Thermal Design and Batch Fabrication of Full SiO2 SThM Probes for Sensitivity Improvement |
Jaung, Seung-Pil
(고려대학교 대학원 기계공학과)
Kim, Kyeong-Tae (고려대학교 대학원 기계공학과) Won, Jong-Bo (고려대학교 대학원 기계공학과) Kwon, Oh-Myoung (고려대학교 기계공학과) Park, Seung-Ho (홍익대학교 기계시스템디자인학과) Choi, Young-Ki (중앙대학교 기계공학과) Lee, Joon-Sik (서울대학교 기계항공공학부) |
1 | Majumdar, A., 1999, "Scanning Thermal Microscopy,” Annu. Rev. Mater. Sci., Vol. 29, pp. 505-585 DOI |
2 | Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Ohmyoung Kwon, Seung Ho Park Young Ki Choi, and Arun Majumdar, 2006, "Novel nanoscale thermal property imaging technique: The 2method. I. Principle and the 2 signal measurement,” J. Vac. Sci. Technoi. B, Vol. 24, No. 5, pp. 2398-2404 DOI ScienceOn |
3 | Kim, S. U., B. Lee, Kim, K., Kim, J. H., Lee, S. K., Kwon, O., Lim, K. S. and Lee, J. S., 2007, "Thermal Conductivity Measurement for Diamond Thin Film using Modified 3 Method," The Eighteenth International Symposium on Transport Phenomena, Daejeon, KOREA |
4 | Li Shi, and A. Majumdar, 2002, "Thermal Transport Mechanisms at Nanoscale Point Contacts," J. Heat Transfer, Vol. 124, No. 2, pp. 329-337 DOI ScienceOn |
5 | Rohsenow, W., and Choi, H., 1961, Heat, Mass, and Momentum Transfer, Prentice-Hall, Englewood Cliffs, NJ |
6 | Roark, R. J., and Young, W. C., Roark's Formulas for Stress and Strain, McGraw-Hill, NY., 1989 |
7 | Marcus, R. B., Ravi, T. S., Gmitter, Chin, T., Liu, K., D. Orvis, W. J., Ciarlo, D. R., Hunt, C. E. and Trujillo, J., 1990, "Formation of silicon tips with $<$1 nm radius," Appl. Phys. Lett. Vol. 56, No. 3, pp. 236-238 DOI |
8 | Albercht, T. R., Akamine, S., Carver, T. E. and Quate, C. F., 1990, "Microfabrication of cantilever styli for the atomic force microscope," J. Vac. Sci. Technol. A, Vol 8, No.4, pp. 3386-3396 DOI |
9 | Hee Hwan Roh, Joon Sik Lee, Dong Lib Kim, Jisang Park, Kyeongtae Kim, Ohmyoung Kwon, Seung Ho Park Young Ki Choi, and Arun Majumdar, 2006, "Novel nanoscale thermal property imaging technique: The 2 method. II. Demonstration and comparison," J. Vac. Sci. Technoi. B, Vol. 24, No. 5, pp. 2405-2411 DOI ScienceOn |
10 | Osamu Tabata, Ryouji Ashi, Hirofumi Funabashi, Keiichi Shimaoka and Susumu Sugyama, 1992, "Anisotropic etching of silicon in TMAH ," Sensors and Actuators A, Vol. 34, pp. 51-57 DOI ScienceOn |
11 | Li Shi, Ohmyoung Kwon, Andrew C. Miner, and A. Majumdar, 2001, "Design and Batch Fabrication of Probes for sub-100 nm Scanning Thermal Microscopy," J. MEMS, Vol. 10, No. 3, pp. 370-378 DOI ScienceOn |
12 | Albert Folch, Mark S. Wrighton, and Martin A. Schmidt, 1997, "Microfabrication of Oxidation-Sharpened Silicon Tips on Silicon Nitride Cantilever for Atomic Force Microscopy," J. MEMS, Vol. 6, No. 4, pp. 303-306 DOI ScienceOn |