• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.1
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• pp.57-62
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• 2003

Machining technique for optical crystals with single point diamond turning tool is reported in tills paper. The main factors influencing the machined surface quality are discovered and regularities of machining process are drawn. Optical crystals have found more and more important applications in the field of modern optics. Optical crystals are mostly brittle materials of poor machinability The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. SPDT has been widely used in manufacturing optical reflectors of non-ferrous metals such as aluminum and copper which are easy to be machined for their proper ductility. But optical crystals being discussed here are characterized by their high brittleness which makes it difficult to obtain high quality optical surfaces on them. The purpose of our research is to find the optimum machining conditions for ductile cutting of optical crystals and apply the SPDT technique to the manufacturing of ultra precision optical components of brittle materials. As a result, the cutting force is steady, the cutting force range is 0.05-0.08N. The surface roughness is good when spindle is above 1400rpm, and feed rate is small. The influence of depth of cut is very small.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.9 no.6
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• pp.1-6
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• 2010

Patterned optical components are widely used for optical products such as LCD and lighting. Since CCFL was used as a light source in the products, prism films having linear continuous optical patterns were widely used. However, LED which is a dot light source is popular recently, therefore, the optical products need new optical components having non-continuous optical patterns. Indentation machining method is a powerful method for machining of non-continuous pattern. When a copper mold and a brass mold were machined by this method, severe plastic deformation called pile-up was observed around the patterns. Since pile-up has negative relationship to ductility, this deformation can be eliminated by annealing treatment which makes the materials ductile. No plastic deformation occurred when machined after annealing at $600{^{\circ}C}$ and $575{^{\circ}C}$ for copper and brass, respectively. Finally, non-continuous optical patterns with high quality were machined on a copper mold and a brass mold successively.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.1
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• pp.75-82
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• 2016

In this study, a cross-damped low vibration controller was developed to reduce vibration in ultra-precision dual stage driven by master/slave principle. In master-slave structure, the master stage leads the driving motion and the slave stage follows it so as to maintain a constant gap between two stages. In this structure, a small perturbation of master stage makes big oscillations in slave servoing stage, so a low damped master stage composed of voice coil motor makes a long vibration in settling area after driving motion profile. In this research, an effective feedback damping algorithm for increase the damping characteristics of the dual stage was developed. The designed velocity damping algorithm improves the system stability and reduces the settling time of the whole system. Simulation and experimental results show that the developed algorithm reduces settling time and improves the regulating performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.05a
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• pp.185-190
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• 2007

In recent days, vibration isolation system is mostly required in precise measurement and manufacturing system to reduce vibration due to external disturbances and internal actuators. Among all the vibration isolation systems, air spring is widely used because of its low resonant frequency and high damping ratio. In this study, we first analyze the passive air-spring system using leveling valve, and then design the active vibration isolation system. Because the non-linearity of pneumatic characteristics, we try to design the fuzzy controller which is better than PID controller at complex and non-linear system, and then compare them both in experiment and simulation.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.11
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• pp.1525-1533
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• 2003

In the precision hot plate for wafer processing, uniform temperature of the upper plate is one of key factors affecting the quality of wafers. The state-of-the-art precision hot plates require temperature Variations less than $\pm$0.4$^{\circ}C$ during heating to 15$0^{\circ}C$, Which is difficult to be obtained only by the improvement of manufacturing techniques alone. In this study, computer aided heat transfer analysis was carried out to obtain the temperature distribution of the currently used reference hot plate for 200mm wafer. The analysis on the reference model assuming constant heat generation rate and uniform heating area showed total variation of 0.926$^{\circ}C$ at 15$0^{\circ}C$. One of the new design approaches based on the change of heating location together with different heat generation rate resulted in total variation of 0.297$^{\circ}C$ which is a 68% improvement compared to that of the reference model.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.1
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• pp.87-95
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• 2018

The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.4
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• pp.1453-1459
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• 2012

The dual stage manipulator is composed of the voice coil motor (VCM) and piezoelectric ceramics transducer (PZT), which can produce the high precise displacement and express a well dynamic performance. However, inaccurate modeling of the dual stage will exacerbate the positioning accuracy. This paper presents an approach to model the dual stage system by using bond graph theory. And the state space equations can be derived through the bond graph straightforwardly, which can be used in computing simulations. Through designing the compensators for the dual stage system and simulating, the dual stage performs better dynamics characteristic than the single actuator system.

• Journal of the Semiconductor & Display Technology
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• v.4 no.1 s.10
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• pp.1-8
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• 2005

Linear motor can be directly applied to the system needed linear motions without rotary motions. To control high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry This paper presents thermal and vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the thermal behaviors and vibration characteristics of the advanced products. The thermal measurements are conducted for comparing the developed linear motor with the advanced linear motor and the Finite Volume Method(FVM) is used to identify the measurement results. And then the vibration measurement are carried out in the developed and advanced linear motors with respect to the speed. To identify the measurement results, the Finite Element Method is utilized in the developed and advanced linear motors, respectively. The FVM, FEM, and experiments make it possible to understand these characteristics. The improvement is suggested through their results conducted experiment and analyses.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.2
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• pp.31-36
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• 2005

Machining technique for optical crystals with single point diamond turning tool is reported in this paper. The main factors influencing the machined surface quality are studied and regularities of machining process are drawn. Optical crystals have been known to more and more important applications in the field of modern optics. Ge is more brittle material of poor machinability. The traditional machining method is polishing which has many shortcomings such as low production efficiency, poor ability to be automatically controlled and edge effect of the workpiece. The purpose of our research is to find the optimum machining conditions for ductile cutting of Ge and apply the SPDTM technique to the manufacturing of ultra precision optical components of Ge. As a result, the surface roughness is the best when cutting speed is 180m/min, feed rate is 2mm/min, depth of cut is $0.5{\mu}m$ and nose radius of tool is 0.8mm.

• Publications of The Korean Astronomical Society
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• v.22 no.3
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• pp.55-61
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• 2007

The KASINICS (Korea Astronomy and Space science Institute Near Infrared Camera System) is a ground-based near-infrared (NIR) imaging instrument. KASINICS has offner relay optics to reduce unwanted infrared light. For the offner optics, we adopted an ultra precision machining process which is installed at KBSI (Korea Basics Science research Institute). Since the offner relay optics is made of aluminum 6061 metal material, we did several tests to reach the specification. We found that a 0.497mm radius nose bite and 220m/min machining speed are best tool and condition to make this offner optics with the precision machine. In this paper, we report the technical method of ultra precision machining and results of the KASINICS offner optics.