• Title/Summary/Keyword: 최대주입압력

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$10^{-10}$ Pa 영역에서의 스퍼터 이온펌프와 Non-Evaporable Getter (NEG) 펌프조합의 배기 특성

  • Jo, Bok-Rae;Han, Cheol-Su;Kim, Yeong-Jun;An, Sang-Jeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.148-148
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    • 2013
  • 스퍼터 이온펌프(Sputter Ion Pump)는 주로 화학흡착으로 동작하며 기계적 진동이 없고, 기름 등의 오염 물질을 배출하지 않으며, 수명이 길어 초고청정 진공이 요구되는 표면실험장치, 표면분석계, 입자가속기 등에서 널리 사용 되고 있다. 일정한 지름을 갖는 다수의 원통 양극과 그 양단에 두개의 음극판을 배치시킨 후, 양극과 음극 사이에 수 kV의 전압을 걸고 원통의 축방향으로 자장을 인가하면 페닝 방전이 발생한다. 냉음극에서 방출된 전자는 양극으로 비행하면서 가스를 이온화한다. 이온분자는 가스흡수성 게터재료로 된 음극에 충돌하여 스퍼터링을 일으키며 게터막를 주변에 증착시킨다. 이온 및 중성 가스는 게터 고체막 속에 주입 포획되는 형태로 배기된다. 스퍼터 이온펌프는 $10^{-5}$ Pa 부근에서 최대 배기속도를 가지며, 압력이 낮아질 수록, 특히 $10^{-10}$ Pa영역 이하에서는 그 배기속도가 급격히 저하되며, $10^{-10}$ Pa영역에서는 배기능력을 거의 상실한다. 따라서 스퍼터 이온펌프 단독으로 진공시스템을 배기할 때 도달압력은 $10^{-9}$ Pa 영역에 머무르게 되며, $10^{-10}$ Pa 이하의 극고진공을 얻기 위해서는, $10^{-8}$ Pa 이하의 압력에서 배기 속도가 압력과 무관한 흡착펌프(getter pump)와 이온펌프를 조합하여 사용한다. 본 실험에서는 $600^{\circ}C$ 이상의 온도로 진공로에서 탈개스시킨 진공용기를 배기속도 450, 60, 30, 20, 5, 3 l/s의 6종류의 이온펌프와 배기속도 400 l/s, 100 l/s의 non-evaporable getter (NEG) 펌프를 조합시켜 배기하여 그 배기 특성을 비교하였다. 도달 압력은 이온펌프의 배기속도가 클수록 낮아지는 경향을 보여주었다. 450 l/s 이온펌프와 400 l/s NEG를 조합하여 배기시킬 때 도달 압력은 ~$2{\times}10^{-10}$ Pa을 기록하여 가장 낮았으며, 3 l/s 이온펌프와 400 l/s NEG를 조합하였을 때는 $ 2{\sim}3{\times}10^{-8}$ Pa을 기록하였다. 450 l/s 이온펌프와 400 l/s NEG를 조합한 경우 잔류가스의 대부분이 수소였으나, 3 l/s 이온펌프와 400 l/s NEG의 조합한 경우에는 메탄의 잔류량이 수소 보다 많았다. 이 결과는 메탄을 배기하지 못하는 NEG의 배기 특성을 보완하기 위해서는 일정 배기속도 이상의 이온 펌프가 필요함을 보여준다.

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ICP소스를 이용한 FIB용 가스 이온원 개발

  • Lee, Seung-Hun;Yun, Seong-Hwan;Gang, Jae-Uk;Kim, Do-Geun;Kim, Jong-Guk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.99-99
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    • 2010
  • 최근 집속이온빔을 이용한 미세회로 교정, MEMS 공정 및 이온 도핑 등에 대한 연구개발이 활발히 이루어지고 있다. 기존에 널리 사용되었던 액체 금속 이온 소스의 경우 비교적 큰 angular divergence 및 Ga 이온 소스에 의한 오염이 문제시 되고 있어 이를 대체할 수 있는 가스 이온 소스에 대한 연구를 진행하였다. 본 연구에서 사용된 가스 이온 소스는 2 turn 안테나(1/4 inch Cu tube)가 감긴 반경 4 cm 석영관 내부에 Ar 가스를 주입 후 RF(13.56MHz)-ICP 타입 방전을 이용하였다. 운전 압력은 $10^{-5}\;Torr$ 범위이며 인가된 RF 전력은 최대 150 W이다. 석영관 내 발생된 플라즈마로부터 Ar 이온을 인출하기 위해 2단 인출 전극 구조가 사용되었으며 상단 전극에 고전압이 인가되고 하단 전극이 접지되는 형태이다. 2단 인출 전극의 최대 인출 전압은 10 kV, 상단 및 하단 전극의 구멍 크기는 각각 0.3 mm, 2 mm이다. 이온빔의 퍼짐을 최소화하기 위해 전극 간 공간 내 이온 거동 전산모사를 통해 전극 구조를 설계하였으며 이를 통해 최대 $30\;mA/cm^2$의 이온 전류 밀도 값을 얻을 수 있었다.

