• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.91.2-91.2
• /
• 2016

반도체 및 디스플레이 등과 같은 전자산업분야에 플라즈마를 이용한 생산공정이 폭넓게 활용됨에 따라서 공정 결과를 예측하고 조절할 수 있는 플라즈마 변수 측정 및 진단기술의 중요성은 더욱 증가되고 있다. 플라즈마 진단을 위해 가장 많이 사용되고 있는 량뮤어 탐침(Langmuir Probe)은 수십 볼트(V)의 전압을 탐침에 인가하여 들어오는 전류(I)를 측정한 I-V curve의 해석을 바탕으로 플라즈마 변수들(전자밀도, 전자온도, 플라즈마 전위, ${\cdots}$)을 측정하는 방법으로 탐침에 인가한 전압으로 인하여 플라즈마가 영향을 받고 이로인하여 공정 결과에 변화를 줄 수 있다. 또한, 증착공정과 같이 공정과정 중에 탐침의 증착으로 인해 탐침으로 들어와야하는 전자 및 이온의 양이 감소하여 측정에 오차가 발생할 수 있어 공정 플라즈마 진단에 적합하지 않다. 따라서 공정 플라즈마의 정확한 측정을 위해서는 플라즈마에 대한 영향을 최소화하고 증착으로 인하여 탐침이 오염 되는 환경에서도 플라즈마 변수를 정확히 측정할 수 있는 진단 장치가 요구된다. 마이크로웨이브를 이용한 진단장치들은 1 mW 이하의 매우 작은 파워를 사용하기 때문에 플라즈마에 영향을 최소화하여 보다 정확한 플라즈마 진단이 가능하다. 또, 유전체 투과특성이 있는 마이크로웨이브를 이용하기 때문에 탐침이 유전체로 증착되었다 하더라도 측정에는 문제가 없어 공정 플라즈마 진단에 용이하다. 이런 장점들로 인하여 헤어핀 탐침(Hairpin probe), 컷오프 탐침(cutoff probe), 임피던스 탐침(Impedance probe) 등과 같이 마이크로웨이브를 이용하여 다양한 형태의 진단 장치들이 개발되었다. 본 발표에서는 마이크로웨이브를 이용한 다양한 형태의 진단 장치들을 소개하고 각각이 가지는 장단점을 정리하여 각 진단장치들이 측정이 적합한 영역을 소개할 예정이다.

• Journal of the Korean Geotechnical Society
• /
• v.15 no.6
• /
• pp.251-262
• /
• 1999

The assemblage of the trapezoidal segments, which is being used increasingly to shield tunnelling, with Guide rod and Dowel forms tunnel lining. In this case the larger the taper angle of trapezoidal segment is, the easier the assembly work becomes. The large angle can reduce the water proof material's phenomenon of being pushed back, but decreases the structural safety in connecting section of tunnel lining. In this paper a 3-dimensional numerical analysis was performed to estimate the exact behavior of a model shield tunnel made by connecting 3-dimensionally various accessories with irregular sectioned segments. We obtained the operating force of connecting section according to the change of taper angle of trapezoidal segment and sought for improved scheme for connecting section by comparing and analyzing the test results on the friction resistance force of connecting parts.

• The Korean Journal of Applied Statistics
• /
• v.28 no.3
• /
• pp.485-494
• /
• 2015

Canonical correspondence analysis is an ordination method used to visualize the relationships among sites, species and environmental variables. However, projection results are fluctuations if the samples slightly change and consistent interpretation on ecological similarity among species tends to be difficult. We use the bootstrap methods for canonical correspondence analysis to solve this problem. The bootstrap method results show that the variations of coordinate points are inversely proportional to the number of observations and coverage rates with bootstrap confidence interval approximates to nominal probabilities.

• Proceedings of the KIEE Conference
• /
• 2006.07a
• /
• pp.143-144
• /
• 2006

The recent power systems are very complex and to model them completely is impractical for analysis of electromagnetic transient Therefore areas outside the immediate area of interest must be represented by some form of Frequency Dependent Network Equivalent (FDNE). In this paper a method for developing Frequency Dependent Network Equivalent (FDNE) using S-domain rational Function Fitting is presented and demonstrated. The FDNE is generated by Linearized Least Squares Fitting(LSF) of the frequency response of a S-domain formulation. This Three-port FDNE have been applied to the test AC power system. The electromagnetic transient package PSCAD/EMTDC is used to assess the transient response of the Three-port FDNE developed under different condition. The study results have indicated the robustness and accuracy of Three-port FDNE for analisys of electromagnetic transient and harmonic assessment.

