• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.539-539
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• 2012

전북대학교 고온플라즈마 응용연구센터는 교육과학기술부 기초연구사업 중 고가연구장비 구축사업의 일환으로, 고 엔탈피, 초음속 유동 환경을 모사하여, 항공우주, 군사기기, 핵융합 분야 등의 고온 재료 개발을 위한 기초 연구 장치로써, 0.4MW급 플라즈마 풍동 장치를 구축하고 있다. 0.4MW 플라즈마 풍동 장치의 플라즈마 발생부는 DC 전원 공급장치와 디스크 형태의 양극과 음극 사이에 동일 형태의 간극을 삽입한 0.4MW급 분절형 아크 플라즈마 토치로 구성되었으며, 토치에서 발생된 아크 플라즈마는 노즐을 통과하며 마하 2~4의 초음속을 나타내도록 설계 제작되었다. 시험 챔버는 노즐에서 나온 초음속 플라즈마의 특성 및 재료 시험을 위한 3차원 이송식 기판이 장착되어 있으며, 고 엔탈피 유동을 관측하기 위한 광학창을 구비하였다. 시험 챔버 하류에는 유동 안정을 위한 디퓨저(diffuser)가 설치되어 있으며, 디퓨저(diffuser)로부터 배출되는 고온가스는 열교환기를 통해 냉각된 후 진공펌프를 통해 대기로 배출되게 된다. 장치의 압력조절을 위하여 $1,000m^3/min$의 용량의 진공펌프 시스템이 설치될 예정이며 가스공급장치, 냉각수 공급장치, 디퓨져, 열교환기는 1MW급 용량으로 설계 제작되었다. 본 장치는 400kW의 전원 공급, 15 g/s의 공기유량 주입 시 약 13 MJ/kg의 고엔탈피를 가진, mach 2~4의 초음속 유동을 나타내는 것을 특징으로 한다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.309-309
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• 2013

기존의 CIGS 태양전지는 window 층(GZO/ZnO/CdS)에서의 투과 및 반사 손실을 줄이기 위하여 MgF2를 이용한 AR (Anti Reflection) 층을 적용하여 cell을 제작하고 있다. 현재 단위공정을 줄이고 시간적 경제적 비용을 절감하기위해 무반사 코팅층 없이 표면의 구조를 변화 시키거나 CIGS 태양전지의 window 층만으로 cell 구조에 적용하는 연구가 많이 진행되고 있다. 본 연구는 AR층과 window층 역할을 동시에 만족하는 일체화된 window층 두께를 설계하고 성장한 후, window층의 열처리 전후의 구조적, 광학적 및 전기적 특성을 비교 평가하였다. Macleod simulation을 이용하여 window 층을 설계한 후, RF magnetron sputtering법을 이용하여 상온성장 시킨 후 N2 분위기에서 후열처리 조건에 따른 박막의 구조적, 전기적 및 광학적 특성을 변화를 X-ray diffractometer, Field emission-scanning electron microscope, Atomic force microscopy, 4 point probe, Hall 측정, 투과도 및 반사도등으로 비교 평가하였다.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.49-54
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• 2010

Windows are still the thermally weakest part in considering energy efficiency. The vacuum glazing is considered as a new alternative in terms of energy efficiency. Vacuum glazing are consisting of two separated glass, pillars are support the under and upper glass. Therefore in this paper suggested the pillar shapes and array arrangements method using Finite Element Method and validity were proved by comparing and analyzing with the research that it is announced through the existing experiment. It is considered to solve pillar shapes and arrangement method problem of the vacuum glazing using proposed FEM analysis.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.176-177
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• 2003

진공 환경 및 가스에 함유된 미량의 수증기를 정량적으로 분석할 수 있는 계측기는 각종 산업 분야에서 그 필요성이 절실하다. 몇 가지 예를 들면 다음과 같다. 전구 속에 함유된 수증기로 인해 야기되는 텅스텐 필라멘트의 산화현상은 전구의 수명을 현저히 감소시킨다. 밀봉된 금속 전기소자 표면에 흡착된 수증기를 통해 누전 현상이 발생함으로써 소자가 비정상적으로 동작될 우려가 있다. 반도체 산업분야에서는 1 ppb의 수증기가 64 Mb DRAM 제조에 영향을 줄 수 있다는 것이 보고된 바 있다. (중략)

• Journal of the Korean Vacuum Society
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• v.13 no.2
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• pp.59-64
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• 2004

