• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.175.2-175.2
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• 2015

이 연구는 nano-indenter를 중심으로 박막의 nano-electrotribology 분석 연구로 Hafnium Nitride (HfN) 박막의 열처리 시 열적안정성에 대한 연구를 진행하였다. HfN 박막은 Copper (Cu)와 Silicon (Si)의 계면 확산방지막으로 사용될 수 있는 박막으로 현재 많은 연구소에서 다양한 연구가 진행되고 있다. HfN 박막은 Si (100)기판 위에 rf magnetron sputter로 증착되었다. 증착 시 Ar, $N_2$ 가스유량을 총 40 sccm 사용하였고 증착 후 HfN 박막을 질소분위기 furnace에서 500, $700^{\circ}C$로 각각 30분 동안 열처리 하였다. 열처리 전 후의 시료를 nano-indenter를 이용하여 nano-electrotribology 분석을 실시하였다. Nano-indenter 측정결과 열처리 전 HfN 박막 시료의 표면강도는 39.68 GPa였고 500oC 열처리 후 31.31 GPa로 감소하였다. 그러나 $700^{\circ}C$ 열처리 시 표면강도가 37.89 GPa로 다시 증가하였다. 탄성계수 측정결과도 이와 같은 경향을 나타내었는데, $500^{\circ}C$ 열처리 전 후 탄성계수가 258.99 GPa에서 201.88 GPa로 감소하였고 $700^{\circ}C$ 열처리 시 247.55 GPa로 다시 증가하였다. 이는 $500^{\circ}C$ 열처리하였을 때 박막 내에 흡착되었던 $N_2$ 가스가 빠져나가며 tensile stress가 발생하여 박막의 표면강도 감소를 유발했고 $700^{\circ}C$ 열처리 시 다시 박막 표면이 안정화되었기 때문으로 생각된다. 이를 통해 열처리 온도 변화에 의한 질소효과가 나타나 HfN 박막 표면의 물성이 달라지는 것을 확인하였다.

• Korean Chemical Engineering Research
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• v.47 no.5
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• pp.608-614
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• 2009

In this work, ruthenium substituted SBA-15's(Ru-SBA15's) of various Si/Ru ratios were prepared using a non-ionic triblock copolymer surfactant, $EO_{20}PO_{70}EO_{20}$, as template. We investigated the nitrogen or oxygen adsorption/desorption behaviors of the Ru-SBA-15's for their future applications as catalysts or selective adsorbents, etc. The pore size of the Ru-SBA-15's was determined by both the Barrett-Joyner-Halenda(BJH)($D_{BJH}$) and the Broekhoff-de Boer analysis with a Frenkel-Halsey-Hill isotherm(BdB-FFF) method($D_{BdB-FHH}$). The $D_{BJH}$ and $D_{BdB-FHH}$ of the Ru-SBA-15 having 50/1 ratio of Si/Ru were 3.9 nm and 4.7 nm, respectively. The transmission electron microscope(TEM) image of the Ru-SBA 15 of the Si/Ru mole ratio of 50 showed that the pore size is 4.7 nm, which is consistent with the $N_2$ adsorption results with the BdB-FHH method. The surface area of pores form oxygen adsorption/desorption isotherm was higher than that from the nitrogen adsorption/desorption isotherm by the Brunauer-Emmett-Teller(BET) method, which were respectively $612.7m^2/g$, and $573.3m^2/g$. X-ray diffraction(XRD) patterns and TEM analyses showed that the mesoporous materials possess well-ordered hexagonal arrays.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.42-46
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• 2012

In this study, a mesoporous carbon (CMK-3) activated using KOH was applied to the adsorption of formaldehyde, a representative indoor air pollutant. Activation process was carried out by putting KOH-treated CMK-3 in a reactor maintained at $700^{\circ}C$ in $N_2$ atmosphere. The activated sample was characterized using BET, XRD, XPS and FT-IR analysis. The formaldehyde adsorption performance of the mesoporous carbon was improved, which is attributed to the formation of oxygen and nitrogen functional groups on the mesoporous carbon surface by the activation process.

