• Electrical & Electronic Materials
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• v.30 no.1
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• pp.22-29
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• 2017

• Ceramist
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• v.20 no.1
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• pp.32-38
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• 2017

• Electrical & Electronic Materials
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• v.24 no.10
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• pp.37-46
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• 2011

• Proceedings of the Korean Vacuum Society Conference
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• 2006.08a
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• pp.61-61
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• 2006

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.21.2-21.2
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• 2005

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.26.1-26.1
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• 2005

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.151.2-151.2
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• 2005

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.12
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• pp.957-962
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• 2014

We present a method to quantitatively measure the thermal conductivity of one-dimensional nanostructures by utilizing scanning thermal wave microscopy (STWM) at a nanoscale spatial resolution. In this paper, we explain the principle for measuring the thermal diffusivity of one-dimensional nanostructures using STWM and the theoretical analysis procedure for quantifying the thermal diffusivity. The SWTM measurement method obtains the thermal conductivity by measuring the thermal diffusivity, which has only a phase lag relative to the distance corresponding to the transferred thermal wave. It is not affected by the thermal contact resistances between the heat source and nanostructure and between the nanostructure and probe. Thus, the heat flux applied to the nanostructure is accurately obtained. The proposed method provides a very simple and quantitative measurement relative to conventional measurement techniques.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.11
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• pp.4095-4099
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• 2010

Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.128-128
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• 2004

나노 스케일의 구조물 제작에 있어서 기존의 리소그래피 공정들이 가지는 한계점을 극복하기 위해서 다양한 방식의 새로운 공정들이 개발되고 있다. 특히, 기계-화학적 가공공정을 이용한 미세탐침 기반의 나노리소그래피 기술(Mechano-Chemical Scaning Probe based Lithography; MC-SPL)은 기존의 포토리소그래피 공정의 단점을 극복하고, 보다 경제적이며 패턴 디자인 변경이 유연한 미세 패턴 제작 기술임이 확인되었다.(중략)