• 한국재료학회지
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• 제14권8호
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• pp.542-546
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• 2004

We report a new fabrication process for high performance triode type CNT field emitters and their superior electrical properties. The CNT-based triode-type field emitter structure was fabricated by the conventional semiconductor processes. The keys of the fabrication process are spin-on-glass coating and trim-and-leveling of the carbon nanotubes grown in trench structures by employing a chemical mechanical polishing process. They lead to strong adhesion and a uniform distance from the carbon nanotube tips to the electrode. The measured emission property of the arrays showed a remarkably uniform and high current density. The gate leakage current could be remarkably reduced by coating of thin $SiO_{2}$ insulating layer over the gate metal. The field enhancement factor(${\beta}$) and emission area(${\alpha}$) were calculated from the F-N plot. This process can be applicable to fabrication of high power CNT vacuum transistors with good electrical performance.

• 한국재료학회지
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• 제15권4호
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• pp.246-251
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• 2005

Plasma enhanced chemical vapor deposition(PE-CVD) method has an advantage in synthesizing carbon nanotubes(CNTs) at lower temperature compared with thermal enhanced chemical vapor deposition(TE-CVD) method. In this study, CNTs was prepared by using PE-CVD method. The growth rate of CNT was faster more than 100 times on using Invar alloy than iron as catalyst. It was found that chrome silicide was formed at the interface between chrome layer and silicon substrate which should be considered in designing process. Nanoparticles of Invar catalyst were found oxidized on their surfaces with a depth of 10 m. Microstructure was analyzed by scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, and energy dispersive x-ray spectrometry. Based on the result of analysis, growth mechanism at an initial stage was suggested.

• 한국전기전자재료학회논문지
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• 제33권1호
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• pp.45-49
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• 2020

In this paper, we prepared miniature fuse fabricated with carbon nanotube (CNT) fiber for the use of low rated current under 1 A and high speed operation under 4ms. CNT fuses were fabricated in the form of universal modular fuse (UMF) with different diameter of CNT fibers defined by multiplying the CNT threads. Electrical properties of the CNT fuses were measured such as resistance, rated current, and operation time with current. Resistance of the CNT fuse decreased and rated current increased with the diameter of the CNT fuses, respectively. Consequently, the operation time with current increased with the diameter of the CNT fuses. The CNT fuses fabricated in this work had broad range of low rated current from 0.05 to 1.25 A by multiplying the CNT threads. Operation time was measured about 3.6ms which was applicable to the UMF.

• 한국재료학회지
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• 제19권9호
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• pp.488-493
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• 2009

Thin films of single-wall carbon nanotubes (SWNT) with various thicknesses were fabricated, and their optical and electrical properties were investigated. The SWNTs of various thicknesses were directly coated in the arc-discharge chamber during the synthesis and then thermally and chemically purified. The crystalline quality of the SWNTs was improved by the purification processes as determined by Raman spectroscopy measurements. The resistance of the film is the lowest for the chemically purified SWNTs. The resistance vs. thickness measurements reveal the percolation thickness of the SWNT film to be $\sim$50 nm. Optical absorption coefficient due to Beer-Lambert is estimated to be $7.1{\times}10^{-2}nm^{-1}$. The film thickness for 80% transparency is about 32 nm, and the sheet resistance is 242$\Omega$/sq. The authors also confirmed the relation between electrical conductance and optical conductance with very good reliability by measuring the resistance and transparency measurements.

• 한국재료학회지
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• 제19권10호
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• pp.562-568
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• 2009

Electrospinning is a technique that produces sub-micron sized continuous fibers by electric force from polymer solutions or melts. Due to its versatile manufacturability and the cost effectiveness, this method has been recently adopted for the fabrication of one-dimensional materials. Here, we fabricated polyacrylonitrile (PAN) polymer fibers, from which uniform carbon fibers with diameters of 100-200 nm were obtained after carbonization at 800 $^{\circ}C$ in N$_2$. Special emphasis was directed to the influence of the phase separated polymer solution on the morphology and the microstructure of the resulting carbon fiber. The addition of poly(stylene-co-acrylonitile) (SAN) makes the polymer solution phase separated, which allows for the formation of internal pores by its selective elimination after electrospinning. XPS and Raman Spectroscopy were used to confirm the surface composition and the degree of carbonization. At the PAN:SAN = 50:50 in vol%, the uniform carbon fibers with diameters of 300$\sim$500 nm and surface area of 131.6 m$^2$g$^{-1}$ were obtained.