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Modelling of Fault Deformation Induced by Fluid Injection using Hydro-Mechanical Coupled 3D Particle Flow Code: DECOVALEX-2019 Task B (수리역학적연계 3차원 입자유동코드를 사용한 유체주입에 의한 단층변형 모델링: DECOVALEX-2019 Task B)

  • Yoon, Jeoung Seok;Zhou, Jian
    • Tunnel and Underground Space
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    • v.30 no.4
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    • pp.320-334
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    • 2020
  • This study presents an application of hydro-mechanical coupled Particle Flow Code 3D (PFC3D) to simulation of fluid injection induced fault slip experiment conducted in Mont Terri Switzerland as a part of a task in an international research project DECOVALEX-2019. We also aimed as identifying the current limitations of the modelling method and issues for further development. A fluid flow algorithm was developed and implemented in a 3D pore-pipe network model in a 3D bonded particle assembly using PFC3D v5, and was applied to Mont Terri Step 2 minor fault activation experiment. The simulated results showed that the injected fluid migrates through the permeable fault zone and induces fault deformation, demonstrating a full hydro-mechanical coupled behavior. The simulated results were, however, partially matching with the field measurement. The simulated pressure build-up at the monitoring location showed linear and progressive increase, whereas the field measurement showed an abrupt increase associated with the fault slip We conclude that such difference between the modelling and the field test is due to the structure of the fault in the model which was represented as a combination of damage zone and core fractures. The modelled fault is likely larger in size than the real fault in Mont Terri site. Therefore, the modelled fault allows several path ways of fluid flow from the injection location to the pressure monitoring location, leading to smooth pressure build-up at the monitoring location while the injection pressure increases, and an early start of pressure decay even before the injection pressure reaches the maximum. We also conclude that the clay filling in the real fault could have acted as a fluid barrier which may have resulted in formation of fluid over-pressurization locally in the fault. Unlike the pressure result, the simulated fault deformations were matching with the field measurements. A better way of modelling a heterogeneous clay-filled fault structure with a narrow zone should be studied further to improve the applicability of the modelling method to fluid injection induced fault activation.

Fault reactivation potential during $CO_2$ injection in the Gippsland Basin, Australia (호주 Gippsland Basin에서 $CO_2$ 주입 중 단층 재활성화의 가능성)

  • Ruth, Peter J. van;Nelson, Emma J.;Hillis, Richard R.
    • Geophysics and Geophysical Exploration
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    • v.9 no.1
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    • pp.50-59
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    • 2006
  • The risk of fault reactivation in the Gippsland Basin was calculated using the FAST (Fault Analysis Seal Technology) technique, which determines fault reactivation risk by estimating the increase in pore pressure required to cause reactivation within the present-day stress field. The stress regime in the Gippsland Basin is on the boundary between strike-slip and reverse faulting: maximum horizontal stress $({\sim}\;40.5\;Mpa/km)$ > vertical stress (21 Mpa/km) ${\sim}$ minimum horizontal stress (20 MPa/km). Pore pressure is hydrostatic above the Campanian Volcanics of the Golden Beach Subgroup. The NW-SE maximum horizontal stress orientation $(139^{\circ}N)$ determined herein is broadly consistent with previous estimates, and verifies a NW-SE maximum horizontal stress orientation in the Gippsland Basin. Fault reactivation risk in the Gippsland Basin was calculated using two fault strength scenarios; cohesionless faults $(C=0;{\mu}=0.65)$ and healed faults $(C=5.4;\;{\mu}=0.78)$. The orientations of faults with relatively high and relatively low reactivation potential are almost identical for healed and cohesionless fault strength scenarios. High-angle faults striking NE-SW are unlikely to reactivate in the current stress regime. High-angle faults oriented SSE-NNW and ENE-WSW have the highest fault reactivation risk. Additionally, low-angle faults (thrust faults) striking NE-SW have a relatively high risk of reactivation. The highest reactivation risk for optimally oriented faults corresponds to an estimated pore pressure increase (Delta-P) of 3.8 MPa $({\sim}548\;psi)$ for cohesionless faults and 15.6 MPa $({\sim}2262\;psi)$ for healed faults. The absolute values of pore pressure increase obtained from fault reactivation analysis presented in this paper are subject to large errors because of uncertainties in the geomechanical model (in situ stress and rock strength data). In particular, the maximum horizontal stress magnitude and fault strength data are poorly constrained. Therefore, fault reactivation analysis cannot be used to directly measure the maximum allowable pore pressure increase within a reservoir. We argue that fault reactivation analysis of this type can only be used for assessing the relative risk of fault reactivation and not to determine the maximum allowable pore pressure increase a fault can withstand prior to reactivation.

