• Title/Summary/Keyword: 쿼츠

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Composite Blade for Dicing of Wafer (웨이퍼 가공용 복합 블레이드)

  • Lee, Jeong-Ick
    • Proceedings of the KAIS Fall Conference
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    • 2008.05a
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    • pp.46-48
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    • 2008
  • 나노복합 블레이드가 반도체 웨이퍼 가공을 위한 마이크로급 나노장치나 그 이상의 나노급 구조체를 위해 사용되었다. 금속 블레이드는 실리콘 웨이퍼 가공을 위해 사용되어 왔다. 그러나, 최근 레진 복합 블레이드는 반도체나 핸드폰의 쿼츠 웨이퍼 가공에 사용된다. 유기 또는 비유기 재료 선정은 기계가공성, 전기 전도성, 강도, 연성 및 웨이퍼 저항을 가진 블레이드를 만드는데 중요하다. 고성능 응용의 증대 요구에 따라 개발된 고기술 비유기성 재료의 혼합은 낮은 가격에 고기능의 신뢰도를 필요로 한다. 나노 입자의 크기를 가진 레진 복합물의 마이크로 설계는 입자간 상호작용의 제어가 필요하다. 형상 제작 동안 마이크로 차원에 두께를 유지하기 위해서는 마이크로/나노급 제작을 위한 가공기술이 중요한 것 중의 하나이다. 본 연구에서는 핫 프레스 구조물이 원래 설계 기준과 두께 차이의 실험 접근법을 사용해 만들어졌다. 다른 습식 공정 기술은 차원의 허용치를 개선하기 위해 만들었다. 실험들과 해석들은 신뢰성 결과가 사용가능함을 보여주었다. 반도체 시장에 사용될 레진 복합 블레이드의 개선 효과가 논의되었다.

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(ro)Bot as media An experimental discussion on news chatbot (미디어로서의 봇(bot) 뉴스 챗봇에 대한 시론적 논의)

  • Oh, Se Wook
    • Korean journal of communication and information
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    • v.79
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    • pp.70-103
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    • 2016
  • In the face of crisis in the news media industry, many people prospect that new technology can save it. But there is no discussion about how new technology works and what is its limitations and which direction of development is needed. In view of media, this article analyzed 'news chatbot' as new technology. Firstly, this article defined bot and discussed bot's agency based on actor network theory. Secondly, it analysed bots which are acting as media and discussed features of the messenger platform as a communication tool. Thirdly, it presents examples of news chatbot and analyzed how they work. Finally, it predicts the future of news chatbot and discussed the possibility of journalism.

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강자성체를 이용한 이중구조의 고균일도 플라즈마 발생장치

  • Kim, Hyeon-Jun;Jo, Jeong-Hui;Chae, Hui-Seon;Jo, Seong-Won;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.492-492
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    • 2013
  • 반도체 공정을 위한 원격 유도 결합 플라즈마(remote ICP)에서 플라즈마 균일도를 향상하는 연구를 진행하였다. 본 연구에서는고 균일도 플라즈마 발생을 위해 단면적이 다른 2개의 반응 용기를 상부와 하부에 설치하였으며, 각각의 반응 용기 외곽에 방전 코일이 위치하도록 구성하였다. 상부의 반응 용기는 외곽에 유도 코일을 권선하였고, 하부의 반응 용기는 고밀도의 플라즈마 생성을 위해 강자성체를 이용하여 권선하였으며, 강자성체는 쿼츠관을 둘러 싼 구조로 되어 있다. 0.5-1 Torr 공정 압력 범위의 아르곤 기체에서 전체 2500 W의 전력을 인가하였고, 임피던스 정합회로로부터 각각 병렬로 연결된 방전 코일에 전력이 분배되어 인가되는 구조로 설계하였다. 반도체 공정을 위한 플라즈마 균일도를 분석하기 위해 wafer의 위치에서 부유 탐침법을 적용하여 wafer 중심부로부터 반경 방향으로 위치를 변화시키며 플라즈마 밀도와 전자온도를 측정하였다. 동일한 공정 조건에서 하부에 강자성체를 사용하여 권선한 이중 구조의 경우 하나의 방전 코일을 이용한 구조 대비 플라즈마 밀도가 증가하였고, 플라즈마 균일도가 크게 향상됨을 보였다. 강자성체를 이용한 하부 코일에 의해 wafer 외곽 부분의 밀도가 높은 분포를 갖는 플라즈마가 형성되고, 상부의 유도코일에 의해 wafer 중심부에 밀도가 높은 플라즈마가 형성되어 wafer의 플라즈마 균일도가 개선된다. 또한, 강자성체를 이용한 하부 코일에 의해 고밀도의 플라즈마가 형성되므로 반도체 공정을 위한 장비에서 플라즈마 균일도의 개선과 밀도의 향상으로 대면적 Dry Strip 공정 (450mm)에 적용 가능하다.

