• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.6
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• pp.64-70
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• 2006

The optical element was usually used in optical devices and optical transfer devices, but it has been recently used in communication, computer and medical equipment. With the development of very high speed optical-communication, the development of the kernel parts of optical communication has also increased. Presently, the alignment of the optical element is time consuming, and an effective alignment algorithm has not yet to be developed. In this paper, the alignment automation of the optical element is studied. The ultra precision stage is applied to an optical element alignment to improve the accuracy of the alignment. The automation program of the optical element alignment is developed by LabVIEW programming to save the alignment time. The alignment algorithms of the optical element consist of field search and peak search algorithms.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.1404-1408
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• 2006

In this paper, a hybrid-type vibration isolator which has air chamber(spring) and viscous damper in series is developed. The developed vibration isolator is designed to perform 3 following functions : spring function for normal operating conditions, damping function to reduce an impact for sudden move of upper beam, and finally leveling function. Based on the given natural frequency and damping factor, the design procedure is proposed. The performance of the developed isolator is tested by measuring stiffness and damping.

• Journal of the Semiconductor & Display Technology
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• v.6 no.1 s.18
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• pp.37-41
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• 2007

Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.54-59
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• 2005

Recently, the ultra-precision stage is widely used in the fields of the nano-technology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). In this paper, the ultra-precision stage which consists of flexure hinges, piezoelectric actuator, and ultra-precision linear encoder, is designed and developed. The guide mechanism which consisted of flexure hinges is analyzed by Finite Element Method. And we derived the transfer function of the system in 1st order system from step responses according to the magnitude. We performed simulation for the model to tune the control gain and applied the gains to the developed system. Experimental results found that the stage can be controlled in 5 nm resolution by PID controller.

• Proceedings of the Korean Society of Broadcast Engineers Conference
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• 2013.11a
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• pp.131-134
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• 2013

디지털 홀로그램 기록 방식에 있어서 기록하고자 하는 영상을 디지털화하는 작업과 더불어 영상을 필름에 투영시키기 위한 공간 광 변조기, 기록 광원을 생성하기 위한 광학 시스템 및 필름 이송을 담당하는 스테이지의 정밀한 제어가 필요하다. 본 논문에서는 디지털 홀로그래픽 기록 시스템을 개발함에 있어서 전체 운용 기능에 해당하는 제어 구조를 제안하고 제안된 구조의 기능과 구현된 결과를 통해 향후 개선 사항을 소개하고자 한다.

• Proceedings of the Korean Information Science Society Conference
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• 2003.10b
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• pp.625-627
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• 2003

본 논문에서는 정밀 측정 장비인 VMS(Video Measuring System)에서 줌을 서보 모터(servo motor)로 제어하는 자동화된 줌 렌즈 보정에 대하여 연구하였다. 이전의 자동화된 줌 렌즈의 연구들은 줌, 초점과 조리개 3 가지의 렌즈 설정에 대한 모든 카메라 파라미터들에 대하여 보정하였지만, VMS 의 자동화된 줌 렌즈의 보정은 줌의 렌즈 설정에 대해서만 보정한다. 줌 렌즈 설정에 의해 보정 되는 파라미터들은 줌에 따라 변화하는 이미지 중심과 픽셀 크기이다. 카메라의 외부 파라미터들을 제외한 이유는 VMS에서는 카메라가 움직이고 않고, 스테이지가 움직이면서 그에 따른 좌표 값을 주기 때문에 카메라의 이동과 회전에 대하여 보정할 필요가 없다. 줌을 조정하는 줌 단계가 많기 때문에 모든 줌 단계를 보정하기 위해서는 많은 시간과 노력이 든다. 본 논문에서는 보정 파라미터들을 최소 단계의 줌 렌즈 설정에 대하여 계산하고 계산되지 않은 영역들을 보간법으로 빠르고 효과적인 줌 렌즈 보정을 할 수 있는 방법을 제안하였다.

• Korean Journal of Optics and Photonics
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• v.32 no.2
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• pp.49-54
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• 2021

In this paper, we design and construct the equipment to manufacture large-diameter optical fiber end caps, which are the core parts of high-power fiber lasers, and we fabricate large-diameter optical fiber end caps using the home-made equipment. This equipment consists of a CO2 laser as a fusion-splice heat source, a precision stage assembly for transferring the position of a large-diameter optical fiber and an end cap, and a vision system used for alignment when the fusion splice is interlocked with the stage assembly. The output of the laser source is interlocked with the stage assembly to control the output, and the equipment is manufactured to align the polarization axis of the large-diameter polarization-maintaining optical fiber with the vision system. Optical fiber end caps were manufactured by laser fusion splicing of a large-diameter polarization-maintaining optical fiber with a clad diameter of 400 ㎛ and an end cap of 10×5×2 ㎣ (W×D×H) using home-made equipment. Signal-light insertion loss, polarization extinction ratio, and beam quality M2 of the fabricated large-diameter optical fiber end caps were measured to be 0.6%, 16.7 dB, and 1.21, respectively.