Development of Pressure Correction System for Surface Vessel to Ensure Reliability of Compartment Test Result (수상함 격실기밀시험 결과의 신뢰성 확보를 위한 압력 보정 시스템 개발)

  • Min, Il-Hong;Kim, Jun-Woo;Son, Gi-Joong
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.22 no.1
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    • pp.409-414
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    • 2021
  • Tightness performance that blocks compartments is important for surface ships to achieve superior mission performance and survivability in combat environments. To meet the above requirements, airtightness of the structural elements and the appropriate strength to specific areas are checked during a test run after ship construction. In particular, air tests of compartments adjacent to the water surface are performed. In an air test, air is injected into the compartment up to the test pressure of the test memo. The pressure drop value is checked after 10 minutes to determine if the requirements of the corresponding area are satisfied. In summer, however, when the influence of the outside temperature is large, a phenomenon in which the internal pressure increases during the air test was identified. This phenomenon reduces the reliability of the test result. Therefore, a system was designed to compensate for temperature changes in the compartments through this study. The developed system calculates the amount of pressure change caused by a temperature change in the compartment and outputs a correction value. The pressure change was calculated using the ideal gas equation, reflecting the maintenance, increase, and decrease in temperature during the test process. A comparison of the calculated pressure correction value with the database of NIST REFPROP revealed a difference of 0.126% to a maximum of 0.253%.

Output Ccharacteristics of XeCl Excimer Laser Excited by Transeverse-Electron-Beam (횡방향 전자빔여기 XeCl 엑시머 레이저의 출력특성)

  • 류한용;이주희;김용평
    • Korean Journal of Optics and Photonics
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    • v.5 no.3
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    • pp.386-393
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    • 1994
  • We have investigated output characteristics of XeCI excimer laser excited by transeverse electronbeam. We used e-beam output of 880 kV, 21 kA (70 ns, FWHM) and controlled current density of e-beam by pulsed magnetic coil (4.7 kG) which was fabricated around an e-beam diode (A-K gap is 21 mm) and laser chamber. We have obtained 35 J (4 atm) of e-beam deposition energy injected into laser media. The deposition energy was converted from an exposure area of Radcolor film and rising pressure of gas media which is measured by pressure jump method. The excited volume of $320cm^{3}$ was calculated. The maximum efficiency of 1.7% was obtained with the mixing ratio of HCllXe/Ar==0.2/ 6.3/93.5% and total pressure of 3 atm. Also laser output energy and specific energy were obtained 0.52 J and 1.7 J/I, respectively. For the analysis of experimental results we have developed computer simulation code. From the good agreements with the results of experiment and simulation we could theoretically explain the XeCI* formation channel. relaxation channel, and absorption channel of 308 nm.308 nm.

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Experimental Study on the Changes in the Oxygen Concentration and the Pressure at Temperature of 200 ℃ for the Assessment of the Risks of Fire and Explosion of Propylene (프로필렌의 화재 및 폭발 위험성 평가를 위한 온도 200 ℃에서 산소농도와 압력의 변화에 따른 실험적 연구)

  • Choi, Yu-Jung;Choi, Jae-Wook
    • Korean Chemical Engineering Research
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    • v.58 no.3
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    • pp.356-361
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    • 2020
  • Propylene is widely used in petrochemical manufacturing at over 200 ℃. However, since propylene is a flammable gas with fire and explosion risks, inert nitrogen is injected to prevent them. In this study, experiments were conducted using propylene-nitrogen-oxygen upon pressure changes at 200 ℃. At 21% oxygen, as pressure increased from 0.10 MPa to 0.25 MPa, lower explosion limit (LEL) decreased from 2.2% to 1.9% while upper explosion limit (UEL) increased from 14.8% to 17.6%. In addition, minimum oxygen concentration (MOC) decreased from 10.3% to 10.0%, indicating higher risks with the expanded explosive range as pressure increased. With increase of pressure from 0.10 MPa to 0.25 MPa, explosion pressure increased from 1.84 MPa to 6.04 MPa, and the rate of rise of maximum explosion pressure increased drastically from 90 MPa/s to 298 MPa/s. It is hoped that these results can be used as basic data to prevent accidents in factories using propylene.

