• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1394-1397
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• 2005

The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1041-1044
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• 2002

Inchworm linear motor is one of the ultra precision position apparatuses and has many kinds of forms and structures according to the conditions of working space and range. In this paper, the Inchworm linear motor consists of three PZTs(Piezo-electric transducer), three columns ma two plates. finite element method was used to determine the type or hinges installed in column of inchworm linear motor DOE(Design of experiment) was used to determine the optimal design condition of a column by comparing the von-mises stresses according to the change of thickness of hinge, round of hinge, height of arm, angle of v-notch, round of v-notch and thickness of column. From the result, round of hinge, height of arm and thickness of hinge were determined a effective design parameters.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.164-169
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• 2001

The active magnetic bearing has many advantages - an active positioning, no contact and lubrication free motion - and is widely used in high precision motion stages. But, the conventional magnetic bearings composed of electromagnets only are power consuming due to their bias current and have the excessive heat generation, which can make the repeatability of the positioning system worse. To overcome this drawback, we developed a novel permanent magnet (PM) biased linear magnetic bearing for a high precision magnetically levitated stage. The permanent magnets provide a bias flux and generate a bias force, and the electromagnet increases or reduces a flux of the permanent magnets and gives a levitation force. This paper presents a theoretical magnetic circuit analysis, FEM analysis and experimental data from the 1-DOF tests, and compares the theoretical power consumption of the electromagnetic bearings and the PM biased linear magnetic bearings. The PM biased linear magnetic bearing presented in this paper gives better load capacity but lower power consumption than a conventional electromagnetic bearing and will be adopted in our 6-DOF high precision linear positioning maglev stage.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.1
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• pp.74-79
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• 2011

Alignment systems with multi-axis motions are applied to determine vertical arrangement of multilayer assembly such as LCD, PDP, and MLCC. This study reports the development of XY${\theta}$ alignment stage which is designed as thin-type structure and parallel actuations. The thin-type parallel XY${\theta}$ alignment stage is maintained below $1{\mu}m$ in repeatability error. The squareness and straightness also allow precise motion for the alignment by the developed stage. The measured error is ${\pm}6.25{\mu}m$ in the alignment experiment by the vision system on the parallel XY${\theta}$ alignment stage.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.36-40
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• 2003

In order to discuss the availability of aerostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156N and a laser scale with the resolution of $0.01\mu\textrm{m}$ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway also has $0.21\mu\textrm{m}$ of positioning error and $0.09\mu\textrm{m}$ of repeatability, and it shows the stable response against the $0.01\mu\textrm{m}$ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the aerostatic guideway driven by the coreless linear motion is very useful for the ultra precision machine tools.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.48-53
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• 2005

The world, coming into the 21st century, is preparing a new revolution called a knowledge-based society after the industrial society. The interest of the world is concentrated on information technology, nano-technology and biotechnology. In particular, the nano-technology of which study was originally started from an alternative for overcoming semiconductor micro-technology. It can be applied to most industry subject such as electronics, information and communication, machinery, chemistry, bioengineering, energy, etc. They are emerging into the technology that can change civilization of human beings. Specially, ultra precision machining is quickly applied to nano-technology in the field of machinery. Lately, with rapid development of electronics industry and optic industry, there are needs for super precision finishing of various core parts required in such related apparatuses. This paper handles stability of a super precision micro cutting machine that is a core unit of such a super precision finisher, and analyzes the results depending on the hinge type and material change, using FEM analysis. By reviewing the stability, it is possible to achieve the effect of basic data collection for unit control and to reduce trials and errors in unit design and manufacturing.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.33 no.2
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• pp.131-142
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• 2015

In order to support the development of a cost-effective river bathymetric system, this research has focused on modeling GPS observables, which are obtained by array of five single-frequency receivers (i.e., two references and three rovers) to estimate the high accurate kinematic position, and the surveying vessel altitude. Also, by applying all GPS measurements as multiple-baselines with constraining rover baselines, we derived the socalled ‘kinematic network model.’ From the model, the integer-constrained least-squares (LS) for position estimation and the implicit LS for attitude determination were implemented, while a series of simulation tests with respect to the baseline lengths around 2km performed to demonstrate its accuracy analysis. The on-the-fly (OTF) ambiguity resolution tests revealed that ninety-nine percents of time-to-fix-first ambiguity (TTFF) can be decided in less than two seconds, when the positioning accuracy of ambiguity-fixed solutions was assessed as the greater than or equal to one and two centimeters in horizontal and vertical, respectively. Comparing to the GPS-derived attitudes, the achievable accuracy gradually descended in sequence of yaw, pitch and roll due to the antenna geometric configuration. Furthermore, the RMSE values for the baseline lengths of three to six meters were within ±1′for yaw, and less than ±10′and ±20′for pitch and roll, respectively, but those of between six to fifteen meters were less than ±1′for yaw, ±5′for pitch, and ±10′for roll.

• Korean Journal of Optics and Photonics
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• v.11 no.2
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• pp.67-72
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• 2000

A lot of varIOUS studies are taking advantage of annular masks or various pupil filters to design optical systems such as a digital versatile disc (DVD) pick up head and precise scanning microscopy that have the superresolution beyond the diffraction limit. We considered both annular mask and pupil filter for the superresolution system. Since image quality is a function of annular width, position and modulation amount, we computel'lzed the optimized condition for the phase modulation and mvestigated the variation of lhe center peak: intensity for the phase modulated system From tills result, we were able to detenrune the best conditions for the annular apodizer, wluch give the maximum value of the center peak intensity_ We made especially sure that the phase modulated system have an excellent compensation for spherical aberration as it lllcreases. eases.