• Journal of the KSME
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• v.53 no.9
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• pp.46-49
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• 2013

평형점 주사탐침열현미경(Null Point Scanning Thermal Microscope)은 전통적 주사탐침열현미경의 문제점들을 해결한 이상적인 방법에 가깝다. 하지만 이를 높은 공간해상도로 구현하기 위해서는 고감도의 탐침이 필요하다.

• 전기의세계
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• v.42 no.9
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• pp.6-11
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• 1993

미소탐침을 STM과 같이 PZT등의 압전액튜에이터로 대상물을 2차원 또는 2.5차원 주사해서 그 정전량을 화상화하는 주사형 정전용량 현미경(SCaM)의 개발에 대해서 기술했다. 광학현미경과 레이저현미경은 빛을 이용하기 때문에 파장의 제약을 받아 그 분해능의 한계는 0.3[.nu.m]정도이다. 이것에 대해 SCaM은 광학방식가 같은 분해능의 원리적 한계가 없고, 또한 광학상과는 다른 유전율상의 특성화상이 얻어진다. 이와같은 특징에 의해, 최종적으로 0.01[.mu.m]레벨의 분해능을 얻을 수 있는 실용레벨의 현미경을 시험제작함을 목적으로 하고 있다. 본 연구에서는 탐침과 시료표면간의 거리를 진동에 의해 미소로 변화시켰을 때의 정전용량의 변화를 포착하는 미분용량법을 이용했으며, 탐침높이 및 주사시에 있어서의 검출기 출력의 재현성, 즉 신호 검출방식으로서의 S/N이 양호한 동기검파를 이용했을 대해서 실험적 검토를 하였다. 이와같은 검파방식에 의해 잡음, 히스테리시스 등의 영향에 대해 개선이 되고, 분해능도 향상되었다. 더욱이 2.5차원 탐침 주사방식 미분용량형 정전용량 현미경에 의해 칼날 부분 선단부의 확대화상이 명료하게 얻어졌다. 그러나 실용적으로는 아직 불충분하다.

• Proceedings of the Optical Society of Korea Conference
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• 2003.07a
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• pp.302-303
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• 2003

원자간력-현미경(Atomic Force Microscope)은 비파괴적인 방법으로 광소자의 단면 형상과 거칠기에 관한 정보를 원자단위의 해상도로 얻어낼 수 있다. 그러나 탐침의 형상에 의해서 공간분해능에 제한을 받는다. 이 문제를 해결하기 위해, 원자간력-현미경 탐침의 끝부분에 나노튜브를 부착하였다. 주사형 전자현미경에 설치한 나노조작기를 사용하여 나노튜브를 탐침에 밀착하도록 이동시킨 후에, 탄화물 증착으로 접착시키는 방법을 사용하였다.

• 한국전자현미경학회:학술대회논문집
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• 2004.05a
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• pp.43-47
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• 2004

• Journal of the Korean Vacuum Society
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• v.12 no.2
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• pp.144-149
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• 2003

Carbon tips were grown on Si cantilevers by applying an electron beam to them directly with Scanning Electron Microscope. A carbon tip was fabricated by aligning the electron beam directly down the vertical axis of Si cantilever and then irradiating a single spot on the cantilever for a proper time in the dominant atmosphere of residual gases generated by the oil of the diffusion pump. A number of control parameters for SEM, including exposure time, acceleration voltage, emission current, and beam probe current, were allowed to make various aspect ratio feature. The growth of carbon tips was not affected by the surface morphology of substrates. We could acquired the tip whose effective length is 0.5 $\mu\textrm{m}$, bottom diameter is 90 nm and cone half angle $3.5^{\circ}$ The growth technique of the high aspect ratio carbon tips on the tip-free cantilevers is available to reduce the complexities of fabricating sub-micron scale tips on the PZT thin film actuator integrated AFM cantilevers.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.11 s.242
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• pp.1503-1508
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• 2005

Scanning Thermal Microscope (STU) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available STU probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 m. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 m and the distance of the junction from the very end of the tip is 150 m. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.

• Ceramist
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• v.5 no.2
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• pp.8-16
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• 2002

• Journal of the Korean Electrochemical Society
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• v.9 no.2
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• pp.84-88
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• 2006

The effects of tip voltage, deflection setpoint, and tip velocity on height of $SiO_2$ line drawn by local anodization on Si wafer using scanning probe microscope were investigated. No local anodization was detected at smaller than -3 V of tip voltage. The line height increased at rate of 0.47 nm/V when the tip voltage is stronger than -3 V at $1{\mu}m/s$ tip velocity. From deflection setpoint, mechanical force between tip and substrate could be calculated and the threshold farce was $12\sim18nN$. The height of anodized $SiO_2$ lines is independent of the magnitude of force above the threshold force. The line height decreased as increasing the tip velocity and limited to 0.7 nm at -5 V tip voltage.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.10
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• pp.800-809
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• 2008

Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full $SiO_2$ SThM probes have much higher sensitivity than that of previous ones.

• Journal of the KSME
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• v.46 no.7 s.308
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• pp.53-56
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• 2006