Effects of Pilocarpine on Pressure-Volume Curve of the Excised Rabbit Lung and Pulmonary Surfactant (Pilocarpine투여(投與) 가토폐장(家免肺臟)의 압력(壓力)-용적곡선(容積曲線) 및 폐포표면활성물질(肺胞表面活性物質)에 관(關)하여)

  • Lee, Seung-Jung;Chae, Soo-Hi;Lee, Suck-Kang
    • The Korean Journal of Physiology
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    • v.8 no.2
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    • pp.49-53
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    • 1974
  • A single dose of pilocarpine was subcutaneously injected into the rabbit in order to clarify the effects of cholinergic activities on the secretion of the pulmonary surfactant. The animal was sacrificed four hours after the injection, and the pressure-volume curve of the excised lung was obtained. The surfactant activities of the lung washings were also measured, and a comparison was made with the normal. The pressure-volume curve of the excised lung by the injection and ejection of air formed a loop (hysteresis) and the mean intra-alveolar pressure at 35 ml of air was 220 $mmH_20$ in the normal. The mean deflation curve of the pilocarpine treated rabbit lungs was shifted to the left compared with the normal. The surfactant activities were slightly increased than the normal. The above results suggest that pilocarpine stimulates the secretion of the pulmonary surfactant from the Type II alveolar epithelial cell.

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Applications of Improved Low-Flow Mortar Type Grouting Method for Road Safety and Constructability in Dangerous Steep Slopes (급경사지 붕괴 위험지역의 도로 안전 및 시공성을 고려한 개선된 저유동 몰탈형 그라우팅공법 적용성 분석)

  • Choi, Gisung;Kim, Seokhyun;Kim, Nakseok
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.40 no.4
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    • pp.409-415
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    • 2020
  • Low-flow mortar injection method grouting technology was selected and the traffic area was preserved as much as possible in order to secure safety for road traffic when the outflow and subsidence of landfill occurred due to ground-water, and etc. In particular, the current existing method was newly improved since there are risks of damage such as hydraulic fracturing at the lower part of the road, spilling of soil particles on steep slopes, and bumps on the road due to excessive injection pressure during construction. This study was carried out at the site of reinforcement work on the road as a maintenance work for the danger zone for collapse of the steep slope of the 00 hill, which was ordered from the 00 city 00 province. The improved low-flow mortar type grouting method adopted a new automated grouting management system and especially, it composites the method for grouting conditions decision by high-pressure pre-grouting test and injection technology by AGS-controlled and studied about grouting effect analysis by using new technology. By applying the improved low-flow mortar type grouting method, it was possible to lay the groundwork for road maintenance work such as the prevention of subsidence of old roads, uneven subsidence of buildings and civil engineering structures, and of soil leakage of ground-water spills. Furthermore, the possibility of application on future grouting work not only for just construction that prevents subsidence of old roads but also for various buildings and civil engineering structures such as railroads, subways, bridges, underground structures, and boulder stone and limestone areas was confirmed.

부분충수 운전중 잔열제거계통 기능상실사고에 대한 CATHARE2 코드의 민감도 분석

  • 정영종;김원석;장원표
    • Proceedings of the Korean Nuclear Society Conference
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    • 1996.05b
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    • pp.48-54
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    • 1996
  • 가압경수로의 부분충수 운전중 RHR 계통의 기능상실시 사고완화를 위해 가압기 manway와 증기 발생기 출구공동 manway를 동시에 개방한 경우에 대한 실험결과를 CATHAHR2 코드를 이용하여 해석하였다. 해석을 통해 이 경우에 발생하는 물리적 현상을 이해하고 이와 같은 과도기에 대해 코드 예측능력을 평가하므로 써, 실제 원전에서 사고시 적절한 사고대응 방안을 강구하는데 참고가 될 수 있도록 해석적 근거를 제시하고자 한다. 연구결과 CATHARE2 코드는 실험을 통해 관측된 주요 물리적 현상들을 타당하게 예측하였으나, 가압기와 밀림관의 DP를 과대 예측하여 원자로 상부공동의 최대압력을 실험보다 약 7kPa 높게 예측하였다. 노심 노출시간도 노심에서 기포율 분포를 비현실적으로 예측하여 실험보다 약 500초 지연되었다. 실험과 코드의 모의결과를 통하여 노심 노출은 중력주입에 의한 냉각수 보충만으로 충분히 회복될 수 있음을 확인하였다. CATHARE2 코드는 비록 상세한 현상들에 대해 다소 불확실성을 내포하였으나, 전반적인 거동분석에는 타당한 것으로 판단된다. CATHARE 코드는 노심에서 계면 마찰력을 줄임으로써 노심의 차압을 개선할 수 있었고, guide 튜브의 위치를 고온관 중심선과 일치시켜 guide 튜브내 액체의 hold-up 기간을 개선할 수 있었으며, 가압기의 계면 마찰력을 증가시켜서 밀림관에서 "plug and clearing" 현상을 모의할 수 있었다.모의할 수 있었다.

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