• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.22-26
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• 2016

Extreme ultraviolet (EUV) pellicle is one of the most concerned research in the field of EUV lithography (EUVL). Imaging performance of EUV mask with pellicle should be investigated prior to high volume manufacturing (HVM) of EUVL. In this paper, we analyzed the relationship between standoff distance and imaging performance of EUV mask to verify the influences of relative standoff distance on imaging performance. As a result, standoff distance of EUV pellicle has no effect on imaging performance of EUV mask such as critical dimension (CD), normalized image log slope (NILS) and image contrast. Therefore, pellicle support structure can be flexibly designed and modified in diverse ways to complement the thermal limitation of EUV pellicle membrane.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.6-11
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• 2016

For high volume manufacturing using extreme ultraviolet (EUV) lithography, mask protection from contamination during lithography process must be solved, and EUV pellicle is the strongest solution. Based on the technical requirements of EUV pellicle, EUV pellicle should have large membrane area ($110{\times}140mm^2$) with film transmittance over 90% and mechanical stability. Even though pellicle that satisfies size standard with high transmittance has been reported, its mechanical stability has not been confirmed, nor is there a standard to evaluate the mechanical stability. In this study, we suggest a rather simple method evaluating mechanical stability of pellicle membrane using spin-coater which can emulate the linear accelerated motion. The test conditions were designed by simulating the acceleration distribution inside pellicle membrane through correlating the linear acceleration and centripetal acceleration, which occurs during linear movement and rotation movement, respectively. By these simulation results, we confirmed the possibility of using spin-coater to evaluate the mechanical stability of EUV pellicle.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.17-21
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• 2016

EUV (Extreme Ultraviolet) pellicle which protects a mask from contamination became a critical issue for the application of EUV lithography to high-volume manufacturing. However, researches of EUV pellicle are still delayed due to no typical manufacturing methods for large-scale EUV pellicle. In this study, EUV pellicle membrane manufacturing method using not only KOH (potassium hydroxide) wet etching process but also a water bath was suggested for uniform etchant temperature distribution. KOH wet etching rates according to KOH solution concentration and solution temperature were confirmed and proper etch condition was selected. After KOH wet etching condition was set, $5cm{\times}5cm$ SiNx (silicon nitride) pellicle membrane with 80% EUV transmittance was successfully manufactured. Transmittance results showed the feasibility of wet etching method with water bath as a large-scale EUV pellicle manufacturing method.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.10
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• pp.465-472
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• 2002

This paper presents a study on the aging and recovery of HTV (high temperature vulcanized) silicone rubber used for outdoor insulators. UV irradiation, corona discharge and water immersion were employed as factors of the artificial aging. The effects of changes derived from these stresses on the tracking and arc resistance of silicone rubber were examined. We have investigated the aging phenomena of HTV silicone rubber by the above stresses using the surface energy calculation with contact angle measurement, solvent-extraction, and surface/volume resistivity and so on. These results showed that UV irradiation and corona discharge lead to nearly the same surface oxidation, but the percentage change of mobile low molecular weight by these stresses was different. Furthermore, the oxidized layer induced under UV irradiation restricted the recovery of hydrophobic surface. Water immersion little lowered hydrophobicity level and leaded to a loss of tracking and arc resistance. The degradation mechanism based on our results was discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.119-122
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• 2000

Recently polymer insulators are being used for outdoor high voltage applications. Polymer insulators for transmission line have significant advantages over porcelain and glass insulators, especially for ultra-high voltage transmission lines. Their advantages are light weight, vandalism resistance and hydrophobicity. Polymer insulators are a relatively new technology, but their expected life is still unknown. Therefore these estimating technique are very important. Their life time is related to weathering and operating condition. Multi-aging test is requested because aging factor is occurred by multi-aging than unique aging. The aging test about polymer insulators have mainly carried out by IEC 61109. This paper presents multi-stress chamber experiments and tracking wheel test to examine the tracking and erosion performance of polymer insulator for transmission. Multi-stress testing is able to demonstrate deficiencies of polymer insulator materials and designs, including the nature of interfaces in insulation design. We have investigated IEC 61109 Annex C (5000h aging test) and CEA tracking wheel test as test methods of artificial accelerated aging. The aging degree of polymer insulator is estimated by leakage current, measurement of hydrophobicity degree, damage conditions of insulator surface, withstand voltage test etc.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05b
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• pp.120-124
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• 2004

