Measurement of Thin Film Thickness of Patterned Samples Using Spectral Imaging Ellipsometry
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제갈원
(한국표준과학연구원 광기술표준부)
조용재 (한국표준과학연구원 광기술표준) 조현모 (한국표준과학연구원 광기술표준) 김현종 (한국표준과학연구원 광기술표준) 이윤우 (한국표준과학연구원 광기술표준) 김수현 (한국표준과학연구원 기계공학과) |
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