• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.45-47
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• 2002

반도체 소자의 고집적화 및 고속화가 요구됨에 따라 MOSFET 구조의 게이트 절연막으로 사용되고 있는 SiO₂ 박막의 두께를 감소시키려는 노력이 이루어지고 있다. 0.1㎛ 이하의 소자를 위해서는 15Å 이하의 두께를 갖는 SiO₂가 요구된다. 하지만 두께감소는 절연체의 두께와 지수적인 관계가 있는 누설전류를 증가시킨다[1-3]. 따라서 같은 게이트 개패시턴스를 유지하면서 누설전류를 감소시키기 위해서는 높은 유전상수를 갖는 두꺼운 박막이 요구되는 것이다. 그러므로 약 25정도의 높은 유전상수를 갖고 5.2～7.8 eV 정도의 비교적 높은 bandgap을 갖으며, 실리콘과 열역학적으로 안정한 물질로 알려진 HfO2[4-5]가 최근 큰 관심을 끌고 있다. 본 연구에서는 HfO₂ 박막을 실제 소자에 적용하기 위하여 전극 및 열처리에 따른 HfO₂ 박막의 미세구조 및 전기적 특성에 관한 연구를 수행하였다. 이를 위해, HfO₂ 박막을 reactive DC magnetron sputtering 방법으로 증착하고, XRD, TEM, XPS를 사용하여 ZrO₂ 박막의 미세구조를 관찰하였으며, MOS 캐패시터 구조의 C-V 및 I-V 특성을 측정하여 HfO₂ 박막의 전기적 특성을 관찰하였다. HfO₂ 타겟을 스퍼터링하면 Ar 스퍼터링에 의해 에너지를 가진 산소가 기판에 스퍼터링되어 Si 기판과 반응하기 때문에 HfO₂ 박막 형성과 더불어 Si 기판이 산화된다[6]. 그래서 HfO₂같은 금속 산화물 타겟 대신에 순수 금속인 Hf 타겟을 사용하고 반응성 기체로 O₂를 유입시켜 타겟이나 시편위에서 high-k 산화물을 만들면 SiO/sub X/ 계면층을 제어할 수 있다. 이때 저유전율을 갖는 계면층은 증착과 열처리 과정에서 형성되고 특히 500℃ 이상에서 high-k/Si를 열처리하면 계면 SiO₂층은 증가하는 데, 이것은 산소가 HfO₂의 high-k 박막층을 뚫고 확산하여 Si 기판을 급속히 산화시키기 때문이다. 본 방법은 증착에 앞서 Si 표면을 희석된 HF를 이용해 자연 산화막과 오염원을 제거한 후 Hf 금속층과 HfO₂ 박막을 직류 스퍼터링으로 증착하였다. 우선 Hf 긍속층이 Ar 가스 만의 분위기에서 증착되고 난 후 공기중에 노출되지 않고 연속으로 Ar/O₂ 가스 혼합 분위기에서 반응 스퍼터링 방법으로 HfO₂를 형성하였다. 일반적으로 Si 기판의 표면 위에 자연적으로 생기는 비정질 자연 산화막의 두께는 10～15Å이다. 그러나 Hf을 증착한 후 단면 TEM으로 HfO₂/Si 계면을 관찰하면 자연 산화막이 Hf 환원으로 제거되기 때문에 비정질 SiO₂ 층은 관찰되지 않았다. 본 실험에서는 HfO2의 두께를 고정하고 Hf층의 두께를 변수로 한 게이트 stack의 물리적 특성을 살펴보았다. 선증착되는 Hf 금속층을 0, 10, 25Å의 두께 (TEM 기준으로 한 실제 물리적 두께) 로 증착시키고 미세구조를 관찰하였다. Fig. 1(a)에서 볼 수 있듯이 Hf 금속층의 두께가 0Å일때 13Å의 HfO₂를 반응성 스퍼터링 방법으로 증착하면 HfO₂와 Si 기판 사이에는 25Å의 계면층이 생기며, 이것은 Ar/O₂의 혼합 분위기에서의 스퍼터링으로 인한 Si-rich 산화막 또는 SiO₂ 박막일 것이다. Hf 금속층의 두께를 증가시키면 계면층의 성장은 억제되는데 25Å의 Hf 금속을 증착시키면 HfO₂ 계면층은 10Å미만으로 관찰된다. 그러므로 Hf 금속층이 충분히 얇으면 플라즈마내 산소 라디칼, 이온, 그리고 분자가 HfO₂ 층을 뚫고 Si 기판으로 확산되어 SiO₂의 계면층을 성장시키고 Hf 금속층이 두꺼우면 SiO/sub X/ 계면층을 환원시키면서 Si 기판으로의 산소의 확산은 막기 때문에 계면층의 성장은 억제된다. 따라서 HfO₂/Hf(Variable)/Si 계에서 HfO₂ 박막이 Si 기판위에 직접 증착되면, 순수 HfO₂ 박막의 두께보다 높은 CET값을 보이고 Hf 금속층의 두께를 증가시키면 CET는 급격하게 감소한다. 그러므로 HfO₂/Hf 박막의 유효 유전율은 단순 반응성 스퍼터링에 의해 형성된 HfO₂ 박막의 유전율보다 크다. Fig. 2에서 볼 수 있듯이 Hf 금속층이 너무 얇으면 계면층의 두께가 두꺼워 지고 Hf 금속층이 두꺼우면 HfO₂층의 물리적 두께가 두꺼워지므로 CET나 EOT 곡선은 U자 형태를 그린다. Fig. 3에서 Hf 10초 (THf=25Å) 에서 정전 용량이 최대가 되고 CET가 20Å 이상일 때는 high-k 두께를 제어해야 하지만 20Å 미만의 두께를 유지하려면 계면층의 두께를 제어해야 한다.

