• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.231-231
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• 2013

ZnO은 hexagonal wurtzite 구조를 갖는 직접 천이형 화합물 반도체로서, 상온에서 3.37 eV 정도의 wide band gap energy를 가지고 있으며, 60 meV의 큰 엑시톤 결합 에너지(exciton binding energy)를 갖는다. 또한 동종 기판이 존재하고 열, 화학적으로 안정한 상태이며 습식 식각이 가능한 장점으로 인해 각광받고 있다. 또한, ZnO 박막은 우수한 전기 전도성을 나타내며 광학적 투명도가 우수하기 때문에 투명전극으로 많이 이용되어 왔고, 태양 전지(solar cell), 가스 센서, 압전소자 등 많은 분야에서 사용되고 있다. 이와 같은 ZnO박막을 안정적인 쇼트키 다이오드 특성을 얻기 위해서는 쇼트키 배리어 장벽의 형성이 필수적이다. Mg을 ZnO에 첨가하여 MgZnO 박막을 형성할 경우, 금속의 일함수와 MgZnO의 전자친화력 차이가 증가하여 더 큰 쇼트키 장벽 형성이 가능하며, 금속의 일함수가 큰 물질을 사용해야 한다. 또한, 박막의 결함이 적은 박막을 형성해야 하는 에피탁셜 박막이 필요하다. SiC는 높은 포화 전자 드리프트 속도(${\sim}2.7{\times}107$ cm/s), 높은 절연 파괴전압(~3 MV/cm)과 높은 열전도율(~5.0W/cm) 특징을 가지고 있으며, MgZnO/Al2O3의 격자 불일치는 ~19%인 반면에 MgZnO/SiC의 격자 불일치는 ~6%를 가진다. 금속의 일함수가 큰 Ag 금속은 열처리가 될 경우 AgOx가 될 경우 더욱 안정적인 쇼트키 장벽을 형성될 수 있을 것으로 판단된다. 본 연구에서는 쇼트키 접합을 형성하기 위해 금속의 일함수가 큰 Ag 금속을 사용하였으며, Al2O3 기판과 6H-SiC 기판위에 MgZnO(30 at.%) 박막을 증착하였다. 증착 후에 Ag를 증착 한 뒤 급속 열처리를 하였다. 열처리된 MgZnO의 경우 열처리 하지않은 소자보다 약 $10^5$ 이상의 우수한 on/off 특성을 보였다.

• Journal of the Korean Applied Science and Technology
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• v.40 no.5
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• pp.1116-1125
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• 2023

Zinc oxide film is a transparent conductive material and is used in optoelectronic devices in various fields. Therefore, characterization of the zinc oxide film will play a very important role in improving the performance of optoelectronic devices. Here, we will evaluate the morphological and structural characteristics of such a zinc oxide film based on the solution process. Specifically, the sol-gel method will be repeatedly performed to observe the change in material properties of the zinc oxide film according to the number of times of spin-coating. It was confirmed that crystallization proceeded as a result of performing the sol-gel method repetitively 5 times under constant solution conditions. At 7 times or more, the element composition and crystallinity tended to converge to a specific value. The average crystal size of the final zinc oxide film was calculated to be about 10.7 nm. In this study, the number of processes showing optimal crystallization was 7 times. The results and methodology of this study can be applied while varying various solution process variables and are expected to contribute to establishing optimal process conditions.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.31 no.2
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• pp.85-89
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• 2018

In this study, functional transparent conducting layers were investigated for Si-based photoelectric applications. Double transparent conductive oxide (TCO) films were deposited on a Si substrate in the sequence of indium tin oxide (ITO) followed by aluminum-doped zinc oxide (AZO). First, we observed that the conductivity and transparency of AZO dominate the overall performance of the double TCO layers. Secondly, the double layered TCO film (consisting of AZO/ITO) deposited by sputtering was compared to a AZO-only film in terms of their optical and electrical properties. We prepared three different AZO films: ITO:3min/AZO:10min, ITO:5min/AZO:7min, and ITO:7min/AZO:4min. The results show that the optical properties (transmittance, absorbance, and reflection) can be controlled by the film composition. This may provide a significant pathway for the manipulation of the optical and electrical properties of photoelectric devices.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.10
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• pp.938-942
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• 2008

Electrical and optical properties of semitransparent Ag and Al layer were studied, which are used for the electrodes in top-emission organic light-emitting diodes. Sheet resistance and transmittance of visible light through a thin layer were measured and analyzed. Several thin metal layers of Ag and Al were deposited onto a glass substrate up to a thickness of 50 nm using a thermal evaporation. Sheet resistance measurements show that a layer thickness is needed more than 15 nm and 20 nm for Ag and Al, respectively, when a proper sheet resistance is assumed to be less than $50{\Omega}/sq$. From the measurements of transmittance of visible light through a thin-metal layer, metallic behavior was observed when the layer thickness is over 25 nm for both films. Thus, from a study of sheet resistance and transmittance of visible light, a minimum proper thickness of semitransparent metal layer is 20 nm and 25 nm for Ag and Al, respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.28 no.12
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• pp.808-812
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• 2015

Highly optical transparent photoelectric devices were realized by using a transparent metal-oxide semiconductor heterojunction of p-type NiO and n-type ZnO. A functional template of ITO nanowires (NWs) was applied to this transparent heterojunction device to enlarge the light-reactive surface. The ITO NWs/n-ZnO/p-NiO heterojunction device provided a significant high rectification ratio of 275 with a considerably low reverse saturation current of 0.2 nA. The optical transparency was about 80% for visible wavelengths, however showed an excellent blocking UV light. The nanostructured transparent heterojunction devices were applied for UV photodetectors to show ultra fast photoresponses with a rise time of 8.3 mS and a fall time of 20 ms, respectively. We suggest this transparent and super-performing UV responser can practically applied in transparent electronics and smart window applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.04b
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• pp.22-23
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• 2008

