• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.113-116
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• 2008

As the integration in semiconductor display develops, semiconductor process becomes multilayer. In order to form several layer patterns, etching process which uses photoresistor (PR) must be performed in multilayer process. Repeated etching processes which take long time and PR residue cause mortal problems in semiconductor. To overcome such problems, we studied about the solution which eliminates PR effectively by using normal dry and wet etching method using plasma activated PR strip solvent in liquid condition. At first, we simulate the device which activates the plasma and make sure whether gas flow in device is uniform or not. Under activated plasma, etching effect is elevated. This improvement reduces etching time as well as display production time of semiconductor process. Generally, increasing etching process increases environmental hazards. Reducing etching process can save the etchant and protect environment as well.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.3
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• pp.31-41
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• 2016

Damage to structures, such as bridge piers, are increasing rapidly due to the debris moving along rivers at the time of flooding. Therefore, the debris fin, debris deflector and debris sweeper, which are debris reduction systems, were produced in this study and an accumulation experiment was carried out on the experimental channel according to the existence of the reduction system. The debris fin is the reduction system that creates parallel flow on debris accumulated on the bridge to pass through the bridge, which was produced using wood. In addition, the debris deflector was produced using steel pipes and it has the type of detouring the direction of debris. The debris sweeper passes the debris using the magnetic force rotation of a screw-shaped cylindrical structure by water flow and it was produced using acrylic material. The experiment was carried out by analyzing the level of accumulation according to the hardness and dropping method of the debris and comparing the accumulation rate of reduction systems, and the experiment was carried out 5 times. According to the experimental results, there was a difference in the accumulation rate according to the type of reduction system and the shape of debris, and it often depended significantly on the initial shape of debris accumulation. The direct debris reduction effect on the bridge was higher in the order of the debris deflector, debris sweeper and debris fin, but in case of the debris deflector, damage, such as stream turbulence, changes in water level and river bed, and the loss of deflector can occur due to debris accumulated directly on the debris deflector. Therefore, it is necessary to design the debris deflector considering these issues.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.05a
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• pp.23-28
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• 2003

본 논문에서는 MEMS 공정기술을 이용하는 압저항(piezoresistive) 압력센서용 다이아프램의 최적구조 제작을 위한 TMAH(Tetramethyl Ammonium Hydroxide)의 식각특성을 연구하였다. KOH, EDP 등 기존의 공정 수행에 있어서 부딪치게 되는 환경적 요인을 개선하고, 생산성 향상을 위해 독성이 없고 CMOS 집적회로 공정과 호환성이 높은 TMAH를 사용하여, 식각온도와 TMAH 농도 및 식각시간에 따른 에칭률 변화를 측정하였다. 식각온도가 증가 함에 따라, 그리고 TMAH 농도가 감소함에 따라, Si 에칭률은 증가하였으나 hillock 발생률이 증가하여 식각표면의 평탄화 정도가 나빠졌다. 이러한 단점을 AP(Ammonium Persulfate) 첨가제를 이용하여 해결하였다. l5wt% 농도의 TMAH 800ml 용액을 가지고 매 10분당 같은 양의 AP를 1시간당 5g이 되도록 첨가하여, 한변의 길이가 100~400 $\mu\textrm{m}$인 정사각형 모양을 가진 우수한 이방성 다이아프램을 성공적으로 제작하였다.

• Journal of the Korean earth science society
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• v.26 no.3
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• pp.253-267
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• 2005

Seasonal and spatial variations of tidal flat sediments were studied in Yeoja Bay. Results of the yearly observation of tidal flat transect lines indicated that the monthly change of grain size composition was not distinct from each tidal flat transect line, but it was quite clear that clay covered $40\~70\%$ of the sediment composition. Clay composed most highest in the northern part of the bay, and lowest in the western. As clay content increased, water and organic matter showed a tendency of increase, while the mean grain size was fixed per clay amount. Shear strength came out as 0 kPa as a whole. Seasonal variations of clay contents in each tidal flat were higher in winter and spring, but lower in summer and autumn. Thefine sediments were likely to be accumulated in the winter and spring. The average accumulation rate of each tidal flat was $-14.62\~38.57mm{\cdot}yr^{-1}$. The numbers showed $32.13mm{\cdot}yr^{-1}$ in the northern, $-14.62mm{\cdot}yr^{-1}$in the western, and $6.46mm{\cdot}yr^{-1}$ in the eastern part. During the coarse of this study sediment accumulation rates indicated that the sediments deposited continuously in the northern part of tidal flat, whereas erosion occurred in the western part. However, there was no distinct change in the eastern part. It was due to the clockwise lateral circulation in Yeoja Bay. Seasonally, sedimentation happened during the dry season (winter and spring) and erosion during the wet season (summer and autumn).

