Effects of Annealing Atmosphere on the Characteristics of Tin Oxide Films Prepared by RF-magnetron Sputtering (RF-magnetron Sputtering법에 의해 제조된 SnO2 박막 특성에 대한 열처리 분위기 효과)
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- Journal of the Korean Ceramic Society
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- v.41 no.1
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- pp.36-40
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- 2004