High Performance Thermoelectric Scanning Thermal Microscopy Probe Fabrication
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Kim, Donglip
(고려대학교 기계공학과)
Kim, Kyeongtae (고려대학교 기계공학과) Kwon, Ohmyoung (고려대학교 기계공학과) Park, Seungho (홍익대학교 기계 시스템 디자인 공학부) Choi, Young Ki (중앙대학교 기계공학과) Lee, Joon Sik (서울대학교 기계 항공공학부) |
1 | Majumdar, A., 1999, 'Scanning Thermal Microscopy,' Annual Review of Material Science, Vol. 29, pp. 505-585 DOI |
2 | Shi, L., O. Kwon, Miner, A. C. and Majumdar, A., 2001, 'Design and Batch Fabrication of Probes for Sub-100 nm Scanning Thermal Microscopy,' , Journal of MEMS, Vol. 10, No. 3, pp. 370-378 DOI ScienceOn |
3 | Sang Hoon Lee, Seung Seop Lee, Jong Up Jeon, Gwang Choon Rho, 2003, 'A study on fabrication of ZnO Piezoelectric Cantilever with High Aspect Ratio Nanotip,' The 5th Korean MEMS Conference, Jeju island, Korea, May15-17, pp. 290-295 |
4 | Hee Hwan Roh et al., 2004, 'Development of Nanoscale Thermal Property Measurement Technique Using AC Heating and Temperature Monitoring of Nano Thermocouple Junction of Scanning Thermal Microscope Probe,' Proceeding of the 13th KIEE MEMS Symposium, Vol. 7, No. 1, pp. 29-35 |
5 | Shi, L. and Majumdar, A., 2002, 'Thermal Transport Mechanisms at Nanoscale Point Contacts,' .Journal of Heat Transfer, Vol. 124, pp. 329-337 DOI ScienceOn |
6 | Chang Soo Lee, Jae Joon Choi, Dong Gi Min, Dong Ryeol Jeon, Jong Up Jeon, 2001, ' Development of Capacitance Probe Array for Ultra-small Large-Capacity Storage System,' The 3rd Korean MEMS Conference, pp. 239-247 |
7 | Hammiche, A., Reading, M., Pollock, H. M., Song, M. and Hourston, D. J., 1996, 'Localized Thermal Aanalysis Using a Miniaturized Resistive Probe,' Rev. Sci. Instrum, Vol. 67, No. 12 pp. 4268-4274 DOI ScienceOn |
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