuator.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1005-1006
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• 2008

기존의 전자식 안정기 특히 펄스로 시동되는 HID램프용의 안정기에서는 부가적인 시동회로가 필요하게 된다. 하지만 램프 제조업자에 의해 규정된 점화 펄스폭은 제조업자 간에서도 다양하며, 대단히 높게 되어 있으며 그 펄스폭에는 최소 필요한 값이 있고 이것은 통상 $1.5{\sim}2.5us$정도이다. 이와 같은 시동 펄스폭의 조건을 만족하기 위해서는 시동회로 또한 복잡해지고 제작비용도 고가가 된다. 본 연구는 전력소모가 20[%]이상 절감되면서도 광량이 더 많이 방사되는 메탈핼라이드 램프를 UV경화 시스템 즉, LCD, PDP OLED 모듈조립, 평면, 곡면 스크린 인쇄용, 코팅용, 실험용 UV경화 및 UV노광 시스템 등에 사용 가능한 전자식 안정기를 고주파 시동의 이점을 유지해 가면서 지연 시간에 기인하는 램프의 꺼짐 및 대순환 전류의 문제를 해소하고 고압 대용량 램프를 구동할 수 있는 20KW급 전자식 안정기를 제안하여 22KW UV LAMP를 사용하여 전자식 안정기를 구동 실험으로 검증하였다.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.7
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• pp.120-127
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• 2003

A novel three degrees of freedom sensing method utilizing binary grid pattern image and vision camera is presented. The binary grid pattern image is designed by Pseudo-Random Binary Arrays and referenced to encode in-plane position of a moving stage of the contact-free planar actuator. First, the yaw motion of the stage is detected using fast image processing and then the other planar positions, x and y, are decoded with a sequence of images. This method can be applied to the system that needs feedback of in-plane position, with advantages of a good accuracy and high resolution comparable with the encoder, a relatively compact structure, no friction, and a low cost. In this paper, all the procedures of the above sensing mechanism are described in detail, including simulation and experiment results.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.6 s.99
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• pp.667-673
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• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.6 s.249
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• pp.622-630
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• 2006

This paper is about the magnetic suspension stage based on the Switched Reluctance propulsion principle. Because the previous studies on contact-free stage adopted the Lorentz force for main force generation mechanism they have suffered from thermal problem deteriorating the precision. Thus, the magnetic suspension stage adopting SR principle which can achieve high force density is proposed. The main operating principle and structure for achieving high resolution and long travel range are represented. The magnetic force analysis of each actuator, providing back data for dynamic modeling and controller design are carried out. By conducting basic experiments, the feasibility of the proposed system is shown. In addition the problems which should be improved and their solutions are represented.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.