The protection performance and energy absorption capability are important for both MOAs for distribution lines and MOAs for high voltage systems, therefore the manufacturing technique of ZnO varistor elements with high ability against surge impacts is great important for high voltage systems. But until now ZnO varistors for low voltage class have been developed in Korea, ZnO varistors with the rate discharge current of 5, 10kA class for high voltage systems depend on an import from advanced countries, such as Japan or U.S.A, which have developed its in the late 1980s. So in the aspect of taking independent technique the development of ZnO varistors with the rate discharge current of 5, 10kA class for high voltage systems is important. In this research project ZnO varistor elements with diameters of 35mm and 70mm for the rate discharge current of 5, 10kA class for high voltage systems are manufactured, then various chemical composition and processing variables affected the electrical and the physical characteristics of these ZnO varistors are investigated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05b
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• pp.15-18
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• 2004

피뢰기에 뇌 또는 이상전압과 같은 정격이상의 고장전류가 유입되어 발생하게 되는 순간적인 열 충격과 내부압력 상승은 폭탄이 내부에서 터지는 것과 같은 엄청난 양의 충격에너지이다. 본 연구에 있어서 폴리머 피뢰기의 제조에 사용된 모듈용 브레이드 복합재료는 압력해소 및 폭발 비산하지 않도록 하는 기능을 수행하도록 설계되어있다. 기존의 폴리머 피뢰기에 적용된 복합재료보다 충격에너지를 흡수하는 구조물에 유리한 브레이드 복합재료를 피뢰기 모듈의 제조에 도입한 것은 매우 의미 있는 일이라 판단된다. 따라서 본 연구에서는 열경화성 브레이드 복합재료를 제조하기 위하여 프리폼을 먼저 제작한 다음 금형에 삽입한 후 진공상태에서 수지를 주입하여 경화시키는 RTM공법을 이용하였다. 본 연구의 목적은 브레이드 패턴 및 방압개소 설계 등의 기초적인 자료조사 및 실험을 통하여 폴리머 피뢰기의 폭발 비산을 방지할 수 있는 압력해소 성능을 위한 기초 자료를 확보하고자 하는 것이다. 브레이드 복합재료의 기본적인 경화거동을 등온 및 동적 DSC를 이용하여 고찰하였고, 기본적인 전기적 특성을 평가하였으며, 방압개소를 가진 폴리머 피뢰기 모듈의 고장전류시험시 예상되는 열 충격에 대한 성능을 검증하기 위하여 열팽창계수를 측정하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.05b
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• pp.125-129
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• 2004

The mold transformers have been widely used in underground substations in large building and have some advantages in comparison to oil-transformer, that is low fire risk, excellent environmental compatibility, compact size and high reliability. In addition, the application of mold transformer for outdoor is possible due to development of epoxy resin. The mold transformer generally has cooling duct between low voltage coil and high voltage coil. A mold transformer made by one body molding method has been developed for small size and low loss, but it needs some cooling method because heat radiation between each winding is difficult. The life of transformer is significantly dependent on the thermal behavior in windings. Many transformer designers have calculated temperature distribution and hot spot point by FEM(finite element method) to analyze winding temperature rise. In this paper, the temperature distribution and thermal stress analysis of 100kVA pole cast resin transformer for power distribution are investigated by FEM program.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.6
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• pp.555-560
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• 2007

This paper describes the results of a study on the sealing integrity of polymer housed surge arrester based on the thermal mechanical test. The polymer housed surge arrester employs silicone insulating materials for its housing, instead of the conventional porcelain housing. The polymer housed surge arresters exhibited the highest sealing integrity because it is not air volume between the FRP(fiber reinforced plastics) module and the silicone housing. In accordance, the sealing integrity of station class surge arresters is investigated with moisture ingress test. And, the influence of sealing integrity was evaluated through such as measurement of the deflection, reference voltage, leakage current. In electrical characteristics, reference voltage decreased in the range of $16.45{\sim}16.15\;kV$ with after thermal mechanical test. In contrary, despite the continued moisture ingress, the polymer housed surge arresters exhibited almost the same leakage current value and the resistive leakage current has risen slightly. As a results, It was thought that the polymer housed surge arresters shows good stability with sealing integrity.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.233-236
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• 2004

Recently, the polymer insulators that are used for high voltage applications have some advantages such as light weight, small size, vandalism resistance, hydrophobicity and easy making process. During outdoor service of polymer insulators, the surface of the insulating material is frequently subjected to moisture and contamination that lead to dry band arcing. Their tracking resistance, erosion resistance, end sealing and shed design are very important because dry band arcing causes degradation of polymer surface. The shape design of porcelain insulator is formalized but design standard for polymer insulator is no standardized up to now, much research is necessary in real condition. In this paper, the surface and tracking properties of polymer suspension insulator for power transmission is investigated with ICP-AES, SEM, EDX, tracking wheel test and flashover voltage test. The diagnosis of insulator sample in tracking test hass been analyzed by leakage current STRI Guide and thermal image.