• Title/Summary/Keyword: 접촉효율

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플라즈마 공정 진단을 위한 공간 분해 발광 분광 분석법 소개

  • Park, Chang-Hui;Kim, Dong-Hui;Choe, Seong-Won;Lee, Chang-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.81-81
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    • 2013
  • 반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

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Development of High Efficiency Dehumidifiers in low temperature (저온에서 고효율 제습기 개발)

  • Kim, Jong-Ryeol
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.9
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    • pp.206-211
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    • 2016
  • Various applications require dry air at low temperature, such automation equipment, semiconductor manufacturing, chemical production lines, and coating processes for the shipbuilding industry. Four evaporators for low temperature (below $0^{\circ}C$) were installed for a dehumidification system. Moist air is cooled sequentially over three evaporators. The first evaporator has an evaporation temperature of $13^{\circ}C$, that of the second evaporator is $5^{\circ}C$, and that of the third evaporator is maintained at $-1.3^{\circ}C$. In the fourth evaporator implantation thereby the moisture contained in the moisture air. A pressure regulator (CPCE 12) is used at this point and is defrosted when the vapor pressure is below a set value. The non-implantation moisture of the air is a heating system that uses the waste heat of a condenser with high temperature. It develops the cooling type's dehumidifier, which is important equipment that prevents the destruction of protein and measures the temperature and humidity at each interval by changing the front air velocity from 1.0 m/s to 4.0 m/s. The cooling capacity was also calculated. The greatest cooling capacity was 1.77 kcal/h for a front air velocity of 2.0 m/s

Method for Scale Effect on Front of Flood Wave Occurred by Levee Breach (제방붕괴로 인한 홍수파 선단의 축척효과 보정 방안)

  • Jeong, Seokil;Kim, Sooyoung;Lee, Seung Oh
    • Proceedings of the Korea Water Resources Association Conference
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    • 2016.05a
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    • pp.461-461
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    • 2016
  • 이상기후로 인하여 제방붕괴에 대한 위험성이 높아지고 있고, 이로 인해 발생하는 제내지 내 붕괴 홍수파에 대한 연구가 증가하고 있다. 특히 홍수파 선단의 이동 속도 추정은 제내지의 위험성을 예측하고, EAP 등을 수립하는데 매우 중요한 자료가 될 수 있다. 제내지에서의 선단 홍수파에 대한 예측을 하기 위해서는 해당 지역의 하천특성, 수리특성 및 제방 등 수공구조물 특성뿐만 아니라, 제내지의 지형 및 토지이용 현황 등을 조사하여 수리실험이나 수치모의를 수행해야 하는 것이 일반적이다. 수치해석의 경우 수리실험에 비하여 경제성 및 효율성 측면에서 뛰어날 수 있으나, 제방 붕괴과정 및 메커니즘을 반영하기가 불가능하다. 이에 반해 수리모형실험의 경우 제방붕괴 양상 및 그 과정의 재현이 가능하기 때문에, 제내지에서의 선단홍수파 전파에 관한 보다 정확한 양상을 파악할 수 있을 것이다. 그러나 이러한 실험은 실제 크기의 하천이 아닌 축소모형 또는 개수로에서 수행되었기 때문에, 초기 홍수파의 전파가 축척효과(Scale effect)의 영향을 받을 가능성이 매우 크다. 특히 선단 홍수파의 경우 파가 진행되면서 수심이 낮아지고, 유속이 느려지기 때문에 그 영향은 점차 증대된다고 할 수 있다. 이에 본 연구에서는 이러한 초기 선단 홍수파의 표면장력 영향을 고려한 보정 계수 산정에 대한 연구를 수리실험을 통해 수행하였다. 연구는 크게 4가지 과정으로 구성되었다. 첫째는 농도-표면장력의 관계 규명이며, 둘째는 표면장력-홍수파 전파 속도 관계 규명이다. 셋째는 표면장력과 Weber Number(We)의 관계를 도출하는 것이며, 마지막은 We를 이용하여 한계조건을 제시하는 것이다. 실험은 계면활성제의 농도를 변화시켜가며, 얇은 유리관(D=1.0 mm)에서 물의 상승 높이 및 접촉각을 측정하여 농도와 표면장력의 관계를 측정하였으며, 이러한 결과를 바탕으로 물의 표면장력을 변화시켜 가며 $0.5(B){\times}0.3(L){\times}0.2(H)m$의 Head-tank에 설치된 수문을 빠르게 개방하여, 홍수파가 퍼지는 양상을 관측하였다. 홍수파의 이동 속도는 진행시간에 따라서 퍼짐 넓이를 측정하여 제곱근을 취하는 방식으로 평균속도를 산정하였다. 이러한 관계를 이용하여 표면장력이 없을 경우의 이동속도 및 ??를 도출하였다. 본 연구를 통해 홍수파 전파 특성에 대한 수리실험 자료를 바탕으로 Weber 수를 도출하여 표면장력의 영향을 받는지 여부를 판단할 수 있으며, 표면장력의 영향을 받을 경우, 제시된 결과를 이용하여 홍수파 선단의 속도를 보정할 수 있다. 본 연구 결과는 토대로 축소모형으로 수행되는 홍수파 전파에 대한 수리실험결과의 보정 기초자료로 매우 유용할 것으로 판단된다.