• Journal of the Korean Geotechnical Society
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• v.30 no.2
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• pp.53-64
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• 2014

This study sets it's face to define effects of the various loading periods in normal consolidation area on clay's compression and long-term consolidation characteristics through a laboratory test using homogeneous remolded clay. Moreover, by carrying out a long-term consolidation test which diversifies initial consolidation applicable to effective overburden loading in the various loading period. This study intended to suggest the method predicting the final settlement on the basis of loading periods by comparing and analyzing compression curve's characteristics according to loading weight of each stage and increase in loading period when carrying out the standard consolidation test. From the test results, the study shows that as of the soft clay's compression characteristics on the basis of various loading periods, preconsolidation load has a tendency to be decreased slightly as the loading period is getting more and more longer at each step after initial consolidation load puts on the remolded clay which is caused by secondary consolidation's increase in the latter part of each phase. And those effects have an weaker influence on compression index in normal consolidation area at the same time as secondary consolidation brought out quasi-overconsolidation and stabilization of clay's structure, have an influence re-compression index is increased in overconsolidation area on the other hand.

• The Korean Journal of Malacology
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• v.31 no.4
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• pp.307-314
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• 2015

This study sampled endangered species, Lamprotula coreana, and surveyed its habitat at the Guem River with three times from June to August 2013. To assess the habitat, this study conducted field survey considering diverse physical conditions of stream, such as pool, run and riffle, and measured transect, water depth, water velocity, substrate structure, and habitat type. When L. coreana collected, length, weight and age were measured. Water velocity, water depth and substrate structure were recorded to develop HSI (habitat suitability index) and performed PHABSIM (physical habitat simulation) to estimate the optimum flow discharge. Water level, flow discharge and transect data were used for habitat assessment, and PHABSIM was applied to calculate WUA (weighed usable area). Shell length was $73.1{\pm}18.4mm$ (28.5-102.0 mm), shell weight was $131.6{\pm}72.3g$ (28.0-281.0 g) and age was two to seven years from L. coreana collected at the upstream of the Guem River. Developed HSI indicated that the optimal habitat for L. coreana was 0.4-0.5 m for water depth, 0.3-0.5 m/s for water velocity and sand to boulder for substrate structure. The optimum ecological flow discharge for L. coreana was 2.1 cms and WUA was $3,730m^2$/1000 m by the result of PHABSIM. Recently, river construction work and habitat disturbance have caused negative impact on the distribution of L. coreana. The result of this study would provide fundamental data for habitat restoration and management of L. coreana.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.20
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• pp.152-162
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• 1975