• Applied Chemistry for Engineering
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• v.27 no.1
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• pp.62-67
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• 2016

In this study, a pellet-type adsorbent was prepared by using the water-treatment sludge as a raw material, and its physical and chemical properties were analyzed through $N_2$-adsorption, XRD, XRF, and $NH_3$-TPD measurements. Adsorption performance for gaseous ammonia and formaldehyde was compared between the pellet-type adsorbents prepared from water-treatment sludge and the impregnated activated carbon. Although the surface area and pore volume of the pellet-type adsorbent produced from water-treatment sludge were much smaller than those of the impregnated activated carbon, the pellet-type adsorbent produced from water-treatment sludge could adsorb ammonia gas even more than that of using the impregnated activated carbon. The pellet-type adsorbent prepared from water-treatment sludge showed a superior adsorption capacity for ammonia which can be explained by chemical adsorption ascribed to the higher amount of acid sites on the pellet-type adsorbent prepared from water-treatment sludge. In the case of formaldehyde adsorption, the impregnated activated carbon was far superior to the adsorbent made from the water-treatment sludge, which can be attributed to the increased surface area of the impregnated activated carbon.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.522-525
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• 2008

최근 세라믹 막은 우수한 화학적, 열적 안정성으로 기체 분리 공정에 각광을 받아 왔다. 특히 혼합기체에서 고 순도의 수소를 분리해 내는 기술은 연료전지 공정에서 화학 에너지를 전기화학 에너지로 전환시키는데 중요한 역할을 차지한다. 본 연구에서는MTES 템플레이팅 막을 이용하여 이 막 공정의 흡착 및 투과 특성을 규명하고, 이성분 혼합기체에서 고 순도의 수소를 추출해 낼 수 있는 최적 조건을 도출해 내었다. 또한, 기체 분리 거동을 살펴보기 위해 Gproms Dynamic Simulator를 이용하였으며, 이때 기체상의 물질전달을 모사하기 위해 Dust Gas Model(DGM)을, 표면 확산 거동을 모사하기 위해 Generalized Stefan-Maxwell(GSM)식을 적용하였다. 이를 통해 평형론적 흡착 뿐 아니라 속도론적 흡착을 동시에 적용할 수 있게 하였다. MTES 템플레이팅 막의 흡착 및 분리능을 규명하기 위해 본 연구에서는 혼합기체의 투과, 분리 실험이 선행되었다. 실험 조건은 온도범위 323$\sim$473 K, 압력범위 0$\sim$7 atm에서 수행되었으며, 혼합기체는2성분으로 수소-메탄, 수소-이산화탄소, 수소-질소로 기체의 구성비는 각각 50:50 이다. 본 연구를 통해 각 혼합 기체들이 정상상태에 도달하는 시간과 분리능을 계산해 내었으며, 이 분리능을 다시 온도와 압력에 따른 결과로 분석하여 어느 조건에서의 수소 분리도가 최고치를 보이는지를 규명했으며, 시뮬레이션과 비교,대조하여 예측도를 검사하였다.

• 한국신재생에너지학회:학술대회논문집
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• 2007.11a
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• pp.105-108
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• 2007

최근 세라믹 막은 우수한 화학적, 열적 안정성으로 기체 분리 공정에 각광을 받아왔다. 특히 혼합기체에서 고 순도의 수소를 분리해 내는 기술은 연료전지 공정에서 화학 에너지를 적기화학 에너지로 전환시키는데 중요한 역할을 차지한다. 본 연구에서는 MTES 템플레이팅 막을 이용하여 이 막 공정의 흡착 및 투과 특성을 규명하고, 이성분 혼합기체에서 고 순도의 수소를 추출해 낼 수 있는 최적 조건을 도출해 내었다. 또한, 기체 분리 거동을 살펴보기 위해 Gproms Simulator를 이용하였으며, 이때 기체상의 물질전달을 모사하기 위해 Dust Gas Model(DGM)을, 표면 확산 거동을 모사하기 위해 Generalized Stefan-Maxwell(GSM)식을 적용하였다. 이를 통해 평형론적 흡착 뿐 아니라 속도론적 흡착을 동시에 적용할 수 있게 하였다. MTES 템플레이팅 막의 흡착 및 분리능을 규명하기 위해 본 연구에서는 혼합기체의 투과, 분리 실험이 선행되었다. 실험 조건은 온도범위 $30{\sim}50$ $^{\circ}C$, 압력범위 $0{\sim}5$ atm에서 수행되었으며, 혼합기체는 2성분으로 수소 메탄, 수소-이산화탄소, 수소-질소로 기체의 구성비는 각각 50:50 이다. 본 연구를 통해 각 혼합 기체들이 정상상태에 도달하는 시간과 분리능을 계산해 내었으며, 이 분리능을 다시 온도와 압력에 따른 결과로 분석하여 어느 조건에서의 수소 분리도가 최고치를 보이는지를 규명했으며, 시뮬레이션과 비교, 대조하여 예측도를 검사하였다.

