Reduction of gate leakage current for AlGaN/GaN HEMT by ${N_2}O$ plasma
(${N_2}O$ 플라즈마에 의한 AlGaN/GaN HEMT의 누설전류 감소)
-
- Journal of IKEEE
- /
- v.11 no.4
- /
- pp.152-157
- /
- 2007