Five barley varieties were compared under six 1evels of nitrogen fertilization and two methods of cultural management, conventional and drill seeding. The increase in grain yield and nitrogen content of the leaves showed a significant linear regression from added increaments of nitrogen in Haganemugi and Olbori, particulary under drill seeding. The other varieties resulted in various degrees of lodging and no significant increases in yield. The spike number per square meter was the major component of yield, but when the spike number per square meter was sufficient, 1000 grain weight was equally as important as a component of yield.

• Korean Journal of Ichthyology
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• v.11 no.2
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• pp.117-125
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• 1999

We investigated the reproductive cycles of two freshwater fishes, Moroco oxycephalus and M. lagowskii, in Korea. Seasonal changes in gonadosomatic index (GSI) and gonads were investigated histologically from April 1998 to April 1999. The reproductive cycles of two species were not shown any differences. The reproductive cycle can be divided into 5 phases : phase I (spent phase), phase II (immature phase), phase III (early developing phase), phase IV (late developing phase), and phase V (ripe phase). In phase I, the gonads of two species began to lose distinctly their weights from mid April, and reached the lowest GSI in late July (phase II). In September, the GSI values of testis and ovary increased very slowly (phase III) and gonadal developments rested during the winter season (phase IV). In March, the GSI values of M. oxycephalus and M. lagowskii began to increase, and reached the maximum in April (phase V). From the cyclic changes in the GSI and histological analyses, the spawning period was between mid April and mid May.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.10
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• pp.1029-1037
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• 2015

Recently, the importance of rotordynamic stability has been increased because of the tendency to employ ultra-high speeds in rotating machinery. In particular, the dynamic characteristics of gas bearings for high-speed rotating machinery need to be identified at various excitation frequencies to predict the rotor's behavior. In this study, we perform dynamic loading tests for gas-foil bearings (GFBs) to determine the bump foil structure and an air-film combined bump-foil structure for varying excitation frequencies. We calculate the dynamic characteristics from the measured force and displacement data. The air film is generated by a pressurized air supply. Based on the results, the stiffness coefficients of the bump structure and the air-film combined bump structure increased, while the damping coefficients decreased at increasing excitation frequencies. Further, the stiffness and damping coefficients of the air-film combined structure show lower values than those of the bump structure. Consequently, we identify the frequency-dependent dynamic characteristics of the bump structure and the effect of gas film on the dynamic characteristics of GFBs. Furthermore, to reveal the effectiveness of the proposed method, we perform experiments and discuss two methods of extracting the dynamic characteristics from the measured data.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.14 no.5
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• pp.103-109
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• 2014

This paper related with the CR-MMA which is possible to improving the equalization performance by applying the concept of constellation reduction in the MMA adaptive equalization alogorithm in order to reduce the intersymbol interference that is occurred in the nonlinear communication channel. In the updating process of MMA adaptive equalizer, the error signal is being obtained by using the equalizer output, and the performance will be degraded by the increase the error signal in the high order QAM constellation. But by using the constellation reduction, the high order QAM signal will be changed to the 4-QAM signal constellation and then the error signal will be obtained. By doing so, the error signal will be minimized and it is possible to improve the equalization performance in the high order QAM transmitted signal. The Computer simulation was performed in order to compare the performance of the proposed CR-MMA algorithm and original MMA algorithm in the same communication channel and noise environment. For this, the recoverd signal constellation which is the output of equalizer, residual isi and MD (Maximum Distortion) learning curve which is represents the convergence performance and SER which is represents the roburstness of noise were used. As a result of simulation, the CR-MMA has more superior to the MMA. And it was confirmed that the CR-MMA has roburstness to the noise in the SER performance.