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Optoacoustic Ultrasound Generator Based on Nanostructured Germanium (광음향효과를 이용한 게르마늄 나노구조 기반의 초음파 발생 소자 연구)

  • Yoon, Sang-Hyuk;Heo, Junseok
    • Korean Journal of Optics and Photonics
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    • v.26 no.5
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    • pp.255-260
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    • 2015
  • We have fabricated an optoacoustic ultrasound generator based on nanostructured germanium (Ge). Ge thin films were deposited via e-beam evaporation and then etched using a metal-assisted chemical (MAC) method to form nanostructured Ge films. The measured intensity of ultrasound from the nanostructured Ge covered with PDMS was about 3 times stronger than that of 100-nm-thick chromium (Cr). When the nanostructured Ge was embedded in the PDMS, the intensity of ultrasound became 8.5 times as strong compared to the 100-nm-thick Cr.

Polymeric Arrayed Waveguide Grating Based on Nanoimprint Technique Using a PDMS Stamp (나노임프린트 방법을 이용한 폴리머 광도파로 열 격자)

  • Lim, Jung-Gyu;Lee, Sang-Shin;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.17 no.4
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    • pp.317-322
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    • 2006
  • A polymeric arrayed waveguide grating (AWG) has been proposed and demonstrated by exploiting the nanoimprint method. A PDMS(polydimethylsiloxane) stamp with device patterns engraved was developed out of a master mold made of quartz glass. The device was fabricated by transferring the pattern in the PDMS stamp to a spin-coated polymer film without using any etching process. The device had 8 output channels, while the center wavelengths of each output channel were positioned from 1543.7 nm to 1548.3 nm with the spacing of 0.8 nm. The achieved average channel crosstalk and the 3-dB bandwidth were about 10 dB and 0.8 nm respectively.

Development of Colored Gemstone Products Through Analysis of Color Preference (색채 선호 분석을 통한 유색보석 제품 개발)

  • Lee, Ki-Sang
    • The Journal of the Korea Contents Association
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    • v.13 no.6
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    • pp.116-124
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    • 2013
  • This study aims to develop colored gemstone products based on the analysis of color preference. Colored gem stones were classified by their colors using Munsell's ten basic colors and the color preference of women consumers in their twenties was analyzed, in consideration of trend analysis and design image description analysis, which led to the direction of product development. The analysis of color preference seems to suggest that consumers preferred blue quartz, cahnite, spessartite garnet, the colors of which are rather less known to ordinary consumers, to the other more common kinds of gem stones. Through the analysis of the trends and adjectives to describe preferable design images, the current study has made it possible to explore the designs for the future development of colored jewelry products, which would satisfy the consumption value and individual tastes of the consumers. It is expected that the current study may contribute to the jewelry industries and designers as a basic data for developing colored gem stone products.

금 나노패턴을 이용한 서브파장구조를 가진 광대역 무반사 글래스의 제작 및 특성

  • Im, Jeong-U;Lee, Su-Hyeon;Guan, Xiang-Yu;Kim, Jeong-Tae;Jeong, Gwan-Su;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.279.1-279.1
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    • 2014
  • 글래스(glass), 폴리머 또는 쿼츠와 같은 투명기판은 렌즈, 디스플레이, 광검출기, 광센서, 발광다이오드 및 태양전지와 같은 광 및 광전소자 분야에서 널리 사용되고 있다. 이러한 소자들의 경우, 광추출 또는 광흡수 효율을 향상시키는 것이 매우 중요하다. 그러나 투명기판의 경우, 약 1.5의 굴절율로 인해 표면에서 4% 반사가 발생되는데, 이러한 광학적 손실은 소자의 성능을 저하시키는 원인이 된다. 따라서, 글래스와 공기 경계면에서 발생되는 광손실을 줄이기 위한 효율적인 무반사 코팅이 필요하다. 최근, 우수한 내구성 뿐만 아니라, 광대역 파장 및 다방향성에서 무반사 특성을 보이는 서브파장 주기를 갖는 나노구조(subwavelength structures)의 형성 및 제작 공정에 관한 연구가 보고되고 있다. 이러한 나노구조는 경사 굴절율 분포를 가지는 유효 매질을 형성하기 때문에 투명기판 표면에서의 Fresnel 반사로 인한 광손실을 줄일 수 있다. 또한, 무반사 서브파장구조를 형성하기 위한 패터닝 방법으로, 간단/저렴하고 대면적 제작이 용이한 열적 응집 공정을 이용한 자가정렬된 금속 나노입자 형성 기술이 널리 사용되고 있다. 따라서 본 실험에서는 열적 응집현상에 의해 형성된 비주기적 금 나노입자 식각 마스크 패턴 및 유도결합 플라즈마 장비를 이용하여 글래스 기판 위에 무반사 서브파장 나노구조를 제작하였다. 금 나노패턴 및 제작된 글래스 서브파장 나노구조의 식각 프로파일은 주사전자현미경을 사용하여 관찰하였으며, UV-Vis-NIR 스펙트로미터를 사용하여 빛의 투과율을 측정하였다. 또한, 제작된 샘플들에 대해서, 표면 접촉각 측정 장비를 이용하여 표면 wettability를 조사하였다.