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The Effect of Social Support of Chinese Hotel Employees on Psychological Well-Being - Focusing on 4, 5 Star Hotels in Shanghai - (중국 호텔 직원에 대한 사회적 지지가 심리적 안녕감에 미치는 영향 - 상하이 지역 4, 5 성급 호텔을 중심으로 -)

  • Jeong, Gap-Yeon
    • International Area Studies Review
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    • v.22 no.2
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    • pp.139-162
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    • 2018
  • Although the hotel industry in China has shown great growth both quantitatively and qualitatively, there is a lack of management of employees who represent hotels in direct contact with customers. Therefore, this study examined the social support of Chinese 4, 5 star hotel employees in Shanghai as supervisory support, coworker support, and family support, and examined whether the social support of employees improves resilience and affects their psychological well-being. In order to analyze this, we surveyed 322 employees of Shanghai 4, 5 star hotels in China. Empirical analysis showed that supervisory support and family support had a positive effect on their resilience, while coworker support did not. In addition, the resilience of hotel employees has a positive effect on their psychological well-being. This study aims to provide a better understanding of social support and resilience, and to provide effective management of human resources management.

Recent Progress and Perspectives of Solid Electrolytes for Lithium Rechargeable Batteries (리튬이차전지용 고체 전해질의 최근 진전과 전망)

  • Kim, Jumi;Oh, Jimin;Kim, Ju Young;Lee, Young-Gi;Kim, Kwang Man
    • Journal of the Korean Electrochemical Society
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    • v.22 no.3
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    • pp.87-103
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    • 2019
  • Nonaqueous organic electrolyte solution in commercially available lithium-ion batteries, due to its flammability, corrosiveness, high volatility, and thermal instability, is demanding to be substituted by safer solid electrolyte with higher cycle stability, which will be utilized effectively in large-scale power sources such as electric vehicles and energy storage system. Of various types of solid electrolytes, composite solid electrolytes with polymer matrix and active inorganic fillers are now most promising in achieving higher ionic conductivity and excellent interface contact. In this review, some kinds and brief history of solid electrolyte are at first introduced and consequent explanations of polymer solid electrolytes and inorganic solid electrolytes (including active and inactive fillers) are comprehensively carried out. Composite solid electrolytes including these polymer and inorganic materials are also described with their electrochemical properties in terms of filler shapes, such as particle (0D), fiber (1D), plane (2D), and solid body (3D). In particular, in all-solid-state lithium batteries using lithium metal anode, the interface characteristics are discussed in terms of cathode-electrolyte interface, anode-electrolyte interface, and interparticle interface. Finally, current requisites and future perspectives for the composite solid electrolytes are suggested by help of some decent reviews recently reported.

