• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.285-285
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.10a
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• pp.159-163
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• 2001

마찰구동은 다른 구동방식에 비하여 구조가 간단하고, 기계적인 정도를 얻기 쉬우며, 백래쉬 등에 기인하는 비선형 요소인 로스트모션이 없고 관성이 작아 구동력이 작은 이점이 있다. 그 반면에 접촉부에서 미끄럼이 발생하여 큰 구동력을 얻기 어렵고 마찰저항에 의하여 마멸이 생기는 결점이 지적되고 있다. 본 연구에서는 초정밀가공기용 위치결정기구로 마찰구동기구를 사용하기 위하여 위치 결정도에 관한 설계, 구동력의 설계 및 재료의 선택에 관하 여 분석하고 시작품을 제작하여 특성을 연구하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.10a
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• pp.270-270
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• 2003

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.917-918
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• 2011

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.3
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• pp.9-14
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• 1999

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.9 no.6
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• pp.164-169
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. As such technology has been rapidly developed, this field needs the positioning accuracy as high as submicron. It is expected that the accuracy of 10nm and 1nm is required in precision work and ultra precision work field, respectively by the beginning of 2000s. High speed and low vibration are also needed. This work deals with the design method and control system of Ultra precision positioning apparatus. Control performance and stability analysis were performed in advance by modeling and designing the controller with Simulink.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.621-622
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.131-132
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• 2006

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is $20{\times}23m$. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the ${\alpha}$-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.64-70
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• 2002

The positioning system fur the ultraprecision machine tool should have nanometer order of positioning resolution. For the purpose of achieving that resolution, various feed drive devices have been proposed and currently hydrostatic lead screw and friction drive are paid attention. It is reported that an angstrom resolution can be achieved by using twist-roller friction drive. So we have manufactured ultraprecision feeding system driven by the twist-roller friction drive and perform performance assessment for problem definition and solution finding. As a result, we found that the twist-roller friction drive is mechanically suitable for ultraprecision positioning but some considerations are needed to get higher resolution.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.88-93
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• 1996

The study was carried out development a pricision positioning apparatus, consisting of DG servo motor and piezoelectric actuatior. This system is composed of fine and coarse apparatus, measurement system and control system. Peezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is droved by DC servo motor. Control system output a signal from laser interfermeter and capacitive sensor to amplifer of DC servo motor and piezoelectric actuator after digital signal processing (DSP). Resolution of this apparatus measure with laser interferometer and microsense