• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.21-29
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• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Journal of the Korean Ceramic Society
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• v.39 no.3
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• pp.278-285
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• 2002

For planar optical devices, silica film deposited by FHD was fabricated at low temperature. To prepare silica film at low temperature, we have changed B, P amounts and investigated consolidation effect with varying consolidation temperature and atmosphere on microstructural change, and also observed optical property. The optimum consolidation temperature in He was lower than that of other atmosphere, its temperature could be lowered to 1050$^{\circ}C$. As a result, the roughness of flat silica film prepared at 1050$^{\circ}C$ showed 5, 6nm.

• Journal of the Korea Concrete Institute
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• v.19 no.5
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• pp.577-584
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• 2007

The effect of steel microfibers (SMF) on alkali-silica reaction (ASR) was investigated using two types of reactive aggregates, crushed opal and a pyrex rod of constant diameter. Cracks are less visible in the SMF mortars compared with the unreinforced mortars. Due to crack growth resistance behavior in SMF mortar specimens, the strength loss is eliminated and the ASR products remained well confined within the ASR site. The expansion and the ASR products were characterized by microprobe analysis and inductively coupled plasma (ICP) spectroscopy. The confinement due to SMF resulted in a higher Na and Si ion concentration of the ASR liquid extracted from the reaction site. The higher concentration reduced the ASR rate and resulted in a lower reactivity of the reactive pyrex rods in SMF mortars.

• Elastomers and Composites
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• v.42 no.2
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• pp.102-106
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• 2007

Water swelling behaviors of SBR vulcanizates with different reinforcing systems of carbon black, silica without a coupling agent, and silica containing a coupling agent were studied. Distilled water and 3.5% NaCl solution were used as swelling media. The water swelling ratios in the distilled water were higher than those in the salt solution. The water swelling ratios of the carbon black-filled samples were lower than those of the silica-filled ones. For the silica-filled SBR vulcanizates, the specimens without the silane coupling agent had higher water swelling ratios than those containing it. Water swelling behaviors of SBR composites with different 1,2-unit contents were also compared. The water swelling ratios tended to decrease by increasing the 1,2-unit content.

• Polymer(Korea)
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• v.24 no.2
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• pp.220-227
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• 2000

Silica and carbon black filled natural rubber (NR) vulcanizates were prepared with different mixing modes and amounts of fillers. Curing characteristics, morphology. and tear properties of the NR vulcanizates were investigated. The NR vulcanizates filled with silica and carbon black sequentially showed longer induction time ($t_2$), cure index ($t_{90}$ ), and lower maximum torque ($T_{max}$ ) than the NR vulcanizates filled with them simultaneously, during curing process. The former showed superior dispersion of fillers and tear properties to the latter. The NR vulcanizates containing 30 phr of silica showed excellent properties in the experimental range.

• Proceedings of the Korean Institute Of Construction Engineering and Management
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• 2006.11a
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• pp.593-596
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• 2006

Productivity is the most important factor directly link to success and failure of a work in construction industry. To evaluate this productivity, simulation technique is verified as a fine inspection tool through various experiment reports. On this project, we have proved the part of improvement on productivity using this simulation technique, applied to this field sites. We have used CYCLONE, which is the most appropriate simulation technique on this project. As a result of Simulation analysis, it has been confirmed that the productivity was enhanced due to the advancement of equipment, hence the reduction of air is being effected.