A Study on Agricultural Drought Monitoring using Drone Thermal and Hyperspectral Sensor (드론 열화상 및 초분광 센서를 이용한 농업가뭄 모니터링 적용 연구)

  • HAM, Geon-Woo;LEE, Jeong-Min;BAE, Kyoung Ho;PARK, Hong-Gi
    • Journal of the Korean Association of Geographic Information Studies
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    • v.22 no.3
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    • pp.107-119
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    • 2019
  • As the development of ICT and integration technology, many changes and innovations in agriculture field are implemented. The agricultural sector has shifted from a traditional industry to a new industrial form called the 6th industry combined with various advanced technologies such as ICT and IT. Various approaches have been attempted to analyze and predict crops based on spatial information. In particular, a variety of research has been carried out recently for crop cultivation and smart farms using drones. The goal of this study was to establish an agricultural drought monitoring system using drones to produce scientific and objective indicators of drought. A soil moisture sensor was installed in the drought area and checked the actual soil moisture. The soil moisture data was used by the reference value to compare and analyze the temperature and NDVI established by drones. The soil temperature by the drone thermal image sensor and the NDVI by the drone hyperspectral was analyzed the correlation between crop condition and soil moisture in study area. To verify this, the actual soil moisture was calculated using the soil moisture measurement sensor installed in the target area and compared with the drone performance. This study using drone drought monitoring system may enhance to promote the crop data and to save time and economy.

Comparative Evaluation on Collision and Particle Separation Efficiency between CO2 Bubbles and Air Bubbles Using Contact Zone Model of Flotation Process (부상분리 공정의 접촉영역 모델을 이용한 이산화탄소와 공기 기포의 충돌 및 입자 분리효율 비교 평가)

  • Yang, Jong-Won;Choi, Yong-Ho;Chae, In-Seok;Kim, Mi-Sug;Jeong, Yong-Hoon;Kim, Tae-Geum;Kwak, Dong-Heui
    • Journal of Korean Society on Water Environment
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    • v.35 no.1
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    • pp.64-71
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    • 2019
  • In recent years, carbon dioxide ($CO_2$) bubbles emerged as the most widely applied material with the recycling of sequestrated storage to decrease global warming. Flotation using $CO_2$ as an alternative to air could be effective in overcoming the high power consumption in the dissolved air flotation (DAF) process. The comparison of DAF and DCF system indicated that, the carbon dioxide flotation (DCF) system with pressurized $CO_2$ only requires 1.5 ~ 2.0 atm, while the DAF system requires 3.0 ~ 6.0 atm. In a bid to understand the characteristics of particle separation, the single collector collision (SCC) model was used and a series of simulations were conducted to compare the differences of collision and flotation between $CO_2$ bubbles and air bubbles. In addition, laboratory experiments were sequentially done to verify the simulation results of the SCC model. Based on the simulation results, surfactant injection, which is known to decrease bubble size, cloud improved the collision efficiency of $CO_2$ bubbles similar to that of air bubbles. Furthermore, the results of the flotation experiments showed similar results with the simulation of the SCC model under anionic surfactant injection. The findings led us to conclude that $CO_2$ bubbles can be an alternative to air bubbles and a promising material as a collector to separate particles in the water and wastewater.