• Proceedings of the KIEE Conference
• /
• 2006.07a
• /
• pp.145-146
• /
• 2006

The recent power systems are very complex and to model them completely is impractical for analysis of electromagnetic transient. Therefore areas outside the immediate area of interest must be represented by some form of Frequency Dependent Network Equivalent (FDNE). In this paper a method for developing Frequency Dependent Network Equivalent (FDNE) using Z-domain rational Function Fitting is presented and demonstrated. The FDNE is generated by Linearized Least Squares Fitting(LSF) of the frequency response of a Z-domain formulation. This Three-port FDNE have been applied to the test AC power system. The electromagnetic transient package PSCAD/EMTDC is used to assess the transient response of the Three-port FDNE developed under different condition. The study results have indicated the robustness and accuracy of Three-port FDNE for analisys of electromagnetic transient and harmonic assessment.

• Journal of the Korean Solar Energy Society
• /
• v.34 no.4
• /
• pp.111-122
• /
• 2014

The purpose of this study is to understand daily variation of short-wave radiation trends according to the state of surface and observation of atmosphere conditions in downtown and suburban observation area. The followings are main results from this study. 1) We found out daily air temperature variation of downtown is less than that of suburban area because of bigger heat capacity of artificial elements such as massive buildings and pavements. 2) It is more effective to estimate of air condition by water vapor pressure than relative humidity in the atmosphere. 3) The difference of solar radiation ratio between downtown and suburban area is dependant on different atmosphere conditions at two observation stations.

• Journal of Korean Association for Spatial Structures
• /
• v.17 no.4
• /
• pp.167-174
• /
• 2017

The F3D(Free-Form Formwork 3D Printer) technology that manufactures EPS(Expanded Polystyrene) formworks for irregular-shaped concrete structures by 3D printers was developed to reduce the cost and time. Because of weak strength and low elastic modulus of the EPS, structural performance including lateral pressure by fresh concrete of the formwork that consisted of EPS should be investigated. In order to calculate lateral pressures acting on formwork, several variables including sizes, shapes of formwork, tangential force(fricition) between fresh concrete and formwork, and material properties of fresh concrete should be considered. However, current regulations have not considered the properties of concrete, only focused on vertical formwork. Galleo introduced 3-dimensional finite element analysis models to calculate lateral pressure on formwork. Thus, proposed finite element analysis model based on previous studies were verified for vertical formwork and irregular-shaped formwork. The test results were compared with those by FEM analysis. As a result, the test agrees well with the analysis.

• The KIPS Transactions:PartD
• /
• v.10D no.7
• /
• pp.1189-1196
• /
• 2003

Owing to the developed If industry, many people are more and more interested in Workflow which is an automated business processing system. In this paper, we present basic structures and various parallel processing structures of a workflow using EMFG (Extended Mark Flow Graph) that makes conceptional design available. And then, We design a workflow with EMFG. We propose the commitability verification method to check whether a workflow can complete or not and the logical bug verification method to find whether invalid components exist or not by using simulation result of it. The proposed EMFG modeling and analysis method for a workflow make it possible to become a visual and formal design. Also, it makes intuitional and mathematical analysis possible.

• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.10
• /
• pp.164-171
• /
• 1999

An optimum blank design technology is required for near-net of net-shape cold forming using sheets. Originally, the backward tracing scheme has been developed for preform design in bulk forming, and applied to several forming processes successfully. Its key concept is to trace backward from the final desirable configuration to an intermediate preform of initial blocker. A program for initial blank design in sheet forming which contains the capabilities of forward loading simulation by the finite element method and backward tracing simulation, has been developed and proved the effectiveness by applying to a square cup stamping process. In the blank design of square cup stamping, the backward tracing program can produce an optimum blank configuration which forms a sound net-shape cup product without machining after forming. Another general application appears in the blank design of a cup stamping with protruding flanges, one of typical automobile components. The blank configurations derived by backward tracing simulation have been confirmed by a series of loading simulations. The approach or decision of an initial blank configuration presented in this study will be a milestone in fields of sheet forming process design.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.200-200
• /
• 2011

Although the cut-off probe, a precise measurement method for the electron density, is widely used in the industry, the physics on the wave spectrum of the cut-off is not understood yet, only cut-off point frequency containing the information of electron density has been analyzed well. This paper analyzes the microwave frequency spectrum of the cut-off probe to see the physics behind using both microwave field simulation (CST Microwave Studio) and simplified circuit simulation. The result shows that the circuit model well reproduces the cut-off wave spectrum especially in the low frequency regime where the wavelength of the driving frequency is larger than the characteristic length and reveals the physics of transmission characteristics with frequency as resonances between vacuum, plasma and sheath. Furthermore, by controlling the time domain in solver of the microwave simulator, the cut-off like transmission peaks above the cut-off frequency which has been believed as cavity effect is verified as chamber geometry effect. The result of this paper can be used as the basis for the improvement of cut-off probe.