본 연구에서는 전면 유기 발광소자(TE-OLED)를 제작하여 전기 광학적 특성을 연구하였다. 전면 발광 OLED의 투명 전극으로 사용된 Al과 Ag의 박막 두께에 따른 투과율과 면저항값은 다음과 같이 나타났다. 파장 520nm의 기준으로 Al 금속 박막의 두께가 10nm 이하여야 50% 투과율을 보였고, 반면 Ag는 25nm 이하로 나타났다. 면저항값은 박막두께 20nm 기준으로 Al은 약 $40\Omega/\square$, Ag는 $10\Omega/\square$이하로 나타났다. 전면발광 방식의 시야각에 따른 빛의 세기는 cos $60^{\circ}$ 일 때 0.1로, TE-OLED는 시야각이 증가하였을 때 현저히 감소되는 것을 볼 수 있다. TE-OLED의 시야각의 증가에 따른 EL-peak 또한 약 520nm의 파장대에서 약 500nm으로 변화하였다. 전면 발광 방식의 반폭치(FWHM)는 배면 발광 방식 보다 약 32nm정도 좁게 나타났다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.6
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• pp.359-364
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• 2016

NiO serves as a window layer for Si photoelectric devices. Due to the wide energy bandgap of NiO, high optical transparency (over 80%) was achieved and applied for Si photoelectric devices. Due to the high the high mobility, the heterojunction device (Al/n-Si/$SiO_2$/p-NiO/ITO) provide ultimately fast photoresponses of rising time of $38.33{\mu}s$ and falling time of $39.25{\mu}s$, respectively. This functional NiO layer would provide benefits for high-performing photoelectric devices, including photodetectors and solar cells.

• Journal of the Microelectronics and Packaging Society
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• v.15 no.2
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• pp.23-28
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• 2008

To improve the external quantum efficiency by means of the optimization of the polymer light emitting diodes(PLEDs) structure, the PLED with ITO/PEDOT:PSS/(PFO)/PFO:MEH-PPV/LiF/Al structure were fabricated and investigated the electrical and optical properties for the prepared devices. ITO(indium tin oxide) and PEDOT:PSS [poly (3,4-ethylenedioxythiophene): poly(styrene sulfolnate)] were used as transparent anode film and hole transport materials, respectively. PFO[poly(9,9-dioctylfluorene)] and MEHPPV[poly(2-methoxy-5(2-ethylhe xoxy)-1,4-phenylenevinyle)] were used as the light emitting host and dopant materials. The doping concentration of MEH-PPV was 9wt% with thickness of about $400{\AA}$. We investigated the dependence of the PFO thickness ranging from $200{\AA}$ to $300{\AA}$ on the electrical, optical properties of PLEDs. Among prepared PLED devices with different PFO thicknesses, the highest value of the luminance was obtained for the PLED device with $250{\AA}$ in thickness. As a result, the current density and luminance ware found to be about $400mA/cm^2$ and $1500cd/m^2$ at 13V, respectively. In addition, the luminance and current efficiency of PLED device with double emitting layer (PFO/PFO:MEH-PPV) were improved about 3 times compared with the one with single emitting layer (PFO:MEH-PPV).

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.6
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• pp.21-27
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• 1998

Electrical and optical characteristics of ZnS:Mn/ZnS:Tb multilayer TFEL devices were investigated for multi-color electroluminescent display applications. Emission spectra of M $n^{2+}$ and T $b^{3+}$ ions were observed from ZnS:Mn/ZnS:Tb multi-layer TFEL devices, and were very broad from 540 nm to 640 nm. Saturation luminance measured at 155 V was 1025 Cd/$m^2$. C-V, $Q_{t}$ - $V_{p}$ curves showed that the phosphor capacitance ( $C_{p}$ ) and the insulator capacitance ( $C_{i}$ ) were 13.5nF/$\textrm{cm}^2$ and 60 nF/$\textrm{cm}^2$, respectively. Threshold voltage( $V_{thl}$) was shown to decrease from 126 V to 93 V due to the increase of the applied voltage from 155 V to 185 V, which was attributed to the increase of the polarization charge. The equation for the calculation of the threshold voltage as a function of the applied voltage was proposed for the first time. The calculated threshold voltage agreed well with the data obtained from the measurement.t.t.t.

• Industry Promotion Research
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• v.9 no.1
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• pp.21-29
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• 2024

In the rapidly advancing information society, electronic devices, including smartphones and tablets, are increasingly digitized and equipped with high-performance features such as flexible displays. This study focused on optimizing the manufacturing process for Transparent Conductive Films (TCF) by using the cost-effective conductive polymer PEDOT and transparent substrate PET as alternatives to expensive materials in flexible display technology. The variables considered are production speed (m/min), coating maximum temperature (℃), and PEDOT supply speed (rpm), with surface resistivity (Ω/□) as the response parameter, using Response Surface Methodology (RSM). Optimization results indicate the ideal conditions for production: a speed of 22.16 m/min, coating temperature of 125.28℃, and PEDOT supply at 522.79 rpm. Statistical analysis validates the reliability of the results (F value: 18.37, P-value: < 0.0001, R²: 0.9430). Under optimal conditions, the predicted surface resistivity is 145.75 Ω/□, closely aligned with the experimental value of 142.97 Ω/□. Applying these findings to mass production processes is expected to enhance production yields and decrease defect rates compared to current practices. This research provides valuable insights for the advancement of flexible display manufacturing.