• The Korean Journal of Pesticide Science
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• v.8 no.4
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• pp.319-324
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• 2004

Pesticide formulations for controlled release were pepared with hollow silica microspheres. The hollow microsphere, which was obtained through calcination for the core removed after silica coating, showed maximum impregnation of benfuracarb up to 2.7 times of its mass in comparison with those obtained through the other core removal method. The release test of the pesticide formulation, when used with ESO(Epoxidized Soybean Oil) as a binder, showed ideal release pattern with steady release rate from the day 10 to 30 retaining the benfuracarb concentration in the water around 1.65 ppm.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.159-159
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• 2011

최근 여러 화학 반응에 대해서 일층(1L) 그래핀(graphene)이 복층(multi-layered) 그래핀보다 10 배 이상의 높은 반응성을 보인다는 사실이 알려졌다. 본 실험에서는 기판의 편평도와 기판-그래핀 간의 상호작용이 그래핀의 반응성에 미치는 영향을 이해하기 위해서, AFM(atomic force microscopy)과 라만 분광법을 이용하여 그래핀의 기체상 고온 산화반응을 연구하였다. 기계적 박리법을 통해 산화실리콘(SiO2/Si)과 마이카(mica) 기판 위에 고착된 그래핀 시료를 대조군으로 비교하였다. AFM 형상 분석으로부터 편평도가 낮은 산화실리콘 위에서는 그래핀의 두께가 작을수록 산화 속도가 크다는 사실을 확인하였다. 그러나 편평도가 높은 마이카 기판 위에서는 단일층 그래핀의 산화 속도가 산화실리콘 기판 위에서보다 현저하게 감소하고 두 겹 이상의 두께에서는 반응성의 차이가 없음을 발견하였다. 특히 마이카 위의 단일층 그래핀에서는 복층 그래핀과는 달리 산화에 의한 식각이 거의 일어나지 않아 화학적 안정성이 증대되었음을 알 수 있었다. 본 연구는 기판의 표면구조와 상호 작용을 통해 그래핀의 화학적 특성을 조절 할 수 있다는 가능성을 보여 준다.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.89.2-89.2
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• 2012

$150^{\circ}$ 이상의 접촉각을 가지는 초소수성 표면은 self-cleaning, anti-fingerprint, anti-contamination 등의 특성을 가지므로 전자, 도료, 자동차 등 다양한 산업에서 활용될 수 있다. 재료 표면의 친/소수성은 물리적 요인과 화학적 요인 두 가지 요인을 조절함으로써 제어할 수 있다. 즉, 표면의 거칠기를 크게 하거나 표면에너지를 낮춰줌으로써 초소수성 표면을 구현할 수 있다. 실리카는 자연계에 매우 풍부하게 존재하고 있으며, 생체무해하며 내구성과 내마모성, 화학적 안정성, 고온 안정성 등을 지니고 있어 박막소재로 이용하기에 우수한 특징을 지니고 있다. 이러한 실리카 초소수성 코팅층을 형성하는 방법으로 본 연구에서는 전기분무법으로 마이크로 크기의 실리카 입자로 형성된 코팅층을 형성하였다. 이러한 마이크로 구조의 표면거칠기를 더욱 높이기 위하여 금 나노입자를 부가적으로 형성시켜 마이크로-나노구조 혼성의 계층구조를 만들고자 하였다. 금 나노입자는 자외선 조사 광환원법을 사용하였고, 이러한 계층구조에 플루오린 처리를 하여 계층구조 초소수성 코팅층을 형성하였다. 계층구조를 가지는 실리카 코팅층은 물 이외에 표면장력이 낮은 용액에서도 높은 접촉각을 보였고, 이러한 코팅층의 고온 안정성과 내구성, UV 저항성 등을 조사하여 실제 응용 가능성을 검토하였다.

• Applied Chemistry for Engineering
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• v.8 no.6
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• pp.901-906
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• 1997

Ultrafine silicon dioxide($SiO_2$) powder was prepared from tetraethylorthosilicate(TEOS) by the gas-phase reaction. The effects of reaction temperature, flow rate of gas, TEOS concentration, and preheating temperature of reactants on the particle size were investigated. As the reaction temperature increased, average particle size of the silicone dioxide powder became smaller. Smaller particles were also obtained with decreasing the residence time of reactants in the reaction zone. Larger particles having narrow size distribution were produced with the high concentrations of the reactants. The effect of the preheating temperature was not considerable on the average particle size. The range of average particle size was from 30 nm to 58 nm depending on experimental conditions.