• Journal of Wetlands Research
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• v.13 no.1
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• pp.105-116
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• 2011

Changes in climate have largely increased concentrated heavy rainfall, which in turn is causing enormous damages to humans and properties. Therefore, the exact relationship and the spatial variability analysis of hydrometeorological elements and characteristic factors is critical elements to reduce the uncertainty in rainfall -runoff model. In this study, radar rainfall grid resolution and grid resolution depending on the topographic factor in rainfall - runoff models were how to respond. In this study, semi-distribution of rainfall-runoff model using the model ModClark of Inje, Gangwon Naerin watershed was used as Gwangdeok RADAR data. The completed ModClark model was calibrated for use DEM of cell size of 30m, 150m, 250m, 350m was chosen for the application, and runoff simulated by the RADAR rainfall data of 500m, 1km, 2km, 5km, 10km from 14 to 17 on July, 2006. According to the resolution of each grid, in order to compare simulation results, the runoff hydrograph has been made and the runoff has also been simulated. As a result, it was highly runoff simulation if the cell size is DEM 30m~150m, RADAR rainfall 500m~2km for peak flow and runoff volume. In the statistical analysis results, if every DEM cell size are 500m and if RADAR rainfall cell size is 30m, relevance of model was higher. Result of sensitivity assessment, high index DEM give effect to result of distributed model. Recently, rainfall -runoff analysis is used lumped model to distributed model. So, this study is expected to make use of the efficiently decision criteria for configurated models.

• Weed & Turfgrass Science
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• v.6 no.2
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• pp.124-129
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• 2017

The Experiments were conducted by moderate season culture of each of early, medium and late maturing varieties which were considered to be of strong salt tolerance in low and high salty reclaimed areas (0.2% at the May). This study was carried out to investigate the proper nitrogen fertilizer level and seeding rates at reclaimed saline land in Korea. The proper seeding rates were $40kg\;ha^{-1}$ in 0.2% saline land. The dry matter production of barnyard millet was possibly estimated by exponential functions of $Y=0.0098X^2+0.7030X+2.6267$. Effects of nitrogen rate on agronomic characteristics, forage yield, and chemical composition of barnyard millet to reclaimed tidal land are summarized as follows: The proper nitrogen fertilizer level was $200kg\;ha^{-1}$ in 0.2% saline land. N was absorbed actively before the emergence of the barnyard millet but showed relative decrease thereafter. The early growth of the barnyard millet was inhibited, resulting in the favorable late growth, increased panicle weight and ratio of matured grain. These results suggest that barnyard millet is the most forage crops for cultivation on reclaimed tideland in view of the good emergence and forage production.

• Applied Chemistry for Engineering
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• v.17 no.1
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• pp.16-21
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• 2006

In this study, PEO blend fibers mixed with polyaniline (PANI)/10-camphor sulfonic acid (CSA) and PANI/dodecylbenzene sulfonic acid (DBSA) were electro spun to investigate the influence of PANI content. CSA and DBSA were used as a functionalized doping acid having a bulky volume. PANI/PEO blend solution was prepared by dissolving PEO and PANI doped with CSA or DBSA. The thermal properties were measured by thermogravimetric analyzer (TGA). As a result, with increasing of the PANI content in PANI/CSA and PANI/DBSA, although initial decomposition temperature (IDT) was decreased, thermal stability was increased due to the increase of $A^*{\cdot}K^*$ and integral procedural decomposition temperature (IPDT). The electrical conductivities measured by the 4-probe method. The electric conductivity was increased with increasing of PANI content in PANI/CSA and PANI/DBSA. However, electrical conductivity did not change significantly beyond 30% content of PANI. From CV results, PANI/CSA showed the better defined peak shpae and higher peak current density compared to PANI/DBSA. This was probably related to the slightly higher electrical conductivity or better morphology for easy charge transfer in the case of PANI/CSA.