• 한국기계가공학회지
• /
• 제2권1호
• /
• pp.57-62
• /
• 2003

Machining technique for optical crystals with single point diamond turning tool is reported in tills paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. SPDT has been widely used in manufacturing optical reflectors of non-ferrous metals such as aluminum and copper which are easy to be machined for their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of our research is to find the optimum machining conditions for ductile cutting of optical crystals and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle materials. As a result, the cutting force is steady, the cutting force range is 0.05-0.08N. The surface roughness is good when spindle is above 1400rpm, and feed rate is small. The influence of depth of cut is very small.

• 한국기계가공학회지
• /
• 제9권6호
• /
• pp.1-6
• /
• 2010

Patterned optical components are widely used for optical products such as LCD and lighting. Since CCFL was used as a light source in the products, prism films having linear continuous optical patterns were widely used. However, LED which is a dot light source is popular recently, therefore, the optical products need new optical components having non-continuous optical patterns. Indentation machining method is a powerful method for machining of non-continuous pattern. When a copper mold and a brass mold were machined by this method, severe plastic deformation called pile-up was observed around the patterns. Since pile-up has negative relationship to ductility, this deformation can be eliminated by annealing treatment which makes the materials ductile. No plastic deformation occurred when machined after annealing at $600{^{\circ}C}$ and $575{^{\circ}C}$ for copper and brass, respectively. Finally, non-continuous optical patterns with high quality were machined on a copper mold and a brass mold successively.

• 한국생산제조학회지
• /
• 제25권1호
• /
• pp.75-82
• /
• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2007년도 춘계학술대회논문집
• /
• pp.185-190
• /
• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링 밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 능동 방진 시스템을 설계한다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• 대한기계학회논문집B
• /
• 제27권11호
• /
• pp.1525-1533
• /
• 2003

In the precision hot plate for wafer processing, uniform temperature of the upper plate is one of key factors affecting the quality of wafers. The state-of-the-art precision hot plates require temperature Variations less than $\pm$0.4$^{\circ}C$ during heating to 15$0^{\circ}C$, Which is difficult to be obtained only by the improvement of manufacturing techniques alone. In this study, computer aided heat transfer analysis was carried out to obtain the temperature distribution of the currently used reference hot plate for 200mm wafer. The analysis on the reference model assuming constant heat generation rate and uniform heating area showed total variation of 0.926$^{\circ}C$ at 15$0^{\circ}C$. One of the new design approaches based on the change of heating location together with different heat generation rate resulted in total variation of 0.297$^{\circ}C$ which is a 68% improvement compared to that of the reference model.

• 전기학회논문지
• /
• 제67권1호
• /
• pp.87-95
• /
• 2018

The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation.

• 한국산학기술학회논문지
• /
• 제13권4호
• /
• pp.1453-1459
• /
• 2012

본 연구에서는 보이스코일 모터와 압전 구동기를 동일 축으로 배치함으로써 초정밀 위치결정뿐만 아니라 동특성을 개선할 수 있도록 하는 듀얼 스테이지를 다룬다. 듀얼 스테이지는 모델링이 엉성할 경우 오히려 나쁜 동특성을 보이는 단점이 있다. 이 논문은 본드그래프를 이용하여 듀얼 스테이지를 모델링하고 동적 상태방정식을 본드그래프에서 유도하였다. 또한 동특성을 향상시키기 위한 보상기의 설계 예시를 보이고 있으며, 시뮬레이션을 통해 검증하였다.

• 반도체디스플레이기술학회지
• /
• 제4권1호
• /
• pp.1-8
• /
• 2005

Linear motor can be directly applied to the system needed linear motions without rotary motions. To control high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry This paper presents thermal and vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the thermal behaviors and vibration characteristics of the advanced products. The thermal measurements are conducted for comparing the developed linear motor with the advanced linear motor and the Finite Volume Method(FVM) is used to identify the measurement results. And then the vibration measurement are carried out in the developed and advanced linear motors with respect to the speed. To identify the measurement results, the Finite Element Method is utilized in the developed and advanced linear motors, respectively. The FVM, FEM, and experiments make it possible to understand these characteristics. The improvement is suggested through their results conducted experiment and analyses.

• 한국기계가공학회지
• /
• 제4권2호
• /
• pp.31-36
• /
• 2005

Machining technique for optical crystals with single point diamond turning tool is reported in this paper. The main factors influencing the machined surface quality are studied and regularities of machining process are drawn. Optical crystals have been known to more and more important applications in the field of modern optics. Ge is more brittle material of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimum machining conditions for ductile cutting of Ge and apply the SPDTM technique to the manufacturing of ultra precision optical components of Ge. As a result, the surface roughness is the best when cutting speed is 180m/min, feed rate is 2mm/min, depth of cut is $0.5{\mu}m$ and nose radius of tool is 0.8mm.

• 천문학논총
• /
• 제22권3호
• /
• pp.55-61
• /
• 2007

The KASINICS (Korea Astronomy and Space science Institute Near Infrared Camera System) is a ground-based near-infrared (NIR) imaging instrument. KASINICS has offner relay optics to reduce unwanted infrared light. For the offner optics, we adopted an ultra precision machining process which is installed at KBSI (Korea Basics Science research Institute). Since the offner relay optics is made of aluminum 6061 metal material, we did several tests to reach the specification. We found that a 0.497mm radius nose bite and 220m/min machining speed are best tool and condition to make this offner optics with the precision machine. In this paper, we report the technical method of ultra precision machining and results of the KASINICS offner optics.