• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.15-21
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• 2004

반도체 제조산업과 나노, 바이오 산업의 비약적 발전에 따라 게이트 산화막(gate oxide)과 같이 반도체 제조공정에서 사용되는 유전체 박막(dielectric film)의 두께는 수 $\mu\textrm{m}$에서 수 nm 에 이르기까지 다양할 뿐 아니라 얇아지고 있으며, 또한 이러한 박막들이 다층으로 복잡하게 적층된 다층 박막의 응용이 높아지는 추세이다. 따라서, 반도체 및 광통신 소자, 발광소자, 바이오 칩 어레이 등과 같은 나노박막을 이용하는 산업에서는 박막의 두께 측정을 더욱 정확하고, 보다 빠르며 효율적으로 측정할 수 있는 박막 두께 측정용 계측기가 요구된다.(중략)

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1932-1938
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• 2003

We have applied spectroscopic ellipsometry to investigate $high-{\kappa}$ dielectric thin films and correlate their optical properties with fabrication processes, in particular, with high temperature annealing. The use of high-k dielectrics such as $HfO_{2}$, $Ta_{2}O_{5}$, $TiO_{2}$, and $ZrO_{2}$ as the replacement for $SiO_{2}$ as the gate dielectric in CMOS devices has received much attention recently due to its high dielectric constant. From the characteristics found in the pseudo-dielectric functions or the Tauc-Lorentz dispersions, the optical properties such as optical band gap, polycrystallization, and optical density will be discussed.

• Proceedings of the Optical Society of Korea Conference
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• 2004.02a
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• pp.220-221
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• 2004

• Proceedings of the Optical Society of Korea Conference
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• 2008.07a
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• pp.379-380
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• 2008

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.451-452
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• 2006

• Proceedings of the Optical Society of Korea Conference
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• 2009.02a
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• pp.463-464
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• 2009

• Proceedings of the Optical Society of Korea Conference
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• 2009.10a
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• pp.316-317
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• 2009

• Korean Journal of Optics and Photonics
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• v.20 no.3
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• pp.182-188
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• 2009

The surface plasmon resonance ellipsometer (SPRE), using a multiple air injection system with an extraction of air system, has been proposed and developed to minimize measurement error of signals due to diffusion of reagent into running buffer. Since the diffusion of reagent into running buffer affects the refractive index of the running buffer by changing the concentration, characteristics of binding between various bio-molecules don't appear clearly in measurement results. The diffusion between running buffer and reagent can be blocked by using an air bubble injection system. An extraction of air system is used to remove the noise signal due to unnecessary air bubbles flowing in a channel. Reliability of measurement results has been improved by using the valve system.