Browse > Article
http://dx.doi.org/10.3795/KSME-A.2005.29.11.1503

High Performance Thermoelectric Scanning Thermal Microscopy Probe Fabrication  

Kim, Donglip (고려대학교 기계공학과)
Kim, Kyeongtae (고려대학교 기계공학과)
Kwon, Ohmyoung (고려대학교 기계공학과)
Park, Seungho (홍익대학교 기계 시스템 디자인 공학부)
Choi, Young Ki (중앙대학교 기계공학과)
Lee, Joon Sik (서울대학교 기계 항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.29, no.11, 2005 , pp. 1503-1508 More about this Journal
Abstract
Scanning Thermal Microscope (STU) has been known for its superior resolution for local temperature and thermal property measurement. However, commercially available STU probe which is the key component of SThM does not provide resolution enough to explore nanoscale thermal phenomena. Here, we developed a SThM probe fabrication process that can achieve spatial resolution around 50 m. The batch-fabricated probe has a thermocouple junction located at the end of the tip. The size of the thermocouple junction is around 200 m and the distance of the junction from the very end of the tip is 150 m. The probe is currently being used for nanoscale thermal probing of nano-material and nano device.
Keywords
Scanning Thermal Microscope: SThM; Thermo-resistive probe; Thermoelectric probe;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Majumdar, A., 1999, 'Scanning Thermal Microscopy,' Annual Review of Material Science, Vol. 29, pp. 505-585   DOI
2 Shi, L., O. Kwon, Miner, A. C. and Majumdar, A., 2001, 'Design and Batch Fabrication of Probes for Sub-100 nm Scanning Thermal Microscopy,' , Journal of MEMS, Vol. 10, No. 3, pp. 370-378   DOI   ScienceOn
3 Sang Hoon Lee, Seung Seop Lee, Jong Up Jeon, Gwang Choon Rho, 2003, 'A study on fabrication of ZnO Piezoelectric Cantilever with High Aspect Ratio Nanotip,' The 5th Korean MEMS Conference, Jeju island, Korea, May15-17, pp. 290-295
4 Hee Hwan Roh et al., 2004, 'Development of Nanoscale Thermal Property Measurement Technique Using AC Heating and Temperature Monitoring of Nano Thermocouple Junction of Scanning Thermal Microscope Probe,' Proceeding of the 13th KIEE MEMS Symposium, Vol. 7, No. 1, pp. 29-35
5 Shi, L. and Majumdar, A., 2002, 'Thermal Transport Mechanisms at Nanoscale Point Contacts,' .Journal of Heat Transfer, Vol. 124, pp. 329-337   DOI   ScienceOn
6 Chang Soo Lee, Jae Joon Choi, Dong Gi Min, Dong Ryeol Jeon, Jong Up Jeon, 2001, ' Development of Capacitance Probe Array for Ultra-small Large-Capacity Storage System,' The 3rd Korean MEMS Conference, pp. 239-247
7 Hammiche, A., Reading, M., Pollock, H. M., Song, M. and Hourston, D. J., 1996, 'Localized Thermal Aanalysis Using a Miniaturized Resistive Probe,' Rev. Sci. Instrum, Vol. 67, No. 12 pp. 4268-4274   DOI   ScienceOn