A study on the semiconductor laser-based atomic absorption spectroscopy was performed for monitoring physical vapor deposition process. Gadolinium metal was vaporized with a high evaporation rate by electron beam heating. Real-time atomic absorption spectra were measured by using tunable semiconductor laser beam at 770-794 nm (center wavelength of 780 nm) and its second harmonic at 388-396 nm. Atomic densities of metal vapor can be calculated from the absorption spectra measured. We plot the atomic densities as a function of the electron beam power and compare with the evaporation rates measured by quartz crystal monitor. We demonstrate that the semiconductor laser-based spectroscopic system developed in this study can be applied to monitor the physical vapor deposition process for other metals such as titanium.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.1-6
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• 2003

An axial electron beam gun system, which emits the electron beam power of 50 kW, has been manufactured. The electron beam gun consists of two parts. One is the electron beam generation part. including the filament, cathode, and anode. The maximum beam current is 2 A and the acceleration voltage is 25 kV. The other part includes the focusing-, deflection-, and scanning coils. The beam diameter and ham trajectory can be controlled by these coils. The characteristic of each part is measured ior the optimum condition of evaporation process. Moreover, Helmholtz coil is installed inside the vacuum chamber to adjust the incident angel of the beam to the melting surface for the maximum evaporation. We report on the evaporation rates for zirconium(Zr) and gadolinium(Gd) metals which have the high melting temperatures.

• Journal of the Korean Vacuum Society
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• v.2 no.2
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• pp.255-260
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• 1993

UHV-LCVD system was constructed for high quality silicon nitride thin film fabrication. This system consisted of a reaction chamber, an introduction chamber with sample load lock entry, a carbinet for gas manipulation controlling gas flow, a $CO_2$ laser and a Fourier transform mass spectrometer. Although the UHV-LCVD system construction was more sophisticated than low pressure CVD, highly pure thin films were fabricated by controlling gas mixing ratio and flow rate in ultra high vacuum surroundings.

• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.269-277
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• 1996

The vacuum systems of PLS linac provides average pressure of $2.6\times 10^{-6}$Pa under high power microwave of 54 MW peak with 4.1 $\mu \textrm s$ pulse width and 10 Hz repetition rates. The base pressure of system is$2.4\times 10^{-6}$Pa with 45$^{\circ}C$ cooling water. The outgassing rate of the system is decreased from $3.0\times 10^{-11}Torr-l/sec-\textrm{cm}^2$ at the initial stage after installation to $1\times 10^{-12}Torr-l/sec-\textrm{cm}^2$ at present. Total accumulated microwave energy dose is about 140 GJ per module. All ion pumps are working under saturated regime and effective pumping speeds of 60 I/s, 230 I/s ion pumps are 45 I/s, 65 I/s, 140 I/s under the operating range. Main problems occurred in recent year are troubles of ion pump controller and vacuum gauge controller, vacuum leak of energy doubler window and electron gun ceramic, and water leak in the dummy load of acceleraing columns. Total of 41 troubles with 140. 8 hours down time give good system availability of 98%. Down time can be reduced by high power waveguide valves and water dummy loads under development, and then availability is expected to be increased up to 99.5%.

• Korean Journal of Food Science and Technology
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• v.40 no.2
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• pp.178-183
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• 2008

This study investigated the effects of osmotic dehydration (OD) and vacuum impregnation (VI) on the quality of dried apple products. Weight reduction and water loss increased during OD, but these decreased in the apples during VI. In particular, VI's effect on increasing solid gain was superb. For apples in 40% sucrose solution, OD and VI were followed by hot-air drying at 50$^{\circ}C$. The experimental data were fitted successfully using the modified Page model. OD and VI increased drying time and decreased the drying rate constant of these apples as compared to the control. Shrinkage and rehydration capacity greatly decreased in the apples dried by OD and increased in the apples dried by VI as compared to the control. OD also decreased titratable acidity and ascorbic acid content considerably. Sensory evaluations of the products indicated that the apples prepared by OD had higher palatability in their rehydrated form in yoghurt, and the apple products prepared by VI had higher palatability in their dried form.

• Journal of the Korean Vacuum Society
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• v.12 no.1
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• pp.64-69
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• 2003

Using a high fewer electron beam gun (max. power 20 kW), Gadolinium (Gd, atomic number 64) metal was melted and the temperature distribution of melted surface was measured. With proper optical filters and the adjustment of aperture of lens, the radiation of melted surface was received by a ccd camera and its signal transferred to a computer. The real time monitoring of melted surface with a variation of electron beam Power was Possible and stable operation of electron beam was achieved. It was found that the max. temperature measured by a ccd camera with an assumption of blackbody radiation of melted Gd surface and adaption of Planet's law was above 100~$200^{\circ}C$ compared to that measured by a pyrometer in the same e-beam power.