Paradox of Meritocracy of the Social Welfare Organization in the Neoliberalism (사회복지 실천현장의 신자유주의적 성과주의 역설: 사회복지사의 경험을 중심으로)

  • Lee, In Sook
    • 한국사회정책
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    • v.24 no.1
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    • pp.239-275
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    • 2017
  • The purpose of this study is to explore what social workers experience and how they experience the needs of Meritocracy in the social welfare organization in the neoliberalism.. Therefore, in-depth interviews were conducted with 18 social workers, and I analyzed Colaizzi(1978) in a phenomenological method through collected research materials. As a result, the analysis is integrated in a total of four essential themes. According to the research results, the meritocracy - oriented phenomenon in the social welfare organization was 'paradox of Meritocracy'. Participants were buried in creating "nominal performance without any effectiveness" based on effectiveness and efficiency. Clients were instrumentalized in performance; moreover, they lost contact points with the field. Above all, there was "a reorganization of practices" that contradicted the original values of practice, in which the quality deterioration of service and the connection between organizations were weakened. In addition, the implementation of accountability of social welfare organization, which was intended by Meritocracy, has become a criterion for external evaluation, and the challenge of uncertain result has left a "rigid accountability without discretion." While participants were devoted to making a nominal performance, they failed to be guaranteed by the distinct characteristics of social welfare group. They experienced lost pride of the practitioner in the reality which contained the value of social welfare. However, in spite of this paradox of Meritocracy, participants demonstrated flexibility in order to preserve the original value and reached "a compromise with reality in the identity conflict." Based on the results of the research, I presented the discussion and policy directions.

Hydrophobicity and Adhesion of SiO2/Polyurethane Nanocomposites Topcoat for Aircraft De-icing with Different Pre-curing Time (선경화 시간에 따른 항공기 De-icing용 나노실리카/폴리우레탄 복합재료 탑코트의 소수성 및 접착특성 평가)

  • Kim, Jong-Hyun;Shin, Pyeong-Su;Kwon, Dong-Jun;Park, Joung-Man
    • Composites Research
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    • v.33 no.6
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    • pp.365-370
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    • 2020
  • The icing formation at aircraft occur problems such as increasing weight of the body, fuel efficiency reduction, drag reduction, the error of sensor, and etc. The viscosity of polyurethane (PU) topcoat was measured at 60℃ in real time to set the pre-curing time. SiO2 nanoparticles were dispersed in ethanol using ultra-sonication method. The SiO2/ethanol solution was sprayed on PU topcoat that was not cured fully with different pre-curing conditions. Surface roughness of SiO2/PU nanocomposites were measured using surface roughness tester and the surface roughness data was visualized using 3D mapping. The adhesion property between SiO2 and PU topcoat was evaluated using adhesion pull-off test. The static contact angle was measured using distilled water to evaluate the hydrophobicity. Finally, the pre-curing time of PU topcoat was optimized to exhibit the hydrophobicity of SiO2/PU topcoat.

Slope Stability for Bridge Access Road on Sedimentary Rocks using Geological Cross Sections (지질단면을 이용한 교량 접속도로 퇴적암 비탈면의 안정성 검토 연구)

  • Ihm, Myeong Hyeok
    • The Journal of the Convergence on Culture Technology
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    • v.8 no.1
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    • pp.507-512
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    • 2022
  • The subjects of the study are the sedimentary rock slope of the Mesozoic Gyeongsang Supergroup, which has a high risk of failure. The rocks of the slope shall be sandstone, siltstone and dacite, and discontinuities shall develop beddings, shear joints, extension joints, and dacite dyke boundary planes. The type and scale of failure varies depending on the type of rock and the strike/dip of the discontinuities, but the planar failure prevails. Based on the face-mapping data, SMR, physical and mechanical testing of rocks, the critical equilibrium analysis, all representative sections required a countermeasure method because the acceptable safety factor during dry and rainy seasons were far below Fs=1.5 and Fs=1.2. After applying the countermeasure method, both the dry and wet conditions of the slope exceeded the allowable safety factor. In particular, the face-mapping data of the slope-face, the geological cross-sections of several representative sections perpendicular to the slope-face, and the critical equilibrium analysis and the presentation of countermeasure methods that have been reviewed based on them are expected to be reasonable tools for the slope stability.