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A study on quantification of α-quartz, cristobalite, kaolinite mixture in respirable dust using by FTIR (FTIR를 이용한 호흡성 분진중 α-quartz, cristobalite, kaolinite 혼합물 정량 분석 연구)

  • Eun Cheol Choi;Seung Ho Lee
    • Analytical Science and Technology
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    • v.36 no.6
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    • pp.315-323
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    • 2023
  • This study is to quantify α-quartz, cristobalite and kaolinite using by FTIR in respirable dust generated in the mining workplace. Various minerals in mines can interfere with peaks when quantifying respirable crystalline silica by FTIR. Therefore, for accurate quantification, it is necessary to remove interfering substances or correct the peaks that cause interference. To confirm the peaks occurring in α-quartz, cristobalite and kaolinite, each standard material was diluted with KBr and scanned in the range of 400 cm-1 to 4000 cm-1 using by FTIR. As a result of scanning the analytes, it was decided to use the peaks of 797.66 cm-1 and 695.25 cm-1 for α-quartz, 621.58 cm-1 for cristobalite, and 3696.47 cm-1 for kaolinite. When the above materials are mixed, interference occurs at the peak for quantification, which is corrected by the calculation formula. The analysis of the mixture of α-quartz and cristobalite shows the average bias (%) of 2.64 (corrected) at α-quartz (797.66 cm-1), 5.61 (uncorrected) at α-quartz (695.25 cm-1) and 1.51 (uncorrected) at cristobalite (621.58 cm-1). The analysis of the mixture of α-quartz and kaolinite shows the average bias(%) of 1.79(corrected) at α-quartz (797.66 cm-1), 3.92 (corrected) at α-quartz (695.25 cm-1) and 2.58 (uncorrected) at kaolinite (3696.47 cm-1). The analysis of the mixture of cristobalite and kaolinite shows the average bias (%) of 2.15 (corrected) at cristobalite (621.58 cm-1), 4.32 (uncorrected) at kaolinite (3696.47 cm-1). The analysis of the mixture of αquartz and cristobalite and kaolinite shows the average bias (%) of 1.93(corrected) at α-quartz (797.66 cm-1), 6.47 (corrected) at α-quartz (695.25 cm-1) and 1.77 (corrected) at cristobalite (621.58 cm-1) and 2.61 (uncorrected) at kaolinite (3696.47 cm-1). The experimental results showed that the deviation caused by peak interference by two or three substances could be corrected to less than 6 % of the average deviation. This study showed the possibility of correcting and quantifying when various interfering substances that are difficult to remove are mixed.

Study of spatial temperature distribution during combustion process in a high temperature and pressure constant volume chamber (고온 고압 정적 연소실에서 연소과정에 따른 온도 분포 측정)

  • Kim, Ki-hyun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.1
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    • pp.345-350
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    • 2017
  • Downsizing is widely applied to diesel engines in order to improve fuel efficiency and reduce exhaust emissions. Engine sizes are becoming smaller but pressure and temperature inside combustion chambers are increasing. Therefore, research for fuel spray under high pressure and temperature conditions is important. A constant volume chamber which simulates high temperature and pressure likely to be found in diesel engines was developed in this study. Pressure and temperature were increased abruptly because of ignition of the pre-mixture in the constant volume chamber. Then pressure and temperature were gradually decreased due to the heat loss through the chamber wall. Fuel spray occurred when temperature and pressure were reached at the target condition. In this experiment, the temperature condition should be exactly defined to understand the relation between fuel evaporation and ambient temperature. A fast response thermocouple was developed and used to measure the temporal and spatial temperature distribution during the combustion process inside the combustion chamber. In the results, the core temperature was slightly higher than the bulk temperature calculated by the gas equation. Ed-note: do you want to say 'ideal gas equation'? This was attributed to the heat transfer loss through the chamber wall. The vertical temperature deviation was higher than the horizontal temperature deviation by 5% which resulted from the buoyancy effect.

Color Filter Based on a Sub-wavelength Patterned Metal Grating (광파장 이하 주기를 갖는 금속 격자형 컬러필터)

  • Lee, Hong-Shik;Yoon, Yeo-Taek;Lee, Sang-Shin;Kim, Sang-Hoon;Lee, Ki-Dong
    • Korean Journal of Optics and Photonics
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    • v.18 no.6
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    • pp.383-388
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    • 2007
  • A color filter was demonstrated incorporating a patterned metal grating in a quartz substrate. The filter is created in a metal layer perforated with a symmetric two-dimensional array of circular holes, with the pitch smaller than the wavelength of the visible light. A finite-difference time-domain simulation was performed to analyze the device by investigating the effect of structural parameters like the grating height, the period, the hole size, and the refractive index of the hole-filling material on its performance. The device performance was especially optimized by controlling the refractive index of the material comprising the holes of the grating. And two different devices were fabricated by means of the e-beam direct writing with the following design parameters: the grating height of 50 nm, the two pitches of 340 nm for the red color and 260 nm for the green color. For the prepared device with the period of 340 nm, the center wavelength was 680 nm and the peak transmission 57%. And for the other device with the pitch of 260 nm, the center wavelength was 550 nm and the peak transmission was 50%. The filling of the hole with a material whose refractive index is matched to that of the substrate has led to an increase of ${\sim}15%$ in the transmission efficiency.