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.72-72
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• 2004

대부분의 금속 재료는 제조 공정 중에 인장, 압축, 압연, 압출, 인발 등 소성 변형을 수반하는 가공의 단계를 거치게 된다. 가공 단계에서 가해준 변형률 및 이에 따라 형성된 전위구조 등은 생산재의 기계적 성질에 많은 영향을 미친다. 그리고 소성 변형이 수반되는 또 하나의 과정은 피로, 크리프 손상 등의 소성 변형을 수반하게 되는 기계적 손상이다 이러한 기계적 손상에 의해서도 전위가 도입되며, 전위의 집적부위에서 균열이 생성되기도 한다. 따라서 기계적 손상을 비파괴적으로 평가하는데 있어서도 소성 변형의 영향을 파악하는 것이 하나의 중요한 문제가 된다.(중략)

• ETRI Journal
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• v.9 no.3
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• pp.90-95
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• 1987

반도체 집적 기술의 개발과 실장 기술의 발전으로 전자장치는 점점 열밀도가 높아지고 있다. 여기서는 PBA가 수직으로 배치된 전자장치를 대상으로, 먼저 자연공냉과 PBA사이에서 발생하는 2차원 유동의 열적 특성을 고려한 후에, 최고 온도 상승률에 대하여 비대칭 열유속에서의 상한값과 대칭 열유속에서의 하한값을 구하는 과정을 기술하였다. 이것은 시스팀 설계 초기 단계에서 온도예측을 하여 시스팀 신뢰도를 향상시키도록 하기 위한 것이다.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.40-41
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• 2002

광 집적회로의 필요성에 의해 평면형 광소자의 개발이 다각도로 연구되고 있다. 그 중 유리의 광민감성을 이용한 것으로 직접 UV를 조사하여 광도파로를 만드는 방법이 최근 관심을 얻고 있다. 이러한 direct UV-writing 방법을 이용한 경우는 광도과로를 위한 식각 과정을 거치지 않고도 광도파로를 제작할 수 있는 장점이 있다. UV-writing을 이용한 광도파로 형성을 위해서는 undercladding층, core층, overcladding층으로 이루어진 구조의 박막을 제조해야 하며, 특히 빛이 도파되는 core 부분은 UV 조사에 따라 굴절률이 증가하는 광민감성이 높은 물질로 구성되어야 한다. UV조사에 따라 굴절률이 증가하는 광민감성이 높은 물질로 구성되어야 한다. (중략)

• 한국지구과학회:학술대회논문집
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• 2005.09a
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• pp.32-39
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• 2005

최근 들어 북한 서해안 일대의 원유매장 가능성에 대한 보도가 국내외 언론에 자주 오르내리고 있다. 실제 북한의 서한만 분지는 일일 생산량 450 배럴의 원유가 생산되고 있어 석유부존 가능성이 확인되었고, 중국에서 큰 유전중 하나인 발해만 유전지대와 지리적으로 근접해 있어 대규모 매장 가능성도 있다. 지금까지 밝혀진 북한 서한만의 지질은 중국의 발해만과 유사하다. 후기 원생대와 초기 고생대에 생성된 기반암 위에는 최대 6 ${\sim}$ 10 km 두께의 탄산염암 및 중생대 퇴적암과 4 ${\sim}$ 5 km 두께의 퇴적암이 집적되어 있다. 근원암은 3 km 이상 되는 쥐라기 흑색 셰일과 1 ${\sim}$ 2 km 두께의 백악기 흑색 셰일 그리고 수 km 두께의 중생대 이전의 탄산염암으로 구성되어 있다. 저류층은 높은 공극률을 가진 중생대부터 신생대에 퇴적된 사암과 중생대전에 균열된 탄산염암이다. 원유 트랩은 배사구조, 단층구조, 파묻혀 있는 언덕 그리고 층서형 트랩 형태다. 따라서 서한만에서의 퇴적층들은 다양한 형태의 근원암을 가지며 또한 공극률과 투수율이 높고, 많은 단층에 의한 이동경로를 가지게 되므로, 사암으로 이루어진 석유 저장지만 발견하면 석유를 생산할 수 있을 것으로 추정된다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.10
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• pp.696-706
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• 2017

The purpose of this study was to verify experimentally debris reduction facilities for culverts installed in small rivers. A culvert is defined as a structure laid under a road or a railroad that passes through an inner urban area or downtown area to make an artificial canal. Culverts are generally categorized into road culverts or waterway culverts, among which the latter are artificial structures designed to discharge running water into a river. At the time of floods, the structural safety of waterway culverts can be undermined by the accumulation of debris, such as soil, boughs and weeds, and they may be at risk of overflowing due to blockages. Debris reduction facilities are necessary to prevent such damage. In this study, the effects of the three existing types of debris reduction facilities were examined through hydraulic experiments. The results of the experiments showed that vertical separation to divert debris reduced the accumulation rate by 27.65 to 31.39 percent. The two types of screen designed to block and divert debris, respectively, were found to have excellent debris blocking abilities. However, when the effects of the rising water level are considered simultaneously, the screen to divert debris was found to show superior effects. The screen to block debris can be considered to have excellent debris blocking ability, but requires the continuous collection of the debris, due to the high risk of rising water levels caused by its accumulation.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.5
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• pp.447-455
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• 2014

In this paper, we consider a representative integral imaging method in glasses-free 3D image processing and propose a prioritized transmission scheme for guaranteeing a received video quality in error-prone environments. According to the correlation of pixels consisting of each voxel of integral image, we set the priority differently and apply the modulation level according to this priority value. That is to say, the corresponding pixels with small variance are set to a high priority and transmitted by using a low level modulation that is robust under transmission errors, but the corresponding pixels with greater variance are set to a lower priority and transmitted by using a high level modulation that has a high bit error rate but fast transmission rate. Result shows that the proposed scheme that applies the error-robust modulation level to the important image bit stream with the high priority improves the peak to sidelobe ratio (PSR) of the received 3D image, compared with a typical method that use the same modulation level without distinction of priorities.