Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Thermal Design and Batch Fabrication of Full SiO2 SThM Probes for Sensitivity Improvement

주사탐침열현미경의 감도향상을 위한 전체 실리콘 산화막 열전탐침의 열적설계 및 일괄제작

  • 정승필 (고려대학교 대학원 기계공학과) ;
  • 김경태 (고려대학교 대학원 기계공학과) ;
  • 원종보 (고려대학교 대학원 기계공학과) ;
  • 권오명 (고려대학교 기계공학과) ;
  • 박승호 (홍익대학교 기계시스템디자인학과) ;
  • 최영기 (중앙대학교 기계공학과) ;
  • 이준식 (서울대학교 기계항공공학부)
  • Published : 2008.10.01
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Abstract

Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full $SiO_2$ SThM probes have much higher sensitivity than that of previous ones.

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References

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