• 한국재료학회지
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• 제18권11호
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• pp.610-616
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• 2008

Oil-based nanofluids were prepared by dispersing Ag, graphite and carbon black nanoparticles in lubricating oil. Agglomerated nanoparticles were dispersed evenly with a high-speed bead mill and/or ultrasonic homogenizer, and the surfaces of the nanoparticles were modified simultaneously with several dispersants. Their tribological behaviors were evaluated with a pin-on-disk, disk-on-disk and four-ball EP and wear tester. It is obvious that the optimal combination of nanoparticles, surfactants and surface modification process is very important for the dispersity of nanofluids, and it eventually affects the tribological properties as a controlling factor. Results indicate that a relatively larger size and higher concentration of nanoparticles lead to better load-carrying capacity. In contrast, the use of a smaller size and lower concentration of particles is recommended for reducing the friction coefficient of lubricating oil. Moreover, nanofluids with mixed nanoparticles of Ag and graphite are more suitable for the improvement of load-carrying capacity and antiwear properties.

• 한국전기전자재료학회논문지
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• 제27권9호
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• pp.547-550
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• 2014

In this study, the electrical characteristics of the nickel (Ni)/carbon nanotube (CNT)/$SiO_2$ structures were investigated in order to analyze the mechanism of CNT in MOS device structures. We fabricated 4H-SiC MOS capacitors with or without CNTs. CNT was dispersed by isopropyl alcohol. The capacitance-voltage (C-V) and current-voltage (I-V) are characterized. Both devices were measured by Keithley 4200 SCS. The experimental flatband voltage ($V_{FB}$) shift was positive. Near-interface trap charge density ($N_{it}$) and negative oxide trap charge density ($N_{ox}$) value of CNT embedded MOS capacitors was less than that values of reference samples. Also, the leakage current of CNT embedded MOS capacitors is higher than reference samples. It has been found that its oxide quality is related to charge carriers and/or defect states in the interface of MOS capacitors.

• 한국전기전자재료학회논문지
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• 제21권7호
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• pp.594-598
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• 2008

The metal catalyst particles which there is as impurities on a tip part of carbon nanotube (CNT) are not good to apply it to a nano-electronic device. It was very important the opening of CNT-tip to fix a target bio material and a material to accept in CNT in a biosensor, so we performed $HNO_3$ wet etching to remove the metal catalyst particle which there was on a tip part of CNT grown up in the study and observed the opened CNT-tip with etching time. We synthesized the CNTs using a HF-PECVD method and choses the CNT length of 700 nm for the application of nano-electronic device such as a biosensor etc.. We observed the opened CNT-tip with wet etching times of $HNO_3$ (10, 30, 60 min). From the results, we observed that the CNT-tip was opened with the increase of wet etching time lively. In case of CNTs etched during 60 min, we confirmed that there was not the ratio of Ni included in CNTsI as catalyst. Conclusively, in the case of CNT etched for 60 minutes, it is completely good for application of a biosensor and, in addition, the metal-free CNTs will contribute to the application of other nanoelectronic devices.

• 한국전기전자재료학회논문지
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• 제23권10호
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• pp.782-787
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• 2010

Recently the solution-based thin film technology has often been treated in the field of device fabrication owing to easy process and convenience for the development of various semiconductor devices and sensors. We deposited on glass substrate single-walled carbon nanotubes (SWNTs)/silane hybrid thin films by multiple spray-coating which is one of solution-based processes, and examined their electrical response for humidity. Generally silane binders which are often mixed in carbon nanotube (CNT) solution to adhere CNTs to substrate well form easily each own functionalized group on the surface of CNTs after they are hardened by way of the hydrolysis reaction. In this work, we investigated how silane binders (TEOS (tetraethoxy silane), MTMS (methyltrimethoxysilane) and VTMS (vinyltrimethoxysilane)) in CNT thin films make effect to their electrical response on humidity. As the result, we found that the resistance in the samples using TEOS was changed dramatically while it was almost invariant in the samples using MTMS and VTMS for increasing humidity.

• 한국재료학회지
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• 제12권6호
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• pp.458-463
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• 2002

Carbon nanotubes were synthesized at various conditions using Ni-catalytic thermal chemical vapor deposition method and their characteristic properties were investigated by SEM, TEM and Raman spectroscopy. Carbon nanotubes were formed on very fine Ni-catalytic particles. The carbon nanotubes synthesized by thermal decomposition of acetylene at $700^{\circ}C$ had a coiled shape, while those synthesized at $850^{\circ}C$ showed a curved and Y-shape having a bamboo-like morphology. It was found that the carbon nanotube was also made on the fine Ni-catalytic particles formed on the surface of 100~400nm sized large ones after pretreatment with $NH_3$.ber composites show the high dielectric constant and large conduction loss which is increased with anisotropy of fiber arrangement. It is, therefore, proposed that the glass and carbon fiber composites can be used as the impedance transformer (surface layer) and microwave reflector, respectively. By inserting the foam core or honeycomb core (which can be treated as an air layer) between glass and carbon fiber composites, microwave absorption above 10 dB (90% absorbance) in 4-12 GHz can be obtained. The proposed fiber composites laminates with sandwitch structure have high potential as lightweight and high strength microwave absorbers.