• Title/Summary/Keyword: 천 마스크

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The electronic states and transition state of Zr and Hf oxide as a phase shift maske for DUV lithography (DUV lithography 위상 변위 마스크용 Zr, Hf Oxide의 전자상태 및 천이 상태 연구)

  • 김성관;김양수;노광수;허성민;최성운;송정민
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.215-215
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    • 2003
  • 현재 이용되고 있는 위상 변위 마스크, 즉 Cr 계열의 마스크나 MoSiON 마스크는 DUV지역에서 낮은 굴절률을 갖는다. 그 겯과 마스크의 두께가 90 nm 이상이 되고, 웨이퍼에서 패턴 형성 시 에러율이 증가하게 된다. 본 연구에서는 DUV 지역에서 굴절률이 높을 것이라고 예상되는 Zr과 Hf의 oxide를 위상 변위 마스크 물질의 선정하고 각 물질의 전자 상태와 천이 상태를 분석하여 위상변위 마스크로써의 이용가능성을 연구하자 한다. 상온에서 Zr, Hf oxide의 안정한 구조는 cubic 구조와 monoclinic 구조이다. 현재 cubic 구조의 Zr, Hf oxide에 대한 전자 상태는 연구가 많이 되어 있는 반면 monoclinic 구조에서의 전자상태 연구는 미흡하다. 본 연구에서는 monoclinic 구조를 이용하여 Zr, Hf oxide의 클러스터 모델을 제작하였다. 제작된 클러스터 모델에 대하여 DV-X$\alpha$ 계산법을 적용, 기저상태의 전자상태를 계산하였다. 그리고 각 모델에서 Zr L-edge, Hf L-edge 그리고 O K-edge의 천이상태를 연구하여, 기저 상태의 전자상태와 천이상태를 연구하여 광학 성질과의 연관성을 연구하고자 하였다.

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An X-masking Scheme for Logic Built-In Self-Test Using a Phase-Shifting Network (위상천이 네트워크를 사용한 X-마스크 기법)

  • Song, Dong-Sup;Kang, Sung-Ho
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.2
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    • pp.127-138
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    • 2007
  • In this paper, we propose a new X-masking scheme for utilizing logic built-in self-test The new scheme exploits the phase-shifting network which is based on the shift-and-add property of maximum length pseudorandom binary sequences(m-sequences). The phase-shifting network generates mask-patterns to multiple scan chains by appropriately shifting the m-sequence of an LFSR. The number of shifts required to generate each scan chain mask pattern can be dynamically reconfigured during a test session. An iterative simulation procedure to synthesize the phase-shifting network is proposed. Because the number of candidates for phase-shifting that can generate a scan chain mask pattern are very large, the proposed X-masking scheme reduce the hardware overhead efficiently. Experimental results demonstrate that the proposed X-masking technique requires less storage and hardware overhead with the conventional methods.

A Study on the W-Ti Absorber Properties with Various Ti Composition for X-ray Lithography Mask (Ti 함량 변화에 따른 X선 노광 마스크용 W-Ti 흡수체의 물성 연구)

  • Kim, Gyeong-Seok;Lee, Gyu-Han;Im, Seung-Taek;Lee, Seung-Yun;An, Jin-Ho
    • Korean Journal of Materials Research
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    • v.10 no.3
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    • pp.218-222
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    • 2000
  • W-Ti film properties for X-ray absorber applications have been investigated with Ti composition have been investigated with Ti composition variation. W-Ti films were deposited by DC magnetron sputtering system. As the working pressure increases, film density decreases and film stress changes from compressive to tensile. The transition pressure (where the film stress in zero) and the stress gradient decrease by adding Ti into W-Ti(6.5 at.%) film shows the smallest stress gradient and transition pressure. It also shows high density ($17.7g/\textrm{cm}^3$) similar to that of pure-W ($17.8g/\textrm{cm}^3$) at the transition pressure. All the films show columnar structure, and its size decreases with increasing Ti composition. Surface roughness and thermal stability are improved by Ti-addition, resulting in a better property for X-ray absorber applications.

