• 한국산학기술학회논문지
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• 제12권1호
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• pp.74-79
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• 2011

정렬 시스템(Alignment System)은 다축의 스테이지를 이용하여 신속하게 물체를 정렬오차 범위 내로 위치결정시키는 역할을 한다. 본 연구에서는 병렬구조로 설계하여 두께가 얇고 높은 정밀도와 더불어 강성이 높은 XY${\theta}$ 정렬 스테이지를 개발하였다. 개발된 박형 병렬구조 XY${\theta}$정렬 스테이지는 직각도, 반복정밀도, 진직도 등의 3가지 측정항목에 대해 초정밀급을 달성하였으며 반복정밀도는 $1{\mu}m$미만이다. 비전시스템 및 정렬알고리즘을 활용한 정렬성능 평가에서는 정렬오차 ${\pm}6.25{\mu}m$를 달성하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.266-266
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.232-232
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• 2004

최근 초고속 광통신 시스템이 발달함에 따라, 광통신 시스템 및 초고속 광통신 시스템의 핵심 부품인 평면도파로형 분배기(Splitter) 및 결합기(Coupler), 파장분할 다중화소자(WDM), AWG(Arrayed Wave Guide) 필터와 같은 소자부품 수요가 급격히 늘고 있다. 그러나 이러한 소자를 생산하는 공정은 수공적인 방법에 의존하여 생산성 향상을 위한 자동화에 대한 요구가 시급하다 특히 소자(Devices)와 광섬유(Optical fiber) 사이의 광학적인 정렬(Alignment)과 접속(Attachment) 공정은 부품 성능 및 생산성 향상, 그리고 비용절감을 위한 가장 핵심적인 문제로 대두되고 있다.(중략)

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.268-271
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• 2004

반도체 가공공정에서 웨이퍼의 정렬이나 각종 초정밀 가공에서 가공물의 각도를 미체 조정하기 위한 초정밀 메커니즘을 제안하였다. 일반적으로 각도를 결정하는 메커니즘은 기어를 이용한다. 기어를 이용할 경우 회전 분해능을 높일 수 있으나 기어의 백래쉬에 의한 오차가 있어 보다 높은 정밀도를 구현하기가 어렵다. 본 논문에서는 직접구동(direct drive) 방식과 이중서보(dual servo) 방식을 이용하여 기어를 사용하지 않고 회전 스테이지를 구현하였다.

• 한국생산제조학회지
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• 제20권6호
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• pp.756-760
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• 2011

This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.

• 한국정밀공학회지
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• 제22권12호
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• pp.175-183
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.

• 한국공작기계학회논문집
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• 제15권6호
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• pp.64-70
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• 2006

The optical element was usually used in optical devices and optical transfer devices, but it has been recently used in communication, computer and medical equipment. With the development of very high speed optical-communication, the development of the kernel parts of optical communication has also increased. Presently, the alignment of the optical element is time consuming, and an effective alignment algorithm has not yet to be developed. In this paper, the alignment automation of the optical element is studied. The ultra precision stage is applied to an optical element alignment to improve the accuracy of the alignment. The automation program of the optical element alignment is developed by LabVIEW programming to save the alignment time. The alignment algorithms of the optical element consist of field search and peak search algorithms.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.219-224
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• 2004

In recent years, as the demands of VBNS(Very high speed Backbone Network Service) and VDSL(Very high-data rate Digital Subscriber Line) increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, WDM elements increase. The alignment and the attachment technology are very important to fabricate the optical elements for communication. In this paper, the mechanism of rotational stage, the contact sensing unit, and integrated control circuit for the optical alignment system are studied.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.143-148
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• 2003

In recent years, as the optical Communication systems are developed, the demands of essential parts such as splitter, coupler, WDM, and AWG filter are grow rapidly. The fabrication process for them is not, however, automatic. On that reason, the automation is needed for the grow of productivity. The optical alignment and attach ment is the core process in fabrication. In this paper, the 6-axis rotary stage for multi-channel optical alignment system is developed and the dynamic characteristic of this system is studied.