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.86-92
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• 2003

The pumping characteristics of a commercial UHV cryopump with a G-M refrigerator for various gases were investigated. The pumping speeds as a function of pumped amount of $H_2,\; D_2,\; He,\; Ar,\; N_2$, CO and the pumping capacity of $N_2$ were measured and the trend was theoretically analyzed. The spectrum change of the residual gas was also investigated during cyropump operation.

• Korean Chemical Engineering Research
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• v.50 no.5
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• pp.885-889
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• 2012

In this study, amine and metal oxide additives were investigated to improve $CO_2$ adsorption capacity of activated carbons (ACs). The characteristics of surface modified ACs were studied by X-ray photoelectron spectroscopy (XPS), $N_2$ adsorption, X-ray diffraction (XRD), and BET. Amine surface treatment decreased specific surface area and pore volume of ACs, but increased alkalinity by the incorporated nitrogen functional groups. Adsorption capacities of amine functionalized ACs was larger than original ACs, because basic group which can react with $CO_2$ was grafted on the ACs surface. Presence of copper oxides on ACs also enhances the carbon dioxide adsorption. The copper oxides could increase the adsorption rate of carbon dioxides due to the acid-base interaction (or electron acceptor-donor interaction). It was found that copper oxide loading was a promising method to improve the $CO_2$ adsorption capacity of ACs.

• Korean Chemical Engineering Research
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• v.51 no.3
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• pp.352-357
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• 2013

In this study, the pellet-type adsorbents were prepared by extrusion using water treatment sludge. Effects of binder and calcination on physical and chemical properties of pellet-type adsorbents were investigated. The porous structure and surface characteristics of the adsorbents were studied using nitrogen adsorption, compression strength, scanning electron microscope, X-ray diffraction, and infrared spectroscopy of adsorbed pyridine. With increasing of binder content to 5 wt%, the compressive strength of pellet-type adsorbent could be improved more than three times, but the surface area reduced by 30%, and thus the breakthrough time of trimethylamine was shortened. The breakthrough time of the trimethylamine, a basic gas, could be increased more than three times through calcination, which seems to be due to generation of acid sites composed of Lewis acid and Br$\ddot{o}$nsted acid sites on the adsorbent surface.

• Applied Chemistry for Engineering
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• v.28 no.4
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• pp.473-478
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• 2017

In this study, the guanidine compound, 1,5,7-triazabicyclo[4.4.0]dec-5-ene (TBD) was impregnated to three kinds of silica to prepare $CO_2$ adsorbents, and the $CO_2$ adsorption and physicochemical properties of the resulting adsorbents were investigated. The TBD amount of impregnation was changed and its effect on adsorption capacity and characteristics were studied. The physicochemical properties of TBD-impregnated silica were evaluated with $N_2$ adsorption/desorption, FT-IR, elemental analysis, and thermogravimetric analysis. The TBD-impregnated silica lowered the surface area and pore volume, and the increased impregnation amount of TBD made them further decrease. When TBD was 6 mmol/g, the $CO_2$ adsorption capacity was the highest at 7.3 wt%, and the adsorption capacity decreased due to the blocking phenomenon when the TBD amount increased.