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Survey on Current Mask Use and Satisfaction Among Domestic Consumers During COVID-19 (COVID-19의 확산으로 인한 국내 소비자의 마스크 사용현황과 만족도 조사)

  • Hwang, Nawon;Lee, Kwang-Woo
    • Fashion & Textile Research Journal
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    • v.24 no.4
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    • pp.399-407
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    • 2022
  • Wearing a mask is essential during the ongoing COVID-19 pandemic. For this study, an online survey was conducted on the actual use of masks among adults in their twenties and older. We used 389 questionnaires for the final analysis, excluding insincere or incomplete questionnaires. We then analyzed the responses using descriptive statistical analysis, frequency analysis, t-test, and ANOVA. More than half of the respondents indicated that they wore a mask for five to ten hours a day, with KF masks being the most frequently used. Participants who most frequently used cloth masks were more likely to consider color, design, and eco-friendliness, while those who used KF masks were more concerned with price and safety. There was no significant difference in purchase satisfaction between mask types, but the purchase intention was higher for KF masks. When purchasing a KF mask, there were significant differences across genders in terms of price and eco-friendliness preferences. There were also significant differences across age groups in price, eco-friendliness, skin irritation, and comfort preferences. Previous studies have shown a significant difference in gender and age in terms of preferred mask colors and designs. However, this survey found no significant difference across these categories. These findings indicate those mask manufacturers should consider safety and eco-friendliness over mask color and design.

Double Encryption of Digital Hologram Based on Phase-Shifting Digital Holography and Digital Watermarking (위상 천이 디지털 홀로그래피 및 디지털 워터마킹 기반 디지털 홀로그램의 이중 암호화)

  • Kim, Cheol-Su
    • Journal of Korea Society of Industrial Information Systems
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    • v.22 no.4
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    • pp.1-9
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    • 2017
  • In this Paper, Double Encryption Technology Based on Phase-Shifting Digital Holography and Digital Watermarking is Proposed. For the Purpose, we First Set a Logo Image to be used for Digital Watermark and Design a Binary Phase Computer Generated Hologram for this Logo Image using an Iterative Algorithm. And Random Generated Binary Phase Mask to be set as a Watermark and Key Image is Obtained through XOR Operation between Binary Phase CGH and Random Binary Phase Mask. Object Image is Phase Modulated to be a Constant Amplitude and Multiplied with Binary Phase Mask to Generate Object Wave. This Object Wave can be said to be a First Encrypted Image Having a Pattern Similar to the Noise Including the Watermark Information. Finally, we Interfere the First Encrypted Image with Reference Wave using 2-step PSDH and get a Good Visible Interference Pattern to be Called Second Encrypted Image. The Decryption Process is Proceeded with Fresnel Transform and Inverse Process of First Encryption Process After Appropriate Arithmetic Operation with Two Encrypted Images. The Proposed Encryption and Decryption Process is Confirmed through the Computer Simulations.

Double Encryption of Binary Image using a Random Phase Mask and Two-step Phase-shifting Digital Holography (랜덤 위상 마스크와 2-단계 위상 천이 디지털 홀로그래피를 이용한 이진 영상 이중 암호화)

  • Kim, Cheolsu
    • Journal of Korea Multimedia Society
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    • v.19 no.6
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    • pp.1043-1051
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    • 2016
  • In this paper, double encryption technique of binary image using random phase mask and 2-step phase-shifting digital holography is proposed. After phase modulating of binary image, firstly, random phase mask to be used as key image is generated through the XOR operation with the binary phase image. And the first encrypted image is encrypted again through the fresnel transform and 2-step phase-shifting digital holography. In the decryption, simple arithmetic operation and inverse Fresnel transform are used to get the first decryption image, and second decryption image is generated through XOR operation between first decryption image and key image. Finally, the original binary image is recovered through phase modulation.

Which is the proper insertion method of laryngeal mask airway according to the rescuer's position? : Comparison between index finger insertion and thumb insertion (구조자의 위치에 따른 적절한 후두마스크기도기 삽입방법은 무엇일까? : 검지손가락법과 엄지손가락법의 비교)

  • Chun, Kyoung-Ha;Moon, Jun-Dong
    • The Korean Journal of Emergency Medical Services
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    • v.21 no.3
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    • pp.7-16
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    • 2017
  • Purpose: The purpose of the study was to investigate the effects of laryngeal mask airway (LMA) insertion from different positions, using different methods, on the quality of the insertion, for identifying a more convenient and effective insertion method. Methods: In a model ambulance, 30 paramedic students performed the LMA insertion procedure, in four different settings, combinations of the rescuer's position (at the head end of the patient, at the side of the patient), and insertion technique (index finger insertion, thumb insertion), in a randomized order. Quality of insertion index and convenience of use were measured. Results: The quality of insertion index (tidal volume, gastric insufflation, airway pressure, airway sealing pressure, midline positions, insertion success grade, and insertion time) were not significantly different among four different settings. However LMA insertion from the anterior (head) end, using the index finger method compared to the thumb method was found to be significantly more convenient. Conclusion: We recommend using the more convenient and familiar LMA insertion method, between index finger insertion and thumb insertion, regardless of rescuer's position.

Design of VCO(Voltage Controlled Oscillator) for mobile communication with a built-in voltage regulator (전압 레귤레이터를 내장한 이동통신용 VCO(Voltage Controlled Oscillator) 설계)

  • Cho, Hyon-mook
    • The Journal of the Acoustical Society of Korea
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    • v.16 no.4
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    • pp.76-84
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    • 1997
  • In this paper, one of the core components of a mobile communication system, VCO(Voltage Controlled Oscillator) IC is designed. The VCO IC was designed, have realized as LC turned oscillator using varicap. LC sinusoidal tuned oscillator generally requires external inductors and thus remainding circuit is implemneted in monolithic IC. The circuit is fabricated using an 15 mask IC process and has a die size of 1150um${\times}$780um. The tests showed that VCO was operated at frequencies in the regions between 880MHz-915MHz in the control voltage range of 1V to 3V at 5V supply voltage and as the power supply was varied from 4.5V to 5.5V, the frequency varied 425KHz/V. The VCO IC has frequency shift of 1.97MHz/T, carrier level of -7dBm and power consumption of 16.7mA. Also it has phase noise of -80dBc/Hz, offset at 50KHz and harmonic response of center frequency is -41dBm. For the future development of the transceiver 1 chip, the previously mentioned external devices need to be incorporated into Si MMIC.

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A Study on the Design of Content Addressable and Reentrant Memory(CARM) (Content Addressable and Reentrant Memory (CARM)의 설계에 관한 연구)

  • 이준수;백인천;박상봉;박노경;차균현
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.16 no.1
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    • pp.46-56
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    • 1991
  • In this paper, 16word X 8bit Content Addressable and Reentrant Memory(CARM) is described. This device has 4 operation modes(read, write, match, reentrant). The read and write operation of CARM is like that of static RAM, CARM has the reentrant mode operation where the on chip garbage collection is accomplished conditionally. Thus function can be used for high speed matching unit of dynamic data flow computer. And CARM also can encode matching address sequentially according to therir priority. CARM consists of 8 blocks(CAM cell, Sequential Address Encoder(S.A.E). Reentrant operation. Read/Write control circuit, Data/Mask Register, Sense Amplifier, Encoder. Decoder). Designed DARM can be used in data flow computer, pattern, inspection, table look-up, image processing. The simulation is performed using the QUICKSIM logic simulator and Pspice circuit simulator. Having hierarchical structure, the layout was done using the 3{\;}\mu\textrm{m} n well CMOS